Abstract

Accurate dimensional measurement of micro-milled items is a challenge and machine specifications do not include operational parameters in the workshop. Therefore, a verification test that shows the machine’s overall geometrical performance over its working area would help machine users in the assessment and adjustment of their equipment. In this study, we present an optical technique capable of finding micro-milled features at submicron uncertainty over working areas >10  cm2. The technique relies on an ultra-precision measurement microscope combined with advanced image analysis to get the center of gravity of milled cross-shaped features at subpixel levels. Special algorithms had to be developed to handle the disturbing influence of burr and milling marks. The results show repeatability, reproducibility, and axis straightness for three micro-milling facilities and also discovered an unknown 2 μm amplitude undulation in one of them.

© 2017 Optical Society of America

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