Abstract

We report spontaneous formation of 10-μm-scale periodic patterns in transverse-scanning femtosecond (fs) laser processing inside a glass substrate. The formation of the periodic patterns was critically dependent on the distance of the focus from the back surface; they formed only when fs pulses were focused slightly inside (∼ a few micrometers) from the back surface. The periods ranged from 7 to 16 μm, which is much longer than the distance between neighboring irradiation spots (0.1–1 μm in the present experiments), the diameter of the individual modified spots (about 2 μm), and the wavelength (0.8 μm). The patterns formed without any intentional modulation; just by scanning the sample at a constant speed during irradiation of fs laser pulses. The dependence on scanning speed and repetition rate of the laser were also investigated, and a possible formation scenario for this “long” periodic pattern was described.

© 2015 Optical Society of America

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    [Crossref]
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    [Crossref]
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    [Crossref]
  4. N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring,” Appl. Surf. Sci. 254, 2364–2368 (2008).
    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]
  25. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “3-D optical storage inside transparent materials,” Opt. Lett. 21, 2023–2025 (1996).
    [Crossref] [PubMed]

2013 (2)

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

S. Richter, S. Döring, F. Burmeister, F. Zimmermann, A. Tünnermann, and S. Nolte, “Formation of periodic disruptions induced by heat accumulation of femtosecond laser pulses,” Opt. Express 21, 15452–63 (2013).
[Crossref] [PubMed]

2012 (3)

G. Miyaji, K. Miyazaki, K. Zhang, T. Yoshifuji, and J. Fujita, “Mechanism of femtosecond-laser-induced periodic nanostructure formation on crystalline silicon surface immersed in water,” Opt. Express 20, 14848 (2012).
[Crossref] [PubMed]

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24, 042006 (2012).
[Crossref]

P. S. Salter and M. J. Booth, “Dynamic control of directional asymmetry observed in ultrafast laser direct writing,” Appl. Phys. Lett. 101, 141109 (2012).
[Crossref]

2011 (2)

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Y. Bellouard and M.-O. Hongler, “Femtosecond-laser generation of self-organized bubble patterns in fused silica,” Opt. Express 19, 6807–6821 (2011).
[Crossref] [PubMed]

2010 (2)

2009 (2)

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

2008 (3)

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring,” Appl. Surf. Sci. 254, 2364–2368 (2008).
[Crossref]

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

S. M. Eaton, H. Zhang, M. L. Ng, J. Li, W.-J. Chen, S. Ho, and P. R. Herman, “Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides,” Opt. Express 16, 9443 (2008).
[Crossref] [PubMed]

2007 (2)

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

2005 (3)

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, “Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica,” Opt. Lett. 30, 1867–1869 (2005).
[Crossref] [PubMed]

2003 (1)

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett. 91, 247405 (2003).
[Crossref]

2002 (1)

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197, 891–895 (2002).
[Crossref]

1999 (1)

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

1996 (2)

1994 (1)

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

Adams, D. E.

Apolonski, A.

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Arai, A.

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

Arenholz, E.

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

Backus, S.

Bellouard, Y.

Benayas, A.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Bhardwaj, V. R.

Block, E.

Bonse, J.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24, 042006 (2012).
[Crossref]

Booth, M. J.

P. S. Salter and M. J. Booth, “Dynamic control of directional asymmetry observed in ultrafast laser direct writing,” Appl. Phys. Lett. 101, 141109 (2012).
[Crossref]

Bovatsek, J.

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

Bricchi, E.

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

Brown, W. D.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

Brueckner, H.

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Buerle, D.

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

Burmeister, F.

Callan, J. P.

Chen, F.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Chen, W.-J.

Cheng, Y.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

Chichkov, B.

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Corkum, P. B.

Costache, F.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197, 891–895 (2002).
[Crossref]

Davis, K. M.

Döring, S.

Dubov, M.

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Durfee, C. G.

Eaton, S. M.

Fernandez, A.

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Finlay, R. J.

Fujita, J.

Fujita, K.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

Glezer, E. N.

Graf, R.

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Hashimoto, S.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Heitz, J.

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

Henyk, M.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197, 891–895 (2002).
[Crossref]

Her, T.-H.

Herman, P. R.

Hirao, K.

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett. 91, 247405 (2003).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731 (1996).
[Crossref] [PubMed]

Hnatovsky, C.

Ho, S.

Höhm, S.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24, 042006 (2012).
[Crossref]

Hongler, M.-O.

Huang, L.

Huang, M.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

Ishida, Y.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Jacinto, C.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Jaque, D.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Kamata, M.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Kanehira, S.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

Kar, A. K.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Kazansky, P. G.

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett. 91, 247405 (2003).
[Crossref]

Kiuchi, J.

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring,” Appl. Surf. Sci. 254, 2364–2368 (2008).
[Crossref]

Kiyama, S.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Kleinfeld, D.

Krüger, J.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24, 042006 (2012).
[Crossref]

Li, J.

Malshe, A. P.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

Matsuo, S.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Mazur, E.

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, “3-D optical storage inside transparent materials,” Opt. Lett. 21, 2023–2025 (1996).
[Crossref] [PubMed]

Milosavljevic, M.

Miura, K.

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731 (1996).
[Crossref] [PubMed]

Miyaji, G.

Miyazaki, K.

G. Miyaji, K. Miyazaki, K. Zhang, T. Yoshifuji, and J. Fujita, “Mechanism of femtosecond-laser-induced periodic nanostructure formation on crystalline silicon surface immersed in water,” Opt. Express 20, 14848 (2012).
[Crossref] [PubMed]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring,” Appl. Surf. Sci. 254, 2364–2368 (2008).
[Crossref]

Molian, P. A.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

Ng, M. L.

Nolte, S.

Obara, G.

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

Obara, M.

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Okada, T.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Ozkan, A. M.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

Pandelov, S. V.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197, 891–895 (2002).
[Crossref]

Phillips, H. M.

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

Psaila, N. D.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Qiu, J.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett. 91, 247405 (2003).
[Crossref]

Railkar, T. A.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

Rajesh, S.

Rayner, D. M.

Reid, D. T.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Reif, J.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197, 891–895 (2002).
[Crossref]

Richter, S.

Ródenas, A.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Rosenfeld, A.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24, 042006 (2012).
[Crossref]

Sakakura, M.

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

Salter, P. S.

P. S. Salter and M. J. Booth, “Dynamic control of directional asymmetry observed in ultrafast laser direct writing,” Appl. Phys. Lett. 101, 141109 (2012).
[Crossref]

Sauerbrey, R.

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

Shimizu, H.

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

Shimotsuma, Y.

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett. 91, 247405 (2003).
[Crossref]

Shirk, M. D.

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

Si, J.

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

Silva, W. F.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Simova, E.

Squier, J. A.

Sugimoto, N.

Takahashi, T.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Tan, Y.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Taylor, R. S.

Terakawa, M.

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

Thomsom, R. R.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Tomita, T.

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

Toratani, E.

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Torchia, G. A.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Tünnermann, A.

Vázquez de Aldana, J.

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Vitek, D. N.

Xu, N.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

Xu, Z.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

Yang, W.

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

Yasumaru, N.

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring,” Appl. Surf. Sci. 254, 2364–2368 (2008).
[Crossref]

Yoshifuji, T.

Zhang, H.

Zhang, K.

Zhao, F.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

Zimmermann, F.

