Abstract

By using a prism of high refractive index, free-space cylindrical vector beams can be selectively converted into confined optical fields with large area, such as surface plasmon polaritons or waveguide modes, whose interference will produce optical features at the nanometer scale. Due to the polarization sensitivity of these modes, the macroscopic distribution of the confined field can be dynamically manipulated through an electronically driven liquid crystal. Based on these phenomena, a promising maskless interference nanolithography is proposed and experimentally demonstrated.

© 2014 Optical Society of America

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