Abstract

We study the fabrication of photonic surface structures in single crystal diamond by means of highly controllable direct femtosecond UV laser induced periodic surface structuring. By appropriately selecting the excitation wavelength, intensity, number of impinging pulses and their polarization state, we demonstrate emerging high quality and fidelity diamond grating structures with surface roughness below 1.4 nm. We characterize their optical properties and study their potential for the fabrication of photonic structure anti-reflection coatings for diamond Raman lasers in the near-IR.

© 2017 Optical Society of America

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References

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  1. R. Mildren and J. Rabeau, Optical Engineering of Diamond (Wiley, 2013).
  2. R. J. Williams, D. J. Spence, O. Lux, and R. P. Mildren, “High-power continuous-wave Raman frequency conversion from 1.06 µm to 1.49 µm in diamond,” Opt. Express 25(2), 749–757 (2017).
    [Crossref] [PubMed]
  3. I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
  17. M. Shinoda, R. R. Gattass, and E. Mazur, “Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces,” J. Appl. Phys. 105(5), 053102 (2009).
    [Crossref]
  18. V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
    [Crossref] [PubMed]
  19. V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
    [Crossref]
  20. J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
    [Crossref]
  21. P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973).
    [Crossref]

2017 (2)

R. J. Williams, D. J. Spence, O. Lux, and R. P. Mildren, “High-power continuous-wave Raman frequency conversion from 1.06 µm to 1.49 µm in diamond,” Opt. Express 25(2), 749–757 (2017).
[Crossref] [PubMed]

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

2016 (1)

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

2015 (4)

C. S. R. Nathala, A. Ajami, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, T. Ganz, A. Assion, and W. Husinsky, “Experimental study of fs-laser induced sub-100-nm periodic surface structures on titanium,” Opt. Express 23(5), 5915–5929 (2015).
[Crossref] [PubMed]

V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
[Crossref]

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

S. Reilly, V. G. Savitski, H. Liu, E. Gu, M. D. Dawson, and A. J. Kemp, “Monolithic diamond Raman laser,” Opt. Lett. 40(6), 930–933 (2015).
[Crossref] [PubMed]

2014 (4)

A. M. Warrier, J. Lin, H. M. Pask, R. P. Mildren, D. W. Coutts, and D. J. Spence, “Highly efficient picosecond diamond Raman laser at 1240 and 1485 nm,” Opt. Express 22(3), 3325–3333 (2014).
[Crossref] [PubMed]

A. Sabella, J. A. Piper, and R. P. Mildren, “Diamond Raman laser with continuously tunable output from 3.38 to 3.80 μm,” Opt. Lett. 39(13), 4037–4040 (2014).
[Crossref] [PubMed]

A. McKay, O. Kitzler, and R. P. Mildren, “Simultaneous brightness enhancement and wavelength conversion to the eye-safe region in a high-power diamond Raman laser,” Laser Photonics Rev. 8(3), L37–L41 (2014).
[Crossref]

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

2011 (1)

2010 (2)

2009 (3)

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

M. Shinoda, R. R. Gattass, and E. Mazur, “Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces,” J. Appl. Phys. 105(5), 053102 (2009).
[Crossref]

2007 (1)

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

1973 (1)

P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973).
[Crossref]

Ajami, A.

Assion, A.

Baronowski, M.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Bass, M.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Bellucci, A.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Benayoun, S.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Bennett, J. M.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Bragheri, F.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Butler, J. E.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Calvani, P.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Chen, Y.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Cheng, Y.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

Clapham, P. B.

P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973).
[Crossref]

Clewes, S. L.

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

Coutts, D. W.

Datta, A.

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

Dawson, M. D.

Dewees, R. V.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Dhillon, H. K.

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

Feygelson, T.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Fourspring, K.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Friel, I.

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

Gamaly, E. G.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Ganz, T.

Gattass, R. R.

M. Shinoda, R. R. Gattass, and E. Mazur, “Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces,” J. Appl. Phys. 105(5), 053102 (2009).
[Crossref]

Girolami, M.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Gololobov, V. M.

V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
[Crossref]

Granados, E.

Gu, E.

Guenthner, A.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Harris, D. C.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Hawkins, S.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

He, X.

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

Huang, M.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

Husinsky, W.

Hutley, M. C.

P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973).
[Crossref]

Ionin, A. A.

Juodkazis, S.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Kemp, A. J.

Kitzler, O.

A. McKay, O. Kitzler, and R. P. Mildren, “Simultaneous brightness enhancement and wavelength conversion to the eye-safe region in a high-power diamond Raman laser,” Laser Photonics Rev. 8(3), L37–L41 (2014).
[Crossref]

Komlenok, M. S.

V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
[Crossref]

Kononenko, V. V.

V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
[Crossref]

Konov, V. I.

V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
[Crossref]

Kudryashov, S. I.

Lettino, A.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Lin, J.

Liu, H.

Lux, O.

Magana, S.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Makarov, S. V.

Martens, C.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Mazur, E.

M. Shinoda, R. R. Gattass, and E. Mazur, “Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces,” J. Appl. Phys. 105(5), 053102 (2009).
[Crossref]

McKay, A.

A. McKay, O. Kitzler, and R. P. Mildren, “Simultaneous brightness enhancement and wavelength conversion to the eye-safe region in a high-power diamond Raman laser,” Laser Photonics Rev. 8(3), L37–L41 (2014).
[Crossref]

Mildren, R. P.

