A pair of holographic distributed feedback dye lasers is used to generate 10-ps pulses at two selected wavelengths that are mixed in a BBO crystal to produce a pulse ~ 10 ps in duration at 193 nm. This seed pulse is subsequently amplified in an ArF* excimer laser to an energy of 10–15 mJ with < 40 μJ in amplified spontaneous emission. The pulses are nearly transform limited and diffraction limited.
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