Abstract

The purpose of this paper is to characterize the spherical aberration of a microscope objective lens by using diffraction light from nanosphere particles. The experimental image of the diffraction spot of a nanosphere is fitted with the Nijboer–Zernike model to estimate the spherical aberration. The method can easily be extended to the measurement of other and higher-order aberrations. Noticeable features of this new measurement technique are real-time measurements, simple structure, and flexibility, which lead it to measure optical aberrations with a good accuracy.

© 2017 Optical Society of America

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