Abstract

The difficulties involved in the analysis of systematic errors in polarization-modulation ellipsometry are greater than those met in the simpler static case. The complexity of the expressions involved in such an error analysis requires the use of computer techniques. The theory of polarization-modulation ellipsometry for systems of perfect components is presented in terms of the Jones calculus. A modified Jones calculus, capable of handling the difficulties peculiar to computer analysis of polarization-modulation ellipsometry, is developed. Examples are given to illustrate the construction of matrices in this modified calculus, which are appropriate to various typical imperfect components. As an application, the modified calculus is used to identify, and compensate for, the effects of a partially polarizing detector upon one of the signals monitored in polarization-modulation ellipsometry.

© 1973 Optical Society of America

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