Abstract

This paper demonstrates the design and fabrication of a 128×128 micro-electro-mechanical systems Fabry–Perot (F–P) cavity filter array, which can be applied for the hyperspectral imager. To obtain better mechanical performance of the filters, F–P cavity supporting structures are analyzed by multi-physics finite element modeling. The simulation results indicate that Z-arm is the key component of the structure. The F–P cavity array with Z-arm structures was also fabricated. The experimental results show excellent parallelism of the bridge deck, which agree with the simulation results. A conclusion is drawn that Z-arm supporting structures are important to hyperspectral imaging system, which can achieve a large tuning range and high fill factor compared to straight arm structures. The filter arrays have the potential to replace the traditional dispersive element.

© 2015 Optical Society of America

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