Abstract

We studied the surfaces of six precision-ground optical glass samples of fused silica, BK-7, BaCD16, LaC14, NbF1, and LHG8 glass, using a mechanical profiler, a photon tunneling microscope, and a scanning force microscope. The measured roughnesses of the scanning force microscope varied from 3.5 Å rms for BK-7 glass to 30 Å rms for LHG8 laser glass. Good agreement was obtained among the roughness values measured with all three instruments.

© 1997 Optical Society of America

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