Abstract

New generation of thin-film transistors (TFTs), where the active material is amorphous oxide, conjugated polymer, or small molecules, have the advantage of flexibility, high form factor, and large scale manufacturability through low cost processing techniques, e.g., roll-to-roll printing, screen printing. During high-throughput production using these techniques, the probability of defects being present increases with the speed of manufacturing and area of devices. Therefore a high-throughput and low cost testing technique is absolute essential to maintain high quality of final product. We report a Simultaneous Multiple Device Testing (SMuDT) approach which is up to 10 times faster and cost effective than conventional testing methods. The SMuDT approach was validated using circuit simulation and demonstrated by testing large scale indium gallium zinc oxide (IGZO) TFTs. A method to ‘bin’ the tested devices using Figure of Merit was established.

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  1. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, "Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors," Nature 432, 488-492 (2004).
  2. E. Fortunato, P. Barquinha, R. Martins, "Oxide semiconductor thin-film transistors: A review of recent advances," Adv. Mater. 24, 2945-86 (2012).
  3. K. Miura, T. Ueda, N. Saito, "Flexible AMOLED display driven by amorphous InGaZnO TFTs," 2013 20th Int. Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 2013) KyotoJapan (2013)K. Miura, T. Ueda, N. Saito, "Flexible AMOLED display driven by amorphous InGaZnO TFTs," 2013 20th Int. Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 2013) (2013).
  4. J. Y. Kwon, "Bottom-gate gallium indium zinc oxide thin-film transistor array for high-resolution AMOLED DISPLAY," IEEE Electron Device Lett. 29, 1309-1311 (2008).
  5. I. Osborne, M. Lavine, R. Coontz, "Looking beyond silicon," Sci. 327, 1595-1595 (2010).
  6. A. J. Flewitt, Handbook of Visual Display Technology (Springer, 2012).
  7. H. Sirringhaus, "High-resolution inkjet printing of all-polymer transistor circuits," Science 290, 2123-2126 (2000).
  8. T. Kamiya, H. Hosono, "Material characteristics and applications of transparent amorphous oxide semiconductors," NPG Asia Mater. 2, 15-22 (2010).
  9. C. D. Sheraw, T. N. Jackson, D. L. Eaton, J. E. Anthony, "Functionalized pentacene active layer organic thin-film transistors," Adv. Mater. 15, 2009-2011 (2003).
  10. K. Jain, M. Klosner, M. Zemel, S. Raghunandan, "Flexible electronics and displays: High-resolution, roll-to-roll, projection lithography and photoablation processing technologies for high-throughput production," Proc. IEEE 93, 1500-1510 (2005).
  11. S. H. Ahn, L. J. Guo, "High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates," Adv. Mater. 20, 2044-2049 (2008).
  12. S. H. Ahn, L. J. Guo, "Large-area roll-to-roll and roll-to-plate nanoimprint lithography: A step toward high-throughput application of continuous nanoimprinting," ACS Nano 3, 2304-2310 (2009).
  13. G. Bao, "Challenges in low cost test approach for ARM core based mixed-signal SoC dragonball-MX1," Int. Test Conf. (2003) pp. 512-510.
  14. S. Lee, S. Jeon, A. Nathan, "Modeling sub-threshold current-voltage characteristics in thin film transistors," J. Display Technol. 9, 883-889 (2013).
  15. W. Rieutort-Louis, L. Huang, Y. Hu, S.-R. Josue, W. Sigurd, J. C. Sturm, N. Verma, "A figure of merit for oscillator-based thin-film circuits on plastic for high-performance signaling, energy harvesting and driving of actuation circuits," 70th Annu. Device Res. Conf. (DRC) (2012) pp. 117-118.

2013 (1)

S. Lee, S. Jeon, A. Nathan, "Modeling sub-threshold current-voltage characteristics in thin film transistors," J. Display Technol. 9, 883-889 (2013).

2012 (1)

E. Fortunato, P. Barquinha, R. Martins, "Oxide semiconductor thin-film transistors: A review of recent advances," Adv. Mater. 24, 2945-86 (2012).

2010 (2)

I. Osborne, M. Lavine, R. Coontz, "Looking beyond silicon," Sci. 327, 1595-1595 (2010).

T. Kamiya, H. Hosono, "Material characteristics and applications of transparent amorphous oxide semiconductors," NPG Asia Mater. 2, 15-22 (2010).

