Abstract

In order to perform an exact surface profile measurement with a white-light scanning interferometer (WLSI), an actual optical path difference (OPD) changing with time is detected with an additional interferometer in which the light source of the WLSI and an optical band-pass filter are used. This interferometer is simply equipped in the WLSI and does not negatively influence the WLSI. The real OPD is easily calculated from an interference signal with the same signal processing as that in the WLSI. The interference signal of the WLSI is corrected with the real OPD values or the real scanning position values. The corrected interference signal with a constant sampling interval is obtained with an interpolation method. With this correction method, a surface profile with a step shape of 3-μm height is measured accurately with an error less than 2 nm.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Utilization of complex-valued signals in a white-light scanning interferometer for accurate measurement of a surface profile

Songjie Luo, Osami Sasaki, Ziyang Chen, and Jixiong Pu
Appl. Opt. 56(15) 4419-4425 (2017)

Exact surface profile measurement without subtracting dispersion phase through Fourier transform in a white-light scanning interferometer

Songjie Luo, Osami Sasaki, Ziyang Chen, Samuel Choi, and Jixiong Pu
Appl. Opt. 57(4) 894-899 (2018)

Robust 3D surface recovery by applying a focus criterion in white light scanning interference microscopy

Hernando Altamar-Mercado, Alberto Patiño-Vanegas, and Andres G. Marrugo
Appl. Opt. 58(5) A101-A111 (2019)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription