Abstract

A new grinding technology called fluid hydrodynamic fixed abrasive grinding (abbreviated as FHFAG process) is being proposed in this research. It combines the fixed abrasive grinding process and the fluid hydrodynamic theory. This research will examine the feasibility of applying the innovative process as an ultra-precision machining method for hard and brittle materials such as fused silica glass and silicon. It aimed to turn fixed abrasive grinding processing into a kind of deterministic surfacing processing method. Besides, the method could improve the machining efficiency and machining accuracy at the same time. Specifically, a thin liquid film between the grinding pad and the workpiece is introduced. The cutting depth based on one single grinding pad with a settled particle size can be controlled by controlling the thickness of the liquid film. From the machining mechanism, the grinding tool’s rotary speed and the original input pressure dominate the deterministic properties of the process. A special self-balancing device and a special fluid supply method which supply the grinding liquid from the center of the motorized spindle are proposed to realize the new processing technology. The grinding pad can float on the workpiece steadily from a preliminary experiment result. It is clearly demonstrated that the FHFAG process can be used as a deterministic processing method if the identified working parameters are well controlled.

© 2017 Optical Society of America

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