Abstract

We demonstrate the advantage of combining non-diffractive beam shapes and femtosecond bursts for volume laser processing of transparent materials. By re-distribution of the single laser pulse energy into several sub-pulses with 25 ns time delay, the energy deposition in the material can be enhanced significantly. Our combined experimental and theoretical analysis shows that in burst-mode detrimental defocusing by the laser generated plasma is reduced, and the non-diffractive beam shape prevails. At the same time, heat accumulation during the interaction with the burst leads to temperatures high enough to induce material melting and even in-volume cracks. In an exemplary case study, we demonstrate that the formation of these cracks can be controlled to allow high-speed and high-quality glass cutting.

© 2017 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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2017 (2)

L. Rapp, R. Meyer, L. Furfaro, C. Billet, R. Giust, and F. Courvoisier, “High speed cleaving of crystals with ultrafast Bessel beams,” Opt. Express 25, 9312–9317 (2017).
[Crossref] [PubMed]

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

2016 (5)

J. Dudutis, P. Gecys, and G. Raciukaitis, “Non-ideal axicon-generated Bessel beam application for intra-volume glass modification,” Opt. Express 24, 28433–28443 (2016).
[Crossref] [PubMed]

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J.-P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 244, 230–244 (2016).
[Crossref]

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 13102 (2016).
[Crossref]

F. Hendricks, V. V. Matylitsky, M. Domke, and H. Huber, “Time-resolved study of femtosecond laser induced micro-modifications inside transparent brittle materials,” Proc. of SPIE 9740, 97401A (2016).
[Crossref]

K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
[Crossref]

2015 (4)

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

A. R. Collins and G. M. O’Connor, “Mechanically inspired laser scribing of thin flexible glass,” Opt. Lett. 40, 4811–4814 (2015).
[Crossref] [PubMed]

O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
[Crossref]

D. Grojo, A. Mouskeftaras, P. Delaporte, and S. Lei, “Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared,” J. Appl. Phys. 117, 153105 (2015).
[Crossref]

2014 (3)

R. Kammel, R. Ackermann, J. Thomas, J. Götte, S. Skupin, A. Tünnermann, and S. Nolte, “Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing,” Light Sci. Appl. 3, e169 (2014).
[Crossref]

S. Garner, S. Glaesemann, and X. Li, “Ultra-slim flexible glass for roll-to-roll electronic device fabrication,” Appl. Phys. A 116, 403–407 (2014).
[Crossref]

M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
[Crossref]

2012 (1)

D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
[Crossref]

2011 (1)

J.-S. Park, H. Chae, H. K. Chung, and S. I. Lee, “Thin film encapsulation for flexible AM-OLED: a review,” Semicond. Sci. Tech. 26, 34001 (2011).
[Crossref]

2010 (2)

2009 (1)

J. Deubener, G. Helsch, A. Moiseev, and H. Bornhöft, “Glasses for solar energy conversion systems,” J. Eur. Ceram. Soc. 29, 1203–1210 (2009).
[Crossref]

2008 (3)

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).
[Crossref]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

O. Brzobohaty, T. Cizmar, and P. Zemanek, “High quality quasi-Bessel beam generated by round-tip axicon,” Opt. Express 16, 12688–12700 (2008).
[Crossref] [PubMed]

2007 (2)

L. Bergé, S. Skupin, R. Nuter, J. Kasparian, and J.-P. Wolf, “Ultrashort filaments of light in weakly ionized, optically transparent media,” Reports Prog. Phys. 70, 1633 (2007).
[Crossref]

A. Couairon and A. Mysyrowicz, “Femtosecond filamentation in transparent media,” Phys. Rep. 441, 47–189 (2007).
[Crossref]

2005 (1)

2004 (2)

M. Kolesik and J. V. Moloney, “Nonlinear optical pulse propagation simulation: From Maxwell’s to unidirectional equations,” Phys. Rev. E 70, 36604 (2004).
[Crossref]

S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
[Crossref]

2003 (2)

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys. 94, 4332–4340 (2003).
[Crossref]

J. Amako, D. Sawaki, and E. Fujii, “Microstructuring transparent materials by use of nondiffracting ultrashort pulse beams generated by diffractive optics,” J. Opt. Soc. Am. B 20, 2562–2568 (2003).
[Crossref]

2002 (1)

2001 (1)

A. Marcinkevcius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, “Application of Bessel Beams for Microfabrication of Dielectrics by Femtosecond Laser,” Jpn. J. Appl. Phys. 40, 1197–1199 (2001).
[Crossref]

2000 (1)

K. Saito and A. J. Ikushima, “Absorption edge in silica glass,” Phys. Rev. B 62, 8584 (2000).
[Crossref]

1999 (1)

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A 69, S373–S376 (1999).
[Crossref]

1991 (1)

1965 (1)

L. V. Keldysh, “Ionization in the field of a strong electromagnetic wave,” Sov. Phys. JETP 20, 1307–1314 (1965).

1921 (1)

A. A. Griffith, “The phenomena of rupture and flow in solids,” Phil. Trans. R. Soc. London A 221, 163–198 (1921).
[Crossref]

Ackermann, R.

