Abstract

Co/C multilayers with a period thickness of 3.54 nm and 30 bilayers were deposited by direct current magnetron sputtering with different background pressures. The effects of residual background gases were investigated. The films were characterized by using grazing incidence hard x-ray reflectivity, soft x-ray reflectivity, and x-ray photoelectron spectroscopy. The results indicate that the x-ray reflectivity of Co/C multilayers decreases with increasing background pressure as well as the increasing interlayer roughness. The inclusion of more residual background air increases the interdiffusion of Co and C layers.

© 2016 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Improvement of interface structure and polarization performance of Co/C multilayers by incorporation of nitrogen

Mingwu Wen, Qiushi Huang, Shuang Ma, Wenbin Li, Rui She, Jichang Peng, Angelo Giglia, Igor V. Kozhevnikov, Hua Feng, Zhong Zhang, and Zhanshan Wang
Opt. Express 24(24) 27166-27176 (2016)

Structure and extreme ultraviolet performance of Si/C multilayers deposited under different working pressures

Qiang Yi, Qiushi Huang, Xiangmei Wang, Yang Yang, Xiaowei Yang, Zhong Zhang, Zhanshan Wang, Rongkun Xu, Taiping Peng, Hongjun Zhou, and Tonglin Huo
Appl. Opt. 56(4) C145-C150 (2017)

Performance of Co/Ti multilayers in a water window soft x-ray regime

Piyali Sarkar, Arup Biswas, Rajnarayan De, K. Divakar Rao, Subir Ghosh, M. H. Modi, Siju John, H. C. Barshilia, Dibyendu Bhattacharyya, and Naba Kishor Sahoo
Appl. Opt. 56(27) 7525-7532 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription