Abstract

A multidirectional interferometer system has been proposed and developed to measure the position and orientation of a positioning stage. In this method the system parameters, such as positions of the corner-cube reflectors and directions of the rays in the interferometers, must be determined beforehand. However, it is difficult to find ways to determine the system parameters for each different system with necessary accuracy. This paper proposes a systematic method for calibrating the system parameters when the number of the interferometers is larger than the degrees of freedom of the stage. The method is verified for a two-dimensional stage by both simulation and experiment.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Measurement by multidirectional interferometers of the position and orientation of a positioning stage

Jie Zhang, Tetsuya Yamaguchi, Koichi Iwata, Hisao Kikuta, and Choong Sik Park
Appl. Opt. 42(28) 5661-5669 (2003)

Implementation of multidirectional moiré computerized tomography: multidirectional affine calibration

Yang Song, Jia Wang, Ying Jin, Zhenyan Guo, Yunjing Ji, Anzhi He, and Zhenhua Li
J. Opt. Soc. Am. A 33(12) 2385-2395 (2016)

Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters

Benyong Chen, Bin Xu, Liping Yan, Enzheng Zhang, and Yanna Liu
Opt. Express 23(7) 9052-9073 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (6)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (16)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription