Abstract

Two-color double-fs-pulse experiments were performed on silicon wafers to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS). A Mach-Zehnder interferometer generated parallel or cross-polarized double-pulse sequences at 400 and 800 nm wavelength, with inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Multiple two-color double-pulse sequences were collinearly focused by a spherical mirror to the sample. The resulting LIPSS characteristics (periods, areas) were analyzed by scanning electron microscopy. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS. These two-color experiments extend previous single-color studies and prove the importance of the ultrafast energy deposition for LIPSS formation.

© 2015 Optical Society of America

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2014 (4)

R. Buividas, M. Mikutis, and S. Juodkazis, “Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances,” Prog. Quantum Electron. 38(3), 119–156 (2014).
[Crossref]

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

G. D. Tsibidis, E. Stratakis, P. A. Loukakos, and C. Fotakis, “Controlled ultrashort-pulse laser-induced ripple formation on semiconductors,” Appl. Phys., A. 114(1), 57–68 (2014).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

2013 (10)

A. Mouskeftaras, S. Guizard, N. Fedorov, and S. Klimentov, “Mechanisms of femtosecond laser ablation of dielectrics revealed by double pump-probe experiment,” Appl. Phys., A Mater. Sci. Process. 110(3), 709–715 (2013).
[Crossref]

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica,” Appl. Phys. Lett. 102(5), 054102 (2013).
[Crossref]

R. D. Murphy, B. Torralva, D. P. Adams, and S. M. Yalisove, “Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si,” Appl. Phys. Lett. 103(14), 141104 (2013).
[Crossref]

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation,” Appl. Surf. Sci. 278(1), 7–12 (2013).
[Crossref]

X. Shi, L. Jiang, X. Li, S. Wang, Y. Yuan, and Y. Lu, “Femtosecond laser-induced periodic structure adjustments based on electron dynamics control: from subwavelength ripples to double-grating structures,” Opt. Lett. 38(19), 3743–3746 (2013).
[Crossref] [PubMed]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

M. Huang, Y. Cheng, and Z. Xu, “The significant role of plasmonic effects in femtosecond laser-induced grating fabrication on the nanoscale,” Ann. Phys. (Berlin) 525(1–2), 74–86 (2013).
[Crossref]

A. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photon. Rev. 7(3), 385–407 (2013).
[Crossref]

2012 (2)

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24(4), 042006 (2012).
[Crossref]

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

2011 (3)

J. Bonse, A. Rosenfeld, and J. Krüger, “Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures,” Appl. Surf. Sci. 257(12), 5420–5423 (2011).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

2010 (2)

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

J. Bonse and J. Krüger, “Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon,” J. Appl. Phys. 108(3), 034903 (2010).
[Crossref]

2009 (1)

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface Plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[Crossref]

2007 (1)

G. Miyaji, W. Kobayashi, and K. Miyazaki, “Femtosecond-laser-induced nanostructure formation and surface modification of diamond-like carbon film,” Electrochim. Acta 53(1), 167–170 (2007).
[Crossref]

2005 (1)

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

2002 (1)

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

2000 (1)

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[Crossref]

1983 (1)

J. Sipe, J. Young, J. Preston, and H. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B 27(2), 1141–1154 (1983).
[Crossref]

1982 (1)

Adams, D. P.

R. D. Murphy, B. Torralva, D. P. Adams, and S. M. Yalisove, “Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si,” Appl. Phys. Lett. 103(14), 141104 (2013).
[Crossref]

Arguirov, T.

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

Audouard, E.

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

Bajt, S.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Barty, A.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Baudach, S.

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

Bogan, M.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Bonse, J.

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation,” Appl. Surf. Sci. 278(1), 7–12 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica,” Appl. Phys. Lett. 102(5), 054102 (2013).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24(4), 042006 (2012).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

J. Bonse, A. Rosenfeld, and J. Krüger, “Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures,” Appl. Surf. Sci. 257(12), 5420–5423 (2011).
[Crossref]

J. Bonse and J. Krüger, “Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon,” J. Appl. Phys. 108(3), 034903 (2010).
[Crossref]

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface Plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[Crossref]

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

Bostedt, C.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Bounhalli, M.

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

Boutet, S.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Buividas, R.

R. Buividas, M. Mikutis, and S. Juodkazis, “Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances,” Prog. Quantum Electron. 38(3), 119–156 (2014).
[Crossref]

Cavalleri, A.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Chapman, H.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Chen, H. X.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Cheng, Y.

M. Huang, Y. Cheng, and Z. Xu, “The significant role of plasmonic effects in femtosecond laser-induced grating fabrication on the nanoscale,” Ann. Phys. (Berlin) 525(1–2), 74–86 (2013).
[Crossref]

Das, S. K.

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

Derrien, T. J.-Y.

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

Düsterer, S.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Ehrke, H.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Faure, N.

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

Fedorov, N.

A. Mouskeftaras, S. Guizard, N. Fedorov, and S. Klimentov, “Mechanisms of femtosecond laser ablation of dielectrics revealed by double pump-probe experiment,” Appl. Phys., A Mater. Sci. Process. 110(3), 709–715 (2013).
[Crossref]

Feng, D. H.

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

Forster, M.

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

Fotakis, C.

G. D. Tsibidis, E. Stratakis, P. A. Loukakos, and C. Fotakis, “Controlled ultrashort-pulse laser-induced ripple formation on semiconductors,” Appl. Phys., A. 114(1), 57–68 (2014).
[Crossref]

Frank, M.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Grunwald, R.

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

Guizard, S.

A. Mouskeftaras, S. Guizard, N. Fedorov, and S. Klimentov, “Mechanisms of femtosecond laser ablation of dielectrics revealed by double pump-probe experiment,” Appl. Phys., A Mater. Sci. Process. 110(3), 709–715 (2013).
[Crossref]

Guo, C.

A. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photon. Rev. 7(3), 385–407 (2013).
[Crossref]

Hajdu, J.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Hau-Riege, S.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

He, X. K.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Herzlieb, M.

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

Hoener, M.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Höhm, S.

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation,” Appl. Surf. Sci. 278(1), 7–12 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica,” Appl. Phys. Lett. 102(5), 054102 (2013).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24(4), 042006 (2012).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

Huang, M.

M. Huang, Y. Cheng, and Z. Xu, “The significant role of plasmonic effects in femtosecond laser-induced grating fabrication on the nanoscale,” Ann. Phys. (Berlin) 525(1–2), 74–86 (2013).
[Crossref]

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Itina, T. E.

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

Jia, T. Q.

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Jia, X.

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

Jiang, L.

Juodkazis, S.

R. Buividas, M. Mikutis, and S. Juodkazis, “Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances,” Prog. Quantum Electron. 38(3), 119–156 (2014).
[Crossref]

Kautek, W.

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

Klimentov, S.

A. Mouskeftaras, S. Guizard, N. Fedorov, and S. Klimentov, “Mechanisms of femtosecond laser ablation of dielectrics revealed by double pump-probe experiment,” Appl. Phys., A Mater. Sci. Process. 110(3), 709–715 (2013).
[Crossref]

Kobayashi, W.

G. Miyaji, W. Kobayashi, and K. Miyazaki, “Femtosecond-laser-induced nanostructure formation and surface modification of diamond-like carbon film,” Electrochim. Acta 53(1), 167–170 (2007).
[Crossref]

Krüger, J.

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation,” Appl. Surf. Sci. 278(1), 7–12 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica,” Appl. Phys. Lett. 102(5), 054102 (2013).
[Crossref]

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24(4), 042006 (2012).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

J. Bonse, A. Rosenfeld, and J. Krüger, “Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures,” Appl. Surf. Sci. 257(12), 5420–5423 (2011).
[Crossref]

J. Bonse and J. Krüger, “Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon,” J. Appl. Phys. 108(3), 034903 (2010).
[Crossref]

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface Plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[Crossref]

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

Kuroda, H.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Lenzner, M.

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

Li, R. X.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Li, X.

Liu, J. M.

Loukakos, P. A.

G. D. Tsibidis, E. Stratakis, P. A. Loukakos, and C. Fotakis, “Controlled ultrashort-pulse laser-induced ripple formation on semiconductors,” Appl. Phys., A. 114(1), 57–68 (2014).
[Crossref]

Lu, Y.

Marchesini, S.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Mikutis, M.

R. Buividas, M. Mikutis, and S. Juodkazis, “Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances,” Prog. Quantum Electron. 38(3), 119–156 (2014).
[Crossref]

Miyaji, G.

G. Miyaji, W. Kobayashi, and K. Miyazaki, “Femtosecond-laser-induced nanostructure formation and surface modification of diamond-like carbon film,” Electrochim. Acta 53(1), 167–170 (2007).
[Crossref]

Miyazaki, K.

