Abstract

In this paper, the performance of a germanium-doped silicon optical phase shifter with vertical PN junction has been investigated. The proposed phase shifter is simulated using a process simulation tool, and 2D carrier distribution has been used to calculate the phase shifter performance metrics. The designed phase shifter is integrated into a Mach–Zehnder interferometer structure, and the transfer characteristics are plotted. The proposed phase shifter has a phase shift of 141°/mm, VπLπ of 0.64V·cm, insertion loss of 1.23dB, and 3 dB bandwidth of 37GHz at 5 V reverse bias.

© 2019 Optical Society of America

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