Nam, W.

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

Nathala, C. S. R.

Orchard, D.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Orlando, S.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Osellame, R.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Pask, H. M.

Pentony, J.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Perkins, N.

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

Piper, J. A.

Raciukaitis, G.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Ratzke, M.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Reif, J.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Reilly, S.

Sabella, A.

Savitski, V. G.

Scarsbrook, G. A.

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

Seltzer, M. D.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Shinoda, M.

M. Shinoda, R. R. Gattass, and E. Mazur, “Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces,” J. Appl. Phys. 105(5), 053102 (2009).
[Crossref]

Spence, D. J.

Stankevic, V.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Stickley, C. M.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Thiel, D.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Traverso, L. M.

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

Trucchi, D. M.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Turri, G.

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Twitchen, D. J.

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

Uhlig, S.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Valentini, V.

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Valette, S.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Varlamova, O.

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Wang, X.

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Warrier, A. M.

Williams, R. J.

Xu, N.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

Xu, X.

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

Xu, Z.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

Zhao, F.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (1)

P. Calvani, A. Bellucci, M. Girolami, S. Orlando, V. Valentini, A. Lettino, and D. M. Trucchi, “Optical properties of femtosecond laser-treated diamond,” Appl. Phys., A Mater. Sci. Process. 117(1), 25–29 (2014).
[Crossref]

Appl. Surf. Sci. (1)

J. Reif, C. Martens, S. Uhlig, M. Ratzke, O. Varlamova, S. Valette, and S. Benayoun, “On large area LIPSS coverage by multiple pulses,” Appl. Surf. Sci. 336, 249–254 (2015).
[Crossref]

Diam. Rel. Mater. (1)

I. Friel, S. L. Clewes, H. K. Dhillon, N. Perkins, D. J. Twitchen, and G. A. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diam. Rel. Mater. 18(5–8), 808–815 (2009).
[Crossref]

J. Appl. Phys. (1)

M. Shinoda, R. R. Gattass, and E. Mazur, “Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces,” J. Appl. Phys. 105(5), 053102 (2009).
[Crossref]

Laser Photonics Rev. (1)

A. McKay, O. Kitzler, and R. P. Mildren, “Simultaneous brightness enhancement and wavelength conversion to the eye-safe region in a high-power diamond Raman laser,” Laser Photonics Rev. 8(3), L37–L41 (2014).
[Crossref]

Laser Phys. Lett. (1)

V. V. Kononenko, V. M. Gololobov, M. S. Komlenok, and V. I. Konov, “Nonlinear photooxidation of diamond surface exposed to femtosecond laser pulses,” Laser Phys. Lett. 12(9), 096101 (2015).
[Crossref]

Nature (1)

P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle,” Nature 244(5414), 281–282 (1973).
[Crossref]

Opt. Eng. (1)

G. Turri, Y. Chen, M. Bass, D. Orchard, J. E. Butler, S. Magana, T. Feygelson, D. Thiel, K. Fourspring, R. V. Dewees, J. M. Bennett, J. Pentony, S. Hawkins, M. Baronowski, A. Guenthner, M. D. Seltzer, D. C. Harris, and C. M. Stickley, “Optical absorption, depolarization, and scatter of epitaxial single-crystal chemical-vapor-deposited diamond at 1.064μm,” Opt. Eng. 46(6), 064002 (2007).
[Crossref]

Opt. Express (4)

Opt. Lett. (4)

Phys. Rev. B (1)

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79(12), 125436 (2009).
[Crossref]

Sci. Rep. (2)

X. He, A. Datta, W. Nam, L. M. Traverso, and X. Xu, “Sub-Diffraction Limited Writing based on Laser Induced Periodic Surface Structures (LIPSS),” Sci. Rep. 6(1), 35035 (2016).
[Crossref] [PubMed]

V. Stankevič, G. Račiukaitis, F. Bragheri, X. Wang, E. G. Gamaly, R. Osellame, and S. Juodkazis, “Laser printed nano-gratings: orientation and period peculiarities,” Sci. Rep. 7, 39989 (2017).
[Crossref] [PubMed]

Other (2)

A. Bennett and D. Twitchen, “Diamond — an engineer’s best friend,” in Proceedings of The European Conference on Lasers and Electro-Optics (Optical Society of America, 2015), paper CE_10_1.

R. Mildren and J. Rabeau, Optical Engineering of Diamond (Wiley, 2013).

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Figures (5)

Fig. 1
Fig. 1 Schematic layout of the femtosecond laser machining setup for processing diamond at 400 nm. HWP: Half-wave plate, PBS: Polarizing beam splitter, ND: Neutral density filter.
Fig. 2
Fig. 2 (a) LSFL structures as a function of scanning speed and laser fluence. (b) Morphology of the nano-ripples for different scanning speeds at a fixed fluence. Scale bar = 1 μm.
Fig. 3
Fig. 3 Structures generated at 4 J/cm2 and 200 μm/s. (a) Average and standard deviation of structure profile. (b) AFM scan of the irradiated area. (c) Line-out of the surface structures over 2 μm.
Fig. 4
Fig. 4 (a) Schematic of the multi-pass direct-laser nanostructuring over large areas. (b) FEG-SEM image of the produced highly ordered nano-ripples.
Fig. 5
Fig. 5 (a) Schematic of the simulated structure fitted from AFM measurements. (b) Computed dependence of the reflectance on wavelength and polarization of LIPSS surface and untreated diamond surface.

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