2009 (1)

S. H. Ahn, L. J. Guo, "Large-area roll-to-roll and roll-to-plate nanoimprint lithography: A step toward high-throughput application of continuous nanoimprinting," ACS Nano 3, 2304-2310 (2009).

2008 (2)

S. H. Ahn, L. J. Guo, "High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates," Adv. Mater. 20, 2044-2049 (2008).

J. Y. Kwon, "Bottom-gate gallium indium zinc oxide thin-film transistor array for high-resolution AMOLED DISPLAY," IEEE Electron Device Lett. 29, 1309-1311 (2008).

2005 (1)

K. Jain, M. Klosner, M. Zemel, S. Raghunandan, "Flexible electronics and displays: High-resolution, roll-to-roll, projection lithography and photoablation processing technologies for high-throughput production," Proc. IEEE 93, 1500-1510 (2005).

2004 (1)

K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, "Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors," Nature 432, 488-492 (2004).

2003 (1)

C. D. Sheraw, T. N. Jackson, D. L. Eaton, J. E. Anthony, "Functionalized pentacene active layer organic thin-film transistors," Adv. Mater. 15, 2009-2011 (2003).

2000 (1)

H. Sirringhaus, "High-resolution inkjet printing of all-polymer transistor circuits," Science 290, 2123-2126 (2000).

ACS Nano (1)

S. H. Ahn, L. J. Guo, "Large-area roll-to-roll and roll-to-plate nanoimprint lithography: A step toward high-throughput application of continuous nanoimprinting," ACS Nano 3, 2304-2310 (2009).

Adv. Mater. (1)

S. H. Ahn, L. J. Guo, "High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates," Adv. Mater. 20, 2044-2049 (2008).

Adv. Mater. (2)

E. Fortunato, P. Barquinha, R. Martins, "Oxide semiconductor thin-film transistors: A review of recent advances," Adv. Mater. 24, 2945-86 (2012).

C. D. Sheraw, T. N. Jackson, D. L. Eaton, J. E. Anthony, "Functionalized pentacene active layer organic thin-film transistors," Adv. Mater. 15, 2009-2011 (2003).

IEEE Electron Device Lett. (1)

J. Y. Kwon, "Bottom-gate gallium indium zinc oxide thin-film transistor array for high-resolution AMOLED DISPLAY," IEEE Electron Device Lett. 29, 1309-1311 (2008).

J. Display Technol. (1)

S. Lee, S. Jeon, A. Nathan, "Modeling sub-threshold current-voltage characteristics in thin film transistors," J. Display Technol. 9, 883-889 (2013).

Nature (1)

K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, H. Hosono, "Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors," Nature 432, 488-492 (2004).

NPG Asia Mater. (1)

T. Kamiya, H. Hosono, "Material characteristics and applications of transparent amorphous oxide semiconductors," NPG Asia Mater. 2, 15-22 (2010).

Proc. IEEE (1)

K. Jain, M. Klosner, M. Zemel, S. Raghunandan, "Flexible electronics and displays: High-resolution, roll-to-roll, projection lithography and photoablation processing technologies for high-throughput production," Proc. IEEE 93, 1500-1510 (2005).

Sci. (1)

I. Osborne, M. Lavine, R. Coontz, "Looking beyond silicon," Sci. 327, 1595-1595 (2010).

Science (1)

H. Sirringhaus, "High-resolution inkjet printing of all-polymer transistor circuits," Science 290, 2123-2126 (2000).

Other (4)

A. J. Flewitt, Handbook of Visual Display Technology (Springer, 2012).

K. Miura, T. Ueda, N. Saito, "Flexible AMOLED display driven by amorphous InGaZnO TFTs," 2013 20th Int. Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 2013) KyotoJapan (2013)K. Miura, T. Ueda, N. Saito, "Flexible AMOLED display driven by amorphous InGaZnO TFTs," 2013 20th Int. Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD 2013) (2013).

G. Bao, "Challenges in low cost test approach for ARM core based mixed-signal SoC dragonball-MX1," Int. Test Conf. (2003) pp. 512-510.

W. Rieutort-Louis, L. Huang, Y. Hu, S.-R. Josue, W. Sigurd, J. C. Sturm, N. Verma, "A figure of merit for oscillator-based thin-film circuits on plastic for high-performance signaling, energy harvesting and driving of actuation circuits," 70th Annu. Device Res. Conf. (DRC) (2012) pp. 117-118.

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