Abstract

A pure adaptive interferometer is proposed for optical free form surfaces metrology without auxiliary devices such as the wavefont sensors and deflectometry systems for DM monitoring. In this method, the DM surface monitoring and free form surface measurement are achieved simultaneously in only one interferometer. The polarizing optics divide the interferometer into two partial common path interferometric system, which provide the null test for tested free form surface and non-null test for the DM surface. The final figure error of the free form surface is extracted by ray tracing. Experiments proving the feasibility of this interferometer is shown.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article
OSA Recommended Articles
Adaptive null interferometric test using spatial light modulator for free-form surfaces

Shuai Xue, Shanyong Chen, Guipeng Tie, and Ye Tian
Opt. Express 27(6) 8414-8428 (2019)

Adaptive wavefront interferometry for unknown free-form surfaces

Shuai Xue, Shanyong Chen, Zhanbin Fan, and Dede Zhai
Opt. Express 26(17) 21910-21928 (2018)

Calibration of a non-null test interferometer for the measurement of aspheres and free-form surfaces

Goran Baer, Johannes Schindler, Christof Pruss, Jens Siepmann, and Wolfgang Osten
Opt. Express 22(25) 31200-31211 (2014)

References

  • View by:
  • |
  • |
  • |

  1. J. C. Miñano, P. Benítez, and A. Santamaría, “Free-form optics for illumination,” Opt. Rev. 16(2), 99–102 (2009).
    [Crossref]
  2. X. Hu and H. Hua, “High-resolution optical see-through multi-focal-plane head-mounted display using freeform optics,” Opt. Express 22(11), 13896–13903 (2014).
    [Crossref] [PubMed]
  3. J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
    [Crossref]
  4. L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
    [Crossref]
  5. M. F. Küchel, “Interferometric measurement of rotationally symmetric aspheric surfaces,” Proc. SPIE 7389, 738916 (2009).
    [Crossref]
  6. A. Offner, “A Null Corrector for Paraboloidal Mirrors,” Appl. Opt. 2(2), 153–155 (1963).
    [Crossref]
  7. J. C. Wyant and V. P. Bennett, “Using computer generated holograms to test aspheric wavefronts,” Appl. Opt. 11(12), 2833–2839 (1972).
    [Crossref] [PubMed]
  8. J. J. Sullivan and J. E. Greivenkamp, “Design of partial nulls for testing of fast aspheric surfaces,” Proc. SPIE 6671, 66710W (2007).
    [Crossref]
  9. P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
    [Crossref]
  10. X. Hou, F. Wu, L. Yang, and Q. Chen, “Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method,” Opt. Express 15(20), 12890–12899 (2007).
    [Crossref] [PubMed]
  11. S. Chen, S. Li, Y. Dai, L. Ding, and S. Zeng, “Experimental study on subaperture testing with iterative stitching algorithm,” Opt. Express 16(7), 4760–4765 (2008).
    [Crossref] [PubMed]
  12. P. Su, G. Kang, Q. Tan, and G. Jin, “Estimation and optimization of computer-generated hologram in null test of freeform surface,” Chin. Opt. Lett. 7(7), 1097–1100 (2009).
  13. S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
    [Crossref]
  14. E. Garbusi, C. Pruss, and W. Osten, “Interferometer for precise and flexible asphere testing,” Opt. Lett. 33(24), 2973–2975 (2008).
    [Crossref] [PubMed]
  15. G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).
  16. S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
    [Crossref]
  17. G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
    [Crossref]
  18. Y. Tang, X. Su, and S. Hu, “Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly,” Appl. Opt. 50(31), 5944–5948 (2011).
    [Crossref] [PubMed]
  19. A. Speck, B. Zelzer, M. Kannengießer, A. Langenbucher, and T. Eppig, “Inspection of freeform intraocular lens topography by phase measuring deflectometric methods,” Appl. Opt. 52(18), 4279–4286 (2013).
    [Crossref] [PubMed]
  20. C. Pruss and H. J. Tiziani, “Dynamic null lens for aspheric testing using a membrane mirror,” Opt. Commun. 233(1), 15–19 (2004).
    [Crossref]
  21. K. Fuerschbach, K. P. Thompson, and J. P. Rolland, “Interferometric measurement of a concave, φ-polynomial, Zernike mirror,” Opt. Lett. 39(1), 18–21 (2014).
    [Crossref] [PubMed]
  22. L. Huang, H. Choi, W. Zhao, L. R. Graves, and D. W. Kim, “Adaptive interferometric null testing for unknown freeform optics metrology,” Opt. Lett. 41(23), 5539–5542 (2016).
    [Crossref] [PubMed]
  23. H. Liu, Q. Zhu, Q. Hao, and D. Sha, “Design of novel part-compensating lens used in aspheric testing,” Proc. SPIE 5253, 480–484 (2003).
    [Crossref]
  24. D. Liu and Y. Zhuo, “Non-null interferometric aspheric testing with partial null lens and reverse optimization,” Proc. SPIE 7426, 74260M (2009).
    [Crossref]
  25. Q. Hao, S. Wang, Y. Hu, H. Cheng, M. Chen, and T. Li, “Virtual interferometer calibration method of a non-null interferometer for freeform surface measurements,” Appl. Opt. 55(35), 9992–10001 (2016).
    [Crossref] [PubMed]
  26. Y. Yang, L. Zhang, T. Shi, D. Liu, S. Chong, Y. Shen, and J. Bai, “Determination of aspheric vertex radius of curvature in non-null interferometry,” Appl. Opt. 54(10), 2838–2844 (2015).
    [Crossref] [PubMed]
  27. L. Zhang, D. Liu, T. Shi, Y. Yang, S. Chong, B. Ge, Y. Shen, and J. Bai, “Aspheric subaperture stitching based on system modeling,” Opt. Express 23(15), 19176–19188 (2015).
    [Crossref] [PubMed]
  28. L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
    [Crossref]
  29. L. Zhang, “Free-form Surface Subaperture Stitching Interferometry,” Doctoral dissertation, Zhejiang University, China, 90–93 (2016).

2017 (3)

J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
[Crossref]

L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
[Crossref]

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

2016 (2)

2015 (2)

2014 (2)

2013 (5)

G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).

S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
[Crossref]

G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
[Crossref]

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

A. Speck, B. Zelzer, M. Kannengießer, A. Langenbucher, and T. Eppig, “Inspection of freeform intraocular lens topography by phase measuring deflectometric methods,” Appl. Opt. 52(18), 4279–4286 (2013).
[Crossref] [PubMed]

2011 (1)

2009 (4)

P. Su, G. Kang, Q. Tan, and G. Jin, “Estimation and optimization of computer-generated hologram in null test of freeform surface,” Chin. Opt. Lett. 7(7), 1097–1100 (2009).

J. C. Miñano, P. Benítez, and A. Santamaría, “Free-form optics for illumination,” Opt. Rev. 16(2), 99–102 (2009).
[Crossref]

M. F. Küchel, “Interferometric measurement of rotationally symmetric aspheric surfaces,” Proc. SPIE 7389, 738916 (2009).
[Crossref]

D. Liu and Y. Zhuo, “Non-null interferometric aspheric testing with partial null lens and reverse optimization,” Proc. SPIE 7426, 74260M (2009).
[Crossref]

2008 (2)

2007 (2)

2006 (1)

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

2004 (1)

C. Pruss and H. J. Tiziani, “Dynamic null lens for aspheric testing using a membrane mirror,” Opt. Commun. 233(1), 15–19 (2004).
[Crossref]

2003 (1)

H. Liu, Q. Zhu, Q. Hao, and D. Sha, “Design of novel part-compensating lens used in aspheric testing,” Proc. SPIE 5253, 480–484 (2003).
[Crossref]

1972 (1)

1963 (1)

Baer, G.

G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).

Bai, J.

Bauer, A.

J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
[Crossref]

Beier, M.

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

Benítez, P.

J. C. Miñano, P. Benítez, and A. Santamaría, “Free-form optics for illumination,” Opt. Rev. 16(2), 99–102 (2009).
[Crossref]

Bennett, V. P.

Chen, M.

Chen, Q.

Chen, S.

Cheng, H.

Choi, H.

Chong, S.

Dai, Y.

Devries, G.

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

Ding, L.

Eppig, T.

Ettl, S.

G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
[Crossref]

Faber, C.

G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
[Crossref]

Fleig, J.

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

Forbes, G.

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

Fuerschbach, K.

Garbusi, E.

Ge, B.

Gebhardt, A.

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

Graves, L. R.

Greivenkamp, J. E.

J. J. Sullivan and J. E. Greivenkamp, “Design of partial nulls for testing of fast aspheric surfaces,” Proc. SPIE 6671, 66710W (2007).
[Crossref]

Hao, Q.

Häusler, G.

G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
[Crossref]

Hou, X.

Hu, S.

Hu, X.

Hu, Y.

Hua, H.

Hua, S.

S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
[Crossref]

Huang, L.

Jia, L.

S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
[Crossref]

Jin, G.

Kang, G.

Kannengießer, M.

Kim, D. W.

Küchel, M. F.

M. F. Küchel, “Interferometric measurement of rotationally symmetric aspheric surfaces,” Proc. SPIE 7389, 738916 (2009).
[Crossref]

Langenbucher, A.

Li, D.

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

Li, J.

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
[Crossref]

Li, S.

Li, T.

Liu, D.

L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
[Crossref]

Y. Yang, L. Zhang, T. Shi, D. Liu, S. Chong, Y. Shen, and J. Bai, “Determination of aspheric vertex radius of curvature in non-null interferometry,” Appl. Opt. 54(10), 2838–2844 (2015).
[Crossref] [PubMed]

L. Zhang, D. Liu, T. Shi, Y. Yang, S. Chong, B. Ge, Y. Shen, and J. Bai, “Aspheric subaperture stitching based on system modeling,” Opt. Express 23(15), 19176–19188 (2015).
[Crossref] [PubMed]

D. Liu and Y. Zhuo, “Non-null interferometric aspheric testing with partial null lens and reverse optimization,” Proc. SPIE 7426, 74260M (2009).
[Crossref]

Liu, H.

H. Liu, Q. Zhu, Q. Hao, and D. Sha, “Design of novel part-compensating lens used in aspheric testing,” Proc. SPIE 5253, 480–484 (2003).
[Crossref]

Liu, J.

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

Liu, Y.

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

Miñano, J. C.

J. C. Miñano, P. Benítez, and A. Santamaría, “Free-form optics for illumination,” Opt. Rev. 16(2), 99–102 (2009).
[Crossref]

Murphy, P.

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

O’Donohue, S.

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

Offner, A.

Olesch, E.

G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
[Crossref]

Osten, W.

G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).

E. Garbusi, C. Pruss, and W. Osten, “Interferometer for precise and flexible asphere testing,” Opt. Lett. 33(24), 2973–2975 (2008).
[Crossref] [PubMed]

Pruss, C.

G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).

E. Garbusi, C. Pruss, and W. Osten, “Interferometer for precise and flexible asphere testing,” Opt. Lett. 33(24), 2973–2975 (2008).
[Crossref] [PubMed]

C. Pruss and H. J. Tiziani, “Dynamic null lens for aspheric testing using a membrane mirror,” Opt. Commun. 233(1), 15–19 (2004).
[Crossref]

Reimers, J.

J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
[Crossref]

Rihong, Z.

S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
[Crossref]

Risse, S.

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

Rolland, J. P.

J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
[Crossref]

K. Fuerschbach, K. P. Thompson, and J. P. Rolland, “Interferometric measurement of a concave, φ-polynomial, Zernike mirror,” Opt. Lett. 39(1), 18–21 (2014).
[Crossref] [PubMed]

Santamaría, A.

J. C. Miñano, P. Benítez, and A. Santamaría, “Free-form optics for illumination,” Opt. Rev. 16(2), 99–102 (2009).
[Crossref]

Scheiding, S.

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

Schindler, J.

G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).

Sha, D.

H. Liu, Q. Zhu, Q. Hao, and D. Sha, “Design of novel part-compensating lens used in aspheric testing,” Proc. SPIE 5253, 480–484 (2003).
[Crossref]

Shen, Y.

Shi, T.

Sihai, R.

S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
[Crossref]

Speck, A.

Su, P.

Su, X.

Sullivan, J. J.

J. J. Sullivan and J. E. Greivenkamp, “Design of partial nulls for testing of fast aspheric surfaces,” Proc. SPIE 6671, 66710W (2007).
[Crossref]

Tan, Q.

Tang, Y.

Thompson, K. P.

J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
[Crossref]

K. Fuerschbach, K. P. Thompson, and J. P. Rolland, “Interferometric measurement of a concave, φ-polynomial, Zernike mirror,” Opt. Lett. 39(1), 18–21 (2014).
[Crossref] [PubMed]

Tiziani, H. J.

C. Pruss and H. J. Tiziani, “Dynamic null lens for aspheric testing using a membrane mirror,” Opt. Commun. 233(1), 15–19 (2004).
[Crossref]

Wang, S.

Wu, F.

Wyant, J. C.

Yang, L.

Yang, Y.

Yu, B.

L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
[Crossref]

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

Zang, L.

L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
[Crossref]

Zeitner, U. D.

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

Zelzer, B.

Zeng, S.

Zhang, L.

Zhao, W.

Zhu, Q.

H. Liu, Q. Zhu, Q. Hao, and D. Sha, “Design of novel part-compensating lens used in aspheric testing,” Proc. SPIE 5253, 480–484 (2003).
[Crossref]

Zhuo, Y.

