Abstract

Silicon micropore optics using deep reactive ion etching of silicon wafers has been being developed for future x-ray astronomy missions. Sidewalls of the micropores through a thin wafer with a typical thickness of hundreds of micrometers and a pore width of 20μm are used for x-ray mirrors. However, burr structures observed after etching with a typical height of a few micrometers at the micropore edges are known to significantly reduce x-ray reflectivity. A new grinding and chemical mechanical polishing process is introduced to remove the burr structures. Both sides of the silicon wafer were ground and precisely polished after etching. X-ray reflectivity measurements confirmed an increase of reflectivity by 2–15 times at incident angles of 0.8–0.2 deg. The surface microroughness worsened from 2.0±0.2nmrms to 7.80.8+0.6nmrms; however, an additional annealing recovered the smooth surface and the estimated surface microroughness was <1.4nmrms. This new process enables not only removing the burr structures but also choosing a flat part of the sidewalls for better angular resolution.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition

Tomohiro Ogawa, Yuichiro Ezoe, Teppei Moriyama, Ikuyuki Mitsuishi, Takuya Kakiuchi, Takaya Ohashi, Kazuhisa Mitsuda, and Matti Putkonen
Appl. Opt. 52(24) 5949-5956 (2013)

Development of an alternating magnetic-field-assisted finishing process for microelectromechanical systems micropore x-ray optics

Raul E. Riveros, Hitomi Yamaguchi, Ikuyuki Mitsuishi, Utako Takagi, Yuichiro Ezoe, Fumiki Kato, Susumu Sugiyama, Noriko Yamasaki, and Kazuhisa Mitsuda
Appl. Opt. 49(18) 3511-3521 (2010)

Pt thermal atomic layer deposition for silicon x-ray micropore optics

Kazuma Takeuchi, Yuichiro Ezoe, Kumi Ishikawa, Masaki Numazawa, Masaru Terada, Daiki Ishi, Maiko Fujitani, Mark J. Sowa, Takaya Ohashi, and Kazuhisa Mitsuda
Appl. Opt. 57(12) 3237-3243 (2018)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription