Abstract

The impact of planetary design considerations for optical coating deposition is analyzed, including the ideal number of planets, variations in system performance, and the deviation of planet motion from the ideal. System capacity is maximized for four planets, although substrate size can significantly influence this result. Guidance is provided in the design of high-performance deposition systems based on the relative impact of different error modes. Errors in planet mounting such that the planet surface is not perpendicular to the axis of rotation are particularly problematic, suggesting planetary design modifications would be appropriate.

© 2016 Optical Society of America

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