G. Miyaji, W. Kobayashi, and K. Miyazaki, “Femtosecond-laser-induced nanostructure formation and surface modification of diamond-like carbon film,” Electrochim. Acta 53(1), 167–170 (2007).
[Crossref]

Möller, T.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Mouskeftaras, A.

A. Mouskeftaras, S. Guizard, N. Fedorov, and S. Klimentov, “Mechanisms of femtosecond laser ablation of dielectrics revealed by double pump-probe experiment,” Appl. Phys., A Mater. Sci. Process. 110(3), 709–715 (2013).
[Crossref]

Murphy, R. D.

R. D. Murphy, B. Torralva, D. P. Adams, and S. M. Yalisove, “Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si,” Appl. Phys. Lett. 103(14), 141104 (2013).
[Crossref]

Muth, M.

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

Peng, N. N.

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

Phipps, C.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Preston, J.

J. Sipe, J. Young, J. Preston, and H. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B 27(2), 1141–1154 (1983).
[Crossref]

Qiu, J. R.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Redlin, H.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Reif, J.

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

Rohloff, M.

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

Rosandi, Y.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Rosenfeld, A.

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation,” Appl. Surf. Sci. 278(1), 7–12 (2013).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica,” Appl. Phys. Lett. 102(5), 054102 (2013).
[Crossref]

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon,” Opt. Express 21(24), 29643–29655 (2013).
[Crossref] [PubMed]

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24(4), 042006 (2012).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

J. Bonse, A. Rosenfeld, and J. Krüger, “Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures,” Appl. Surf. Sci. 257(12), 5420–5423 (2011).
[Crossref]

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface Plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[Crossref]

Schulz, J.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Seibert, M.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Shi, X.

Shymanovich, U.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Sipe, J.

J. Sipe, J. Young, J. Preston, and H. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B 27(2), 1141–1154 (1983).
[Crossref]

Sokolowski-Tinten, K.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[Crossref]

Stoian, R.

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

Stojanovic, N.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Stratakis, E.

G. D. Tsibidis, E. Stratakis, P. A. Loukakos, and C. Fotakis, “Controlled ultrashort-pulse laser-induced ripple formation on semiconductors,” Appl. Phys., A. 114(1), 57–68 (2014).
[Crossref]

Sun, Z. R.

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

Tobey, R.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Torralva, B.

R. D. Murphy, B. Torralva, D. P. Adams, and S. M. Yalisove, “Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si,” Appl. Phys. Lett. 103(14), 141104 (2013).
[Crossref]

Treusch, R.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Tsibidis, G. D.

G. D. Tsibidis, E. Stratakis, P. A. Loukakos, and C. Fotakis, “Controlled ultrashort-pulse laser-induced ripple formation on semiconductors,” Appl. Phys., A. 114(1), 57–68 (2014).
[Crossref]

Urbassek, H. M.

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

van Driel, H.

J. Sipe, J. Young, J. Preston, and H. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B 27(2), 1141–1154 (1983).
[Crossref]

Varlamova, O.

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

von der Linde, D.

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[Crossref]

Vorobyev, A.

A. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photon. Rev. 7(3), 385–407 (2013).
[Crossref]

Wang, S.

Xu, Z.

M. Huang, Y. Cheng, and Z. Xu, “The significant role of plasmonic effects in femtosecond laser-induced grating fabrication on the nanoscale,” Ann. Phys. (Berlin) 525(1–2), 74–86 (2013).
[Crossref]

Xu, Z. Z.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Yalisove, S. M.

R. D. Murphy, B. Torralva, D. P. Adams, and S. M. Yalisove, “Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si,” Appl. Phys. Lett. 103(14), 141104 (2013).
[Crossref]

Young, J.

J. Sipe, J. Young, J. Preston, and H. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B 27(2), 1141–1154 (1983).
[Crossref]

Yuan, Y.

Zhang, J.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

Zhang, S. A.

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

Zhao, F. L.

