Abstract

In high resolution imaging devices, smaller aperture in the color filter causes cross talk which provides incorrect information. Plasmonic color filters (PCFs) have been reported as an alternative of the conventional color resist based-color filter (CRCF) and many studies on PCFs demonstrated the filtering function by PCFs with a sub-micron size. In this work, we investigated the cross talk performance of PCFs compared to CRCFs. The effect of cross talk over distance from the filter were measured for each filter. Despite poorer spectral filtering characteristics, PCFs were more robust against cross talk than CRCFs. Also, the further away from the filter, the more cross talk appeared. As a result, PCFs showed less cross talk than CRCFs at about 82% of the results measured at a distance of 2~10 μm. This study will help to make practical use of PCFs in high-resolution imaging applications.

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Other (24)

P. A. H. Hart, T. Va 'T Hof, and F. M. KlaassenDevice down scaling and expected circuit performanceIEEE J. Solid-State Circuits197914343357

M. Mori, M. Katsuno, S. Kasuga, T. Murata, and T. Yamaguchi1/4-inch 2-mpixel MOS image sensor with 1.75 transistors/pixelIEEE J. Solid-State Circuits20043924262430

A. P. Chandrakasan and R. W. BrodersenMinimizing power consumption in digital CMOS circuitsProc. IEEE199583498523

E. J. Nowak, I. Aller, T. Ludwing, K. Kim, R. V. Joshi, C. T. Chuang, K. Bernstein, and R. PuriTurning silicon on its edge [double gate CMOS/FinFET technology]IEEE Circuits Devices Mag.2004202031

G. Agranov, V. Berezin, and R. H. TsaiCrosstalk and microlens study in a color CMOS image sensorIEEE Trans. Electron Devices200350411

B. E. A. Saleh and M. C. TeichFundamentals of PhotonicsJohn Wiley & SonsUSA20192Chapter 4

L. Frey, P. Parrein, J. Raby, C. Pellé, D. Hérault, M. Marty, and J. MichailosColor filters including infrared cut-off integrated on CMOS image sensorOpt. Express2011191307313080

S. Nishiwaki, T. Nakamura, M. Hiramoto, T. Fujii, and M. SuzukiEfficient colour splitters for high-pixel-density image sensorsNat. Photonics20137240246

S. Yokogawa, S. P. Burgos, and H. A. AtwaterPlasmonic color filters for CMOS image sensor applicationsNano Lett.20121243494354

W. L. Barnes, A. Dereux, and T. W. EbbesenSurface plasmon subwavelength opticsNature2003424824830

S. J. Tan, L. Zhang, D. Zhu, X. M. Goh, Y. M. Wang, K. Kumar, C. W. Qiu, and J. K. W. YangPlasmonic color palettes for photorealistic printing with aluminum nanostructuresNano Lett.20141440234029

H. S. Lee, Y. T. Yoon, S. S. Lee, S. H. Kim, and K. D. LeeColor filter based on a subwavelength patterned metal gratingOpt. Express2007151545715463

C. Genet and T. W. EbbesenLight in tiny holesNature20074453946

T. W. Ebbesen, H. J. Lezaec, H. F. Ghaemi, T. Thio, and P. A. WolfExtraordinary optical transmission through subwavelength hole arraysNature1998391667669

Y. S. DoA highly reproducible fabrication process for large-area plasmonic filters for optical applicationsIEEE Access201866896168967

Y. S. Do and K. C. ChoiPoly-periodic hole arrays for angle-invariant plasmonic filtersOpt. Lett.20154038733876

S. P. Chang, Y. S. Do, J. W. Kim, B. Y. Hwang, J. N. Choi, B. H. Choi, Y. H. Lee, K. C. Cho, and B. K. JuPhoto-insensitive amorphous oxide thin-film transistor integrated with a plasmonic filter for transparent electronicsAdv. Funct. Mater.20142434823487

Y. S. Do and K. C. ChoiQuantitative interpretation of extraordinary optical transmission affected by dielectric overlayersJ. Opt.201416065005065010

Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. ChoiPlasmonic color filter and its fabrication method for large area applicationsAdv. Opt. Mater.20131133138

Y. S. Do and K. C. ChoiMatching surface plasmon modes in symmetry-broken structures for nanohole-based plasmonic color filterIEEE Photonics Technol. Lett.20132524542457

B. E. BayerColor imaging arrayU.S. Patent19763971065

Lumerical Solution Inc.Lumerical FDTD solutionFDTD Solution2019Jul.29https://www.lumerical.com/products/fdtd/Aug. 5, 2019

Y. Yu, Q. Chen, L. Wen, X. Hu, and H. ZhangSpatial optical crosstalk in CMOS image sensors integrated with plasmonic color filtersOpt. Express2015232199422003

H. F. Ghaemi, T. Thio, D. E. Grupp, T. W. Ebbesen, and H. J. LezecSurface plasmons enhance optical transmission through subwavelength holesPhys. Rev. B19985867796782

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