Abstract

Shape accuracy is an important parameter for evaluating the quality of microlens arrays. In fast tool servo (FTS) diamond turning, the generation of tool path has a significant influence on shape accuracy. By analyzing the distribution of the cutting points at the edge of the lenslets and the linearization error of the original tool path generated by the constant-angle method for the microlens array, there is overcut at the edge of the lenslets. Previous tool path planning focused on consideration of the entire surface, and the error on the edge of the lens was rarely considered. Therefore, an optimization method of tool path generation based on interpolation of the lens edge is proposed. Compared to the tool path generated by the conventional constant-angle method, the simulation and experimental results show that the proposed method can effectively reduce the overcut of the lens edge.

© 2019 Optical Society of America

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