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

AIP Conf. Proc. (1)

K. Sokolowski-Tinten, A. Barty, S. Boutet, U. Shymanovich, H. Chapman, M. Bogan, S. Marchesini, S. Hau-Riege, N. Stojanovic, J. Bonse, Y. Rosandi, H. M. Urbassek, R. Tobey, H. Ehrke, A. Cavalleri, S. Düsterer, H. Redlin, M. Frank, S. Bajt, J. Schulz, M. Seibert, J. Hajdu, R. Treusch, C. Bostedt, M. Hoener, T. Möller, and C. Phipps, “Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV-scattering,” AIP Conf. Proc. 1278(1), 373–379 (2010).
[Crossref]

Ann. Phys. (Berlin) (1)

M. Huang, Y. Cheng, and Z. Xu, “The significant role of plasmonic effects in femtosecond laser-induced grating fabrication on the nanoscale,” Ann. Phys. (Berlin) 525(1–2), 74–86 (2013).
[Crossref]

Appl. Phys. Lett. (3)

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica,” Appl. Phys. Lett. 102(5), 054102 (2013).
[Crossref]

R. D. Murphy, B. Torralva, D. P. Adams, and S. M. Yalisove, “Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si,” Appl. Phys. Lett. 103(14), 141104 (2013).
[Crossref]

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation,” Appl. Phys. Lett. 103(25), 254101 (2013).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (4)

T. J.-Y. Derrien, J. Krüger, T. E. Itina, S. Höhm, A. Rosenfeld, and J. Bonse, “Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes,” Appl. Phys., A Mater. Sci. Process. 117(1), 77–81 (2014).
[Crossref]

A. Mouskeftaras, S. Guizard, N. Fedorov, and S. Klimentov, “Mechanisms of femtosecond laser ablation of dielectrics revealed by double pump-probe experiment,” Appl. Phys., A Mater. Sci. Process. 110(3), 709–715 (2013).
[Crossref]

S. Höhm, M. Rohloff, A. Rosenfeld, J. Krüger, and J. Bonse, “Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences,” Appl. Phys., A Mater. Sci. Process. 110(3), 553–557 (2013).
[Crossref]

J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner, “Femtosecond laser ablation of silicon - modification thresholds and morphology,” Appl. Phys., A Mater. Sci. Process. 74(1), 19–25 (2002).
[Crossref]

Appl. Phys., A. (1)

G. D. Tsibidis, E. Stratakis, P. A. Loukakos, and C. Fotakis, “Controlled ultrashort-pulse laser-induced ripple formation on semiconductors,” Appl. Phys., A. 114(1), 57–68 (2014).
[Crossref]

Appl. Surf. Sci. (3)

J. Bonse, A. Rosenfeld, and J. Krüger, “Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures,” Appl. Surf. Sci. 257(12), 5420–5423 (2011).
[Crossref]

S. Höhm, A. Rosenfeld, J. Krüger, and J. Bonse, “Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation,” Appl. Surf. Sci. 278(1), 7–12 (2013).
[Crossref]

J. Reif, O. Varlamova, M. Bounhalli, M. Muth, and T. Arguirov, “Nanostructure formation upon femtosecond ablation from silicon: Effect of double pulses,” Appl. Surf. Sci. 258(23), 9491–9495 (2012).
[Crossref]

Electrochim. Acta (1)

G. Miyaji, W. Kobayashi, and K. Miyazaki, “Femtosecond-laser-induced nanostructure formation and surface modification of diamond-like carbon film,” Electrochim. Acta 53(1), 167–170 (2007).
[Crossref]

J. Appl. Phys. (4)

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface Plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[Crossref]

X. Jia, T. Q. Jia, N. N. Peng, D. H. Feng, S. A. Zhang, and Z. R. Sun, “Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging,” J. Appl. Phys. 115(14), 143102 (2014).
[Crossref]

M. Rohloff, S. K. Das, S. Höhm, R. Grunwald, A. Rosenfeld, J. Krüger, and J. Bonse, “Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences,” J. Appl. Phys. 110(1), 014910 (2011).
[Crossref]

J. Bonse and J. Krüger, “Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon,” J. Appl. Phys. 108(3), 034903 (2010).
[Crossref]

J. Laser Appl. (1)

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Laser Appl. 24(4), 042006 (2012).
[Crossref]

Laser Photon. Rev. (1)

A. Vorobyev and C. Guo, “Direct femtosecond laser surface nano/microstructuring and its applications,” Laser Photon. Rev. 7(3), 385–407 (2013).
[Crossref]

Opt. Express (1)

Opt. Lett. (2)

Phys. Chem. Chem. Phys. (1)

M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, “Periodic nanoscale structures on polyimide surfaces generated by temporally tailored femtosecond laser pulses,” Phys. Chem. Chem. Phys. 13(9), 4155–4158 (2011).
[Crossref] [PubMed]

Phys. Rev. B (3)

J. Sipe, J. Young, J. Preston, and H. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B 27(2), 1141–1154 (1983).
[Crossref]

T. Q. Jia, H. X. Chen, M. Huang, F. L. Zhao, J. R. Qiu, R. X. Li, Z. Z. Xu, X. K. He, J. Zhang, and H. Kuroda, “Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B 72(12), 125429 (2005).
[Crossref]

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[Crossref]

Prog. Quantum Electron. (1)

R. Buividas, M. Mikutis, and S. Juodkazis, “Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances,” Prog. Quantum Electron. 38(3), 119–156 (2014).
[Crossref]

Other (3)

T. H. Her, “Femtosecond-laser-induced periodic self-organized nanostructures,” in Comprehensive Nanoscience and Technology, Vol. 4, edited by G. Scholes and G. Wiederrecht, Chapter 4.10, (Elsevier, 2010).

S. Höhm, M. Herzlieb, A. Rosenfeld, J. Krüger, and J. Bonse, “Laser-induced periodic surface structures on fused silica upon cross-polarized two-color double-fs-pulse irradiation,” Appl. Surf. Sci. (published online 28 September 2014, in press).

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

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Figures (5)

Fig. 1
Fig. 1 Mach-Zehnder interferometer based experimental setup for the generation of double-fs-pulse irradiation sequences with two different wavelengths (400 and 800 nm) and parallel or crossed polarizations. Abbreviations: BS: beam splitter, BBO: barium borate crystal for frequency conversion, DM: dichroic mirror, λ/2: optional half-wave plate, ∆x: spatial translation, ∆t: temporal delay, c: speed of light.
Fig. 2
Fig. 2 Scanning electron micrographs (13.4 × 13.4 µm2) of the surface of silicon after irradiation by NDPS = 10 two-color double-fs-pulse sequences at four different delays [(a): Δt = −6.66 ps, (b): Δt = −0.06 ps, (c): Δt = + 0.06 ps, (d): Δt = + 6.66 ps]. The fluence of both pulses (IR/UV) was kept below the corresponding damage threshold [IR: F0,IR = 0.5 × Fth,IR(10), UV: F0,UV = 0.7 × Fth,UV(10)]. The red and blue double arrows in (a) indicate the orientation of the polarization of both pulses (IR and UV) for parallel (upper row) and cross-polarized (lower row) sequences.
Fig. 3
Fig. 3 LSFL period ΛLSFL upon irradiation with NDPS = 10 double-pulse sequences for a fixed peak fluence ratio between the IR- and the UV-pulses [IR: F0,IR = 0.5 × Fth,IR(10), UV: F0,UV = 0.7 × Fth,UV(10)] obtained by Fourier-analyses (1D/2D) as a function of the double-pulse delay Δt. The full circles indicate the most frequent period obtained from the (1D) power spectral density while the error bars visualize the entire period range deduced by 2D-Fourier transform of the SEM images.
Fig. 4
Fig. 4 LSFL rippled area ALSFL upon irradiation with NDPS = 10 double-pulse sequences for a fixed peak fluence ratio between the IR- and the UV-pulses [IR: F0,IR = 0.5 × Fth,IR(10), UV: F0,UV = 0.7 × Fth,UV(10)] obtained from SEM images as a function of the double-pulse delay Δt.
Fig. 5
Fig. 5 Schematic of SPP-based LIPSS formation upon two-color double-pulse irradiation of silicon. In each sub-figure (a)-(d) the lower graph visualizes the temporal intensity (I) arriving at the sample surface. The upper graph shows the corresponding electron density (Ne). Note that I is scaled linearly while Ne is scaled logarithmically. The wavelength dependent threshold densities for SPP excitation (NthSPP) are indicated by red (800 nm) and blue (400 nm) horizontal dashed lines. The hatched circles mark the moment of interference between the laser beam radiation and the laser-generated SPP (red: 800 nm, blue: 400 nm).

Tables (1)

Tables Icon

Table 1 Optical properties [n: refractive index, k: extinction coefficient] of single-crystalline silicon (c-Si) at the IR and UV laser wavelengths. Data taken from [30]. The optical penetration depth (1/α) was calculated from the absorption coefficient α = 4 × π × k/λ.

Equations (1)

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N th SPP ( λ )= m e * ε 0 [ e{ ε Si ( λ ) }+1 ] e 2 ( [ 2πc λ ] 2 + ν 2 ),

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