Abstract

The photothermal deflection technique is used to study the infrared absorption of antireflection coatings on Ge and KCl substrates. The thin films deposited by the thermal resistance evaporation technique, both with and without ion-assisted deposition, are investigated. The experimental results show that Ar-ion bombardment with low energy can evidently reduce the absorption of the coatings.

© 1993 Optical Society of America

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