Abstract

The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer–sample–analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45° and at 45°, we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.

© 2006 Optical Society of America

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