Abstract

Multilayers for the water window region of the soft x rays have been prepared by pulsed laser ablation with amorphous Ni50Nb50 and amorphous C. The structural characterization of the multilayers, period d = 2.41 nm, shows that the interfaces are sharp with a roughness of only 0.4 nm that is chemical, not morphological, in origin. The interface roughness was found to be uncorrelated in the direction normal to the plane of the film. The normal incidence soft-x-ray reflectivity of the multilayer at 4.85-nm wavelength is 0.06%, 1 order of magnitude lower than the theoretically predicted value. However, the resolution limit λ/Δλ of the multilayer was found to be 16.7, close to the theoretically predicted value.

© 1997 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Alloy–ceramic oxide multilayer mirrors for water-window soft x rays

Satish Vitta, Martin Weisheit, Thorsten Scharf, and H.-U. Krebs
Opt. Lett. 26(18) 1448-1450 (2001)

Structure and scattering properties of Ni80Nb20-MgO water-window multilayer mirrors

Satish Vitta, Martin Weisheit, and Hans-Ulrich Krebs
Appl. Opt. 42(16) 3297-3304 (2003)

Normal-incidence reflectance of optimized W/B4C x-ray multilayers in the range 1.4 nm < λ < 2.4 nm

David L. Windt, Eric M. Gullikson, and Christopher C. Walton
Opt. Lett. 27(24) 2212-2214 (2002)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription