Abstract

Phase-shifting infrared digital holographic microscopy based on a homemade all-fiber variable phase shifter is presented to quantitatively obtain the phase distribution of an object wave carrying the information of a transparent specimen in the infrared band. The all-fiber variable phase shifter, which consists of a tubular piezoelectric transducer (PZT) and a single-mode fiber, can accurately produce any phase shift between 0 and 2π by modulating the driving voltage of the tubular PZT. Taking measurements of different staircase structures on a silicon wafer as samples, two configurations are presented based on different phase-shifting implementations: one is a slight off-axis two-step phase shift and the other is an in-line four-step phase shift. The reconstructed results prove the validity of this method.

© 2017 Optical Society of America

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