Abstract

A lensless reflective point diffraction interferometer (LRPDI) is proposed for dynamic wavefront measurement. The point diffraction interferometer is integrated on a small substrate with properly designed thin film, which is used for generating the interferogram with high carrier frequency at a CCD target. By lensless imaging, the complex amplitude at the CCD target can be propagated to the conjugated plane of the exit pupil of an incident wavefront, which not only avoids the edge diffraction in the interferogram, but also eliminates systematic error. The accuracy of LRPDI is demonstrated by simulation and experiment, and a precision better than 1/150 wavelength is achieved. The new design with lensless imaging processing is suitable for dynamic wavefront measurement.

© 2016 Optical Society of America

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