Abstract

A new dust detection system for use in vacuum that uses the multiple reflection of a semiconductor laser beam between spherical mirrors has been developed. This system generates an intense and continuous light beam, enabling the sizing and measurement of particles as small as 0.5 μm. Since multiple reflection is highly sensitive to small mirror inclinations, our system is designed to make such an adjustment simple by using a mirror translation technique. Suitable multiple reflection for dust detection is derived from the simulation of the multiple reflections and measurement of the actual intensity distribution of the beams.

© 1991 Optical Society of America

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