ACS Nano (1)

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3, 4062–4070 (2009).
[Crossref] [PubMed]

Appl. Phys. A (2)

J. Heitz, E. Arenholz, D. Buerle, R. Sauerbrey, and H. M. Phillips, “Femtosecond excimer-laser-induced structure formation on polymers,” Appl. Phys. A 59, 289–293 (1994).
[Crossref]

A. Benayas, W. F. Silva, A. Ródenas, C. Jacinto, J. Vázquez de Aldana, F. Chen, Y. Tan, R. R. Thomsom, N. D. Psaila, D. T. Reid, G. A. Torchia, A. K. Kar, and D. Jaque, “Ultrafast laser writing of optical waveguides in ceramic Yb:YAG: a study of thermal and non-thermal regimes,” Appl. Phys. A 104, 301–309 (2011).
[Crossref]

Appl. Phys. B (1)

R. Graf, A. Fernandez, M. Dubov, H. Brueckner, B. Chichkov, and A. Apolonski, “Pearl-chain waveguides written at megahertz repetition rate,” Appl. Phys. B 87, 21–27 (2007).
[Crossref]

Appl. Phys. Express (1)

H. Shimizu, G. Obara, M. Terakawa, E. Mazur, and M. Obara, “Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces,” Appl. Phys. Express 6, 112701 (2013).
[Crossref]

Appl. Phys. Lett. (5)

A. M. Ozkan, A. P. Malshe, T. A. Railkar, W. D. Brown, M. D. Shirk, and P. A. Molian, “Femtosecond laser-induced periodic structure writing on diamond crystals and microclusters,” Appl. Phys. Lett. 75, 3716 (1999).
[Crossref]

P. G. Kazansky, W. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, ““Quill” writing with ultrashort light pulses in transparent materials,” Appl. Phys. Lett. 90, 151120 (2007).
[Crossref]

W. Yang, P. G. Kazansky, Y. Shimotsuma, M. Sakakura, K. Miura, and K. Hirao, “Ultrashort-pulse laser calligraphy,” Appl. Phys. Lett. 93, 171109 (2008).
[Crossref]

P. S. Salter and M. J. Booth, “Dynamic control of directional asymmetry observed in ultrafast laser direct writing,” Appl. Phys. Lett. 101, 141109 (2012).
[Crossref]

E. Toratani, M. Kamata, and M. Obara, “Self-fabrication of void array in fused silica by femtosecond laser processing,” Appl. Phys. Lett. 87, 171103 (2005).
[Crossref]

Appl. Surf. Sci. (2)

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197, 891–895 (2002).
[Crossref]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring,” Appl. Surf. Sci. 254, 2364–2368 (2008).
[Crossref]

J. Appl. Phys. (1)

T. Okada, T. Tomita, S. Matsuo, S. Hashimoto, Y. Ishida, S. Kiyama, and T. Takahashi, “Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation,” J. Appl. Phys. 106, 054307 (2009).
[Crossref]

J. Laser Appl. (1)

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24, 042006 (2012).
[Crossref]

Nano Lett. (1)

S. Kanehira, J. Si, J. Qiu, K. Fujita, and K. Hirao, “Periodic nanovoid structures via femtosecond laser irradiation,” Nano Lett. 5, 1591–1595 (2005).
[Crossref] [PubMed]

Opt. Express (6)

Opt. Lett. (3)

Phys. Rev. Lett. (1)

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett. 91, 247405 (2003).
[Crossref]

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Figures (4)

Fig. 1
Fig. 1 a) Explanation of the meaning of the z value. b) Optical micrographs of fs laser modified patterns at different focus position. The values in the left indicate the relative position (in μm) of the sample with respect to the focusing objective lens. c) Scanning electron micrograph of the back surface irradiated at z=4 μm.
Fig. 2
Fig. 2 Scanning speed v dependence of fs laser modified patterns with fixed pulse repetition rate of F=1 kHz.
Fig. 3
Fig. 3 Scanning speed v and repetition rate F dependence of fs laser modified lines.
Fig. 4
Fig. 4 Proposed scheme of formation of long-periodic pattern. The gray region corresponds to the modified region (brighter region observed in the experiments), and the thickness of the region corresponds to the degree of increase in density.

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