R. Kammel, R. Ackermann, J. Thomas, J. Götte, S. Skupin, A. Tünnermann, and S. Nolte, “Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing,” Light Sci. Appl. 3, e169 (2014).
[Crossref]

Amako, J.

Aprea, A.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Arai, A. Y.

Ashkenasi, D.

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A 69, S373–S376 (1999).
[Crossref]

Avanesyan, S. M.

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys. 94, 4332–4340 (2003).
[Crossref]

Bansal, N. P.

N. P. Bansal and R. H. Doremus, Handbook of glass properties (Elsevier, 2013).

Bauer, L.

M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
[Crossref]

Bergé, L.

L. Bergé, S. Skupin, R. Nuter, J. Kasparian, and J.-P. Wolf, “Ultrashort filaments of light in weakly ionized, optically transparent media,” Reports Prog. Phys. 70, 1633 (2007).
[Crossref]

Bergner, K.

M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
[Crossref]

Bhuyan, M. K.

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J.-P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 244, 230–244 (2016).
[Crossref]

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

M. K. Bhuyan, F. Courvoisier, P.-A. Lacourt, M. Jacquot, L. Furfaro, M. J. Withford, and J. M. Dudley, “High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams,” Opt. Express 18, 566–574 (2010).
[Crossref] [PubMed]

Billet, C.

Bollani, M.

M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

Bornhöft, H.

J. Deubener, G. Helsch, A. Moiseev, and H. Bornhöft, “Glasses for solar energy conversion systems,” J. Eur. Ceram. Soc. 29, 1203–1210 (2009).
[Crossref]

Borrelli, N. F.

Bourgeade, A.

O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
[Crossref]

Bovatsek, J.

Brzobohaty, O.

Chae, H.

J.-S. Park, H. Chae, H. K. Chung, and S. I. Lee, “Thin film encapsulation for flexible AM-OLED: a review,” Semicond. Sci. Tech. 26, 34001 (2011).
[Crossref]

Chassagne, B.

K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
[Crossref]

Cheng, Y.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Chimier, B.

O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
[Crossref]

Chu, W.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Chung, H. K.

J.-S. Park, H. Chae, H. K. Chung, and S. I. Lee, “Thin film encapsulation for flexible AM-OLED: a review,” Semicond. Sci. Tech. 26, 34001 (2011).
[Crossref]

Cizmar, T.

Clerici, M.

Collins, A. R.

Colombier, J.-P.

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J.-P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 244, 230–244 (2016).
[Crossref]

Couairon, A.

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 13102 (2016).
[Crossref]

D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
[Crossref]

M. Clerici, D. Faccio, E. Rubino, A. Lotti, A. Couairon, and P. Di Trapani, “Space–time focusing of Bessel-like pulses,” Opt. Lett. 35, 3267–3269 (2010).
[Crossref] [PubMed]

P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

A. Couairon and A. Mysyrowicz, “Femtosecond filamentation in transparent media,” Phys. Rep. 441, 47–189 (2007).
[Crossref]

Courvoisier, F.

Delaporte, P.

D. Grojo, A. Mouskeftaras, P. Delaporte, and S. Lei, “Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared,” J. Appl. Phys. 117, 153105 (2015).
[Crossref]

Dematteo Caulier, O.

O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
[Crossref]

Deubener, J.

J. Deubener, G. Helsch, A. Moiseev, and H. Bornhöft, “Glasses for solar energy conversion systems,” J. Eur. Ceram. Soc. 29, 1203–1210 (2009).
[Crossref]

Dickinson, J. T.

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K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
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V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 13102 (2016).
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V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 13102 (2016).
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D. Grojo, A. Mouskeftaras, P. Delaporte, and S. Lei, “Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared,” J. Appl. Phys. 117, 153105 (2015).
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S. Garner, S. Glaesemann, and X. Li, “Ultra-slim flexible glass for roll-to-roll electronic device fabrication,” Appl. Phys. A 116, 403–407 (2014).
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J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys. 94, 4332–4340 (2003).
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K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
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O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
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D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
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S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
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S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
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K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
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A. Marcinkevcius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, “Application of Bessel Beams for Microfabrication of Dielectrics by Femtosecond Laser,” Jpn. J. Appl. Phys. 40, 1197–1199 (2001).
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M. Kolesik and J. V. Moloney, “Nonlinear optical pulse propagation simulation: From Maxwell’s to unidirectional equations,” Phys. Rev. E 70, 36604 (2004).
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K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
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M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
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Papazoglou, D. G.

D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
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J.-S. Park, H. Chae, H. K. Chung, and S. I. Lee, “Thin film encapsulation for flexible AM-OLED: a review,” Semicond. Sci. Tech. 26, 34001 (2011).
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S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
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P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
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S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
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D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
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M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
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S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
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M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
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O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
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R. Kammel, R. Ackermann, J. Thomas, J. Götte, S. Skupin, A. Tünnermann, and S. Nolte, “Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing,” Light Sci. Appl. 3, e169 (2014).
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Sugioka, K.

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D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
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F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
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R. Kammel, R. Ackermann, J. Thomas, J. Götte, S. Skupin, A. Tünnermann, and S. Nolte, “Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing,” Light Sci. Appl. 3, e169 (2014).
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O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
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Trapani, P. Di

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 13102 (2016).
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M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
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M. Clerici, D. Faccio, E. Rubino, A. Lotti, A. Couairon, and P. Di Trapani, “Space–time focusing of Bessel-like pulses,” Opt. Lett. 35, 3267–3269 (2010).
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P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

Tünnermann, A.

R. Kammel, R. Ackermann, J. Thomas, J. Götte, S. Skupin, A. Tünnermann, and S. Nolte, “Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing,” Light Sci. Appl. 3, e169 (2014).
[Crossref]

Tzortzakis, S.

D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
[Crossref]

Velpula, P. K.

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J.-P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 244, 230–244 (2016).
[Crossref]

Wendel, M.

M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
[Crossref]

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Withford, M. J.

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[Crossref]

Yoshino, F.

Yu, J.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

Zemanek, P.

Zhang, H.

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J.-P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 244, 230–244 (2016).
[Crossref]

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[Crossref] [PubMed]

Zhou, C.

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
[Crossref]

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O. Dematteo Caulier, K. Mishchik, B. Chimier, S. Skupin, A. Bourgeade, C. Javaux Léger, R. Kling, C. Hönninger, J. Lopez, V. Tikhonchuk, and et al., “Femtosecond laser pulse train interaction with dielectric materials,” App. Phys. Lett. 107, 181110 (2015).
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M. K. Bhuyan, O. Jedrkiewicz, V. Sabonis, M. Mikutis, S. Recchia, A. Aprea, M. Bollani, and P. Di Trapani, “High-speed laser-assisted cutting of strong transparent materials using picosecond Bessel beams,” Appl. Phys. A 120, 443–446 (2015).
[Crossref]

S. S. Mao, F. Quéré, S. Guizard, X. Mao, R. E. Russo, G. Petite, and P. Martin, “Dynamics of femtosecond laser interactions with dielectrics,” Appl. Phys. A 79, 1695–1709 (2004).
[Crossref]

J. Appl. Phys. (3)

V. Garzillo, V. Jukna, A. Couairon, R. Grigutis, P. Di Trapani, and O. Jedrkiewicz, “Optimization of laser energy deposition for single-shot high aspect-ratio microstructuring of thick BK7 glass,” J. Appl. Phys. 120, 13102 (2016).
[Crossref]

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys. 94, 4332–4340 (2003).
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D. Grojo, A. Mouskeftaras, P. Delaporte, and S. Lei, “Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared,” J. Appl. Phys. 117, 153105 (2015).
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Laser Photonics Rev. (1)

P. K. Velpula, M. K. Bhuyan, F. Courvoisier, H. Zhang, J.-P. Colombier, and R. Stoian, “Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring,” Laser Photonics Rev. 244, 230–244 (2016).
[Crossref]

Light Sci. Appl. (1)

R. Kammel, R. Ackermann, J. Thomas, J. Götte, S. Skupin, A. Tünnermann, and S. Nolte, “Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing,” Light Sci. Appl. 3, e169 (2014).
[Crossref]

Nat. Photonics (1)

R. R. Gattass and E. Mazur, “Femtosecond laser micromachining in transparent materials,” Nat. Photonics 2, 219–225 (2008).
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P. Polesana, M. Franco, A. Couairon, D. Faccio, and P. Di Trapani, “Filamentation in Kerr media from pulsed Bessel beams,” Phys. Rev. A 77, 043814 (2008).
[Crossref]

D. Faccio, E. Rubino, A. Lotti, A. Couairon, A. Dubietis, G. Tamošauskas, D. G. Papazoglou, and S. Tzortzakis, “Nonlinear light-matter interaction with femtosecond high-angle Bessel beams,” Phys. Rev. A 85, 33829 (2012).
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Proc. of SPIE (1)

F. Hendricks, V. V. Matylitsky, M. Domke, and H. Huber, “Time-resolved study of femtosecond laser induced micro-modifications inside transparent brittle materials,” Proc. of SPIE 9740, 97401A (2016).
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K. Mishchik, B. Chassagne, C. Javaux-Léger, C. Hönninger, E. Mottay, R. Kling, and J. Lopez, “Dash line glass-and sapphire-cutting with high power USP laser,” Proc. SPIE 9740, 97400W (2016).
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M. Kumkar, L. Bauer, S. Russ, M. Wendel, J. Kleiner, D. Grossmann, K. Bergner, and S. Nolte, “Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers,” Proc. SPIE 8972, 897214 (2014).
[Crossref]

Reports Prog. Phys. (1)

L. Bergé, S. Skupin, R. Nuter, J. Kasparian, and J.-P. Wolf, “Ultrashort filaments of light in weakly ionized, optically transparent media,” Reports Prog. Phys. 70, 1633 (2007).
[Crossref]

Sci. Rep. (1)

F. He, J. Yu, Y. Tan, W. Chu, C. Zhou, Y. Cheng, and K. Sugioka, “Tailoring femtosecond 1.5-µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias,” Sci. Rep. 7, 40785 (2017).
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Figures (5)

Fig. 1
Fig. 1 a) Setup for the Bessel beam generation. The primary beam is produced with an axicon and projected to the focal region using a telescope setup with demagnification ratio M = f2/f1. b) Top-view micrographs of localized modification produced with 52 µJ Bessel beams in single-pulse mode (first row), or burst mode (second and third rows) were taken in transmission configuration using bright-field (left column), crossed-polarizers (center column), and phase-contrast illuminations (right column). In burst mode, four sub-pulses with 25 ns delay were employed. For all images, laser incidence was towards the plane of the figure, scanning was performed from left to right. The pulse duration was 450 fs (FWHM).
Fig. 2
Fig. 2 Propagation of a Bessel beam produced by a 13 µJ 450 fs pulse at conical angle of θB=6.7°. a) The fluence distribution achieved in linear regime (all nonliearities set to zero) exceeds thresholds for self-focusing and photoionization by more than one order of magnitude. b) Fluence distribution in the nonlinear propagation regime. On the right, energy deposition maps obtained from fully nonlinear propagation for c) a single 13 µJ pulse at θB=6.7°, d) a single 52 µJ pulse at θB=6.7°, and a single 13 µJ pulse at θB=13.3°.
Fig. 3
Fig. 3 Temperature maps after interaction with: a) a single 52 µJ pulse at θB=6.7°, b,c) cumulative action of a burst of 4×13 µJ pulses, propagating at b) θB=6.7° and c) θB=13.3°. Time delay between pulses in burst mode is 25 ns. Pulse duration of individual pulses is 450 fs. d) Temperature (red curves) and stress profiles (blue curves) produced in the xy plane at z=400 µm for 4×13 µJ bursts in different optical arrangements: after the first pulse for θB=13.3° (dashed line), after the fourth pulse at 75 ns for θB=13.3° (solid line) and θB=6.7° (dash-dotted line). In the inset, a scheme illustrating the stress components caused by thermal dilatation is shown.
Fig. 4
Fig. 4 Average roughness Ra of the sidewall after cutting of Eagle glass using internal scribing technique as a function of conical angle θB. The following experimental parameters were used: a) Ep=80 µJ, 4 sub-pulses, θB=13.3°, l=0.86 mm, b) Ep=98 µJ, 4 sub-pulses, θB=12°, l=1.05 mm, c) Ep=126 µJ, 4 sub-pulses, θB=10°, l=1.52 mm, d) Ep=74 µJ, 5 sub-pulses, θB=6.7°, l=0.86 mm. In all cases, the pulse repletion rate was 25 kHz, and the sample was translated at a speed of 100 mm/s.
Fig. 5
Fig. 5 Laser-induced cleaving of D263T glass by volume absorption of Bessel beams, Ep=70 µJ, 4 pulses per burst, θB=13.3°, 10 kHz, v=125 mm/s. a–b) microscopy images of laser entrance and exit surfaces, respectively. Black dots which result from initial laser modifications are joined by a thin crack on both surfaces. c) Top-view on the sample after cleaving reveals no chipping. d) Sidewalls have an average roughness Ra of less than 500 nm.

Tables (1)

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Table 1 Material parameters used to simulate femtosecond burst interaction with soda-lime glass [25, 34]

Equations (4)

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z E = i 2 k 0 1 r r r r E i k 2 t ¯ 2 E σ 2 N e E + i ω 0 n 2 c I E i k 0 2 n 0 2 N c N e E E g W P I ( N n t N e ) 2 I E
t ¯ N e = W PI ( N n t N e ) + N e σ I E g N e τ rec
E ( z = 0 ) = E 0 exp ( r 2 / w 0 2 i k 0 r sin θ B ) exp ( t 2 / τ 0 2 )
σ ϕ ( r ) = a E 1 v ( 1 r 2 0 r T ( r ) r d r T ( r ) )

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