Abstract

We improve the accuracy of distance measurements with synthetic-wavelength interferometry by referencing the spectral spacing of the free-running light sources to a high-precision radio-frequency oscillator. In addition, we increase the unambiguity range with a time-of-flight technique. Distances to scattering technical surfaces can be measured with micrometer accuracy and an unambiguity range of 1.17 m. The measurement rate amounts to 300 Hz.

© 2015 Optical Society of America

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