Abstract

The ellipsometer described herein uses a He–Ne laser as monochromatic light source, and, in the analysis system, a sensitive elliptic detector namely the Bravais-Zakrzewski-Perucca biplate. The use of this biplate allows better accuracy in measurements. Furthermore, a method of measuring and evaluating the results is described which includes, but is not limited to, conventional methods.

© 1969 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Accurate alignment of optical axes of a biplate using a spectroscopic Mueller matrix ellipsometer

Honggang Gu, Xiuguo Chen, Hao Jiang, Chuanwei Zhang, Weiqi Li, and Shiyuan Liu
Appl. Opt. 55(15) 3935-3941 (2016)

Effects of component imperfections on ellipsometer calibration

William Ralph Hunter
J. Opt. Soc. Am. 63(8) 951-957 (1973)

Proposal for a fast, high-sensitivity ellipsometer for plasma polarimetry

S. E. Segre
J. Opt. Soc. Am. 72(1) 167-168 (1982)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription