Abstract

We fabricated a cost-effective mid-IR micropolarizer on a common Si substrate. To improve the transmittance of Si, we performed a double oxidation on the silicon substrate. The SiO2-Si-SiO2 structure improved the transmittance of Si from 54% to 63%–83%. Then, the mid-IR micropolarizer with multidirectional gratings was fabricated using a soft nanoimprint process followed by the thermal evaporation of Al. Experimental measurements showed a transverse magnetic transmittance in the range of 61%–80% at wavelengths of 4–5 μm, and the extinction ratio was greater than 19 dB.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Infrared micropolarizer array fabricated using a reversal nanoimprint

Xiangwei Zeng, Jinkui Chu, Weidong Kang, and Ran Zhang
Appl. Opt. 57(7) 1530-1533 (2018)

Large-area flexible infrared nanowire grid polarizer fabricated using nanoimprint lithography

Weidong Kang, Jinkui Chu, Xiangwei Zeng, and Yuanyi Fan
Appl. Opt. 57(18) 5230-5234 (2018)

SU-8 nanoimprint fabrication of wire-grid polarizers using deep-UV interference lithography

Junxin Wang, Yun Zhao, Imad Agha, and Andrew M. Sarangan
Opt. Lett. 40(19) 4396-4399 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription