Abstract

Three-dimensional (3D) confocal x-ray fluorescence analysis technology is widely used, but the quantitative analysis of elemental spatial distributions of solid samples is complicated. This paper explores a quantitative analysis method that can be applied to solid samples. Fluorescence spectra of liquid samples are obtained on a 3D confocal x-ray fluorescence spectrometer. Curves are plotted showing the relationships between the fluorescence count intensity and the mass percentage of metal ions, and the respective fitting-curve equations are determined according to the curve morphology. Fluorescence intensity as a function of the mass percentage and depth position is derived from the samples for a particular acquisition time. These data play a potential role in the subsequent quantitative analysis of unknown mass percentages of solid samples.

© 2019 Optical Society of America

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