Abstract

A new evaluation method based on fuzzy theory was proposed to assess the manufacturing efficiency and accuracy of continuous phase plates (CPPs) with magnetorheological finishing imprinting. Two-dimensional sinusoidal waves were employed to verify the effectiveness of the proposed method theoretically and experimentally in terms of two parameters, error root mean square and processing time, which indicate the accuracy and efficiency of CPP manufacture. The weight factor was used for balancing the priorities of processing time and accuracy in our method. The simulations and experiments were compared based on our proposed method. The results show that the optimum removal functions for various spatial periods result in good agreement between simulations and experiments, and furthermore, relative errors are 6.07%, 2.62%, and 6.00% for CPPs with spatial periods of 12 mm, 18 mm, and 30 mm, respectively. All the results indicate that the method provides a valid and feasible way to select an optimized removal function for imprinting the patterns of CPPs.

© 2018 Optical Society of America

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