High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor

Abstract

We have developed a diffractive micromachined chopper (DMC) for an IR wavelength of ∼10 μm. This device operates mechanically by movable reflection grating beams. It modulates the diffraction efficiency by controlling the displacement of grating beams by an electrostatic force. For a CO₂ laser beam, a high modulation efficiency of 84% with an -0.8-dB small insertion loss was obtained by detecting 0th-order diffracted light. A novel pyroelectric IR microsensor with a DMC and a diffractive multilevel Si microlens was proposed and it demonstrated the detection of human existence.

© 1998 Optical Society of America

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