D. Liu and Y. Zhuo, “Non-null interferometric aspheric testing with partial null lens and reverse optimization,” Proc. SPIE 7426, 74260M (2009).
[Crossref]

Acta Opt. Sin. (1)

S. Hua, L. Jia, Z. Rihong, and R. Sihai, “Design of Non-Null Interferometer Based on Point Source Array for Testing Freeform Surface,” Acta Opt. Sin. 33(12), 1222003 (2013).
[Crossref]

Appl. Opt. (6)

Chin. Opt. Lett. (1)

Chinese J. Opt. (1)

L. Zang, D. Liu, T. Shi, Y. Yang, J. Li, and B. Yu, “Optical free-form surfaces testing technologies,” Chinese J. Opt. 10(3), 283–299 (2017).
[Crossref]

J. Europ. Opt. Soc. Rap. Public. (1)

G. Baer, J. Schindler, C. Pruss, and W. Osten, “Correction of misalignment introduced aberration in non-null test measurements of free-form surfaces,” J. Europ. Opt. Soc. Rap. Public. 8(23), 3074 (2013).

Light Sci. Appl. (1)

J. Reimers, A. Bauer, K. P. Thompson, and J. P. Rolland, “Freeform spectrometer enabling increased compactness,” Light Sci. Appl. 6(7), e17026 (2017).
[Crossref]

Opt. Commun. (2)

L. Zhang, D. Li, Y. Liu, J. Liu, J. Li, and B. Yu, “Validation of simultaneous reverse optimization reconstruction algorithm in a practical circular subaperture stitching interferometer,” Opt. Commun. 403, 41–49 (2017).
[Crossref]

C. Pruss and H. J. Tiziani, “Dynamic null lens for aspheric testing using a membrane mirror,” Opt. Commun. 233(1), 15–19 (2004).
[Crossref]

Opt. Express (4)

Opt. Lett. (3)

Opt. Rev. (1)

J. C. Miñano, P. Benítez, and A. Santamaría, “Free-form optics for illumination,” Opt. Rev. 16(2), 99–102 (2009).
[Crossref]

Proc. SPIE (7)

M. F. Küchel, “Interferometric measurement of rotationally symmetric aspheric surfaces,” Proc. SPIE 7389, 738916 (2009).
[Crossref]

J. J. Sullivan and J. E. Greivenkamp, “Design of partial nulls for testing of fast aspheric surfaces,” Proc. SPIE 6671, 66710W (2007).
[Crossref]

P. Murphy, J. Fleig, G. Forbes, G. Devries, and S. O’Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE 6293, 62930J (2006).
[Crossref]

G. Häusler, C. Faber, E. Olesch, and S. Ettl, “Deflectometry vs. interferometry,” Proc. SPIE 8788, 87881C (2013).
[Crossref]

S. Scheiding, M. Beier, U. D. Zeitner, S. Risse, and A. Gebhardt, “Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features,” Proc. SPIE 8613, 86130J (2013).
[Crossref]

H. Liu, Q. Zhu, Q. Hao, and D. Sha, “Design of novel part-compensating lens used in aspheric testing,” Proc. SPIE 5253, 480–484 (2003).
[Crossref]

D. Liu and Y. Zhuo, “Non-null interferometric aspheric testing with partial null lens and reverse optimization,” Proc. SPIE 7426, 74260M (2009).
[Crossref]

Other (1)

L. Zhang, “Free-form Surface Subaperture Stitching Interferometry,” Doctoral dissertation, Zhejiang University, China, 90–93 (2016).

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (8)

Fig. 1
Fig. 1 The system layout of the AFI. (a) The AFI sketch. (b) The free form surface interferometric configuration (c) the DM surface monitoring interferometric configuration. For the balanced fringe contrast, the transmittance of the BS 1 and BS 2 are all 90%.
Fig. 2
Fig. 2 The AFI system principle.
Fig. 3
Fig. 3 The DM calibration process. (a) is the system error storage in the monitoring system, (b) is DM tilt calibration, (c) is the DM decentration calibration, (d) is the DM axial position determination.
Fig. 4
Fig. 4 The experiment layout of the ANI.
Fig. 5
Fig. 5 Experimental results of initial calibration. (a) The Zernike coefficients of the system error of the DM monitoring system, (b) The experiment layout of the DM axial position ( d DM ) determination, (c) The results of the DM axial position determination in different configurations by ray tracing.
Fig. 6
Fig. 6 The interferogram at the CCD1 and CCD 2, respectively. (a) is the interferogram with only a matched transmission sphere as compensator, (b) is the interferogram with the only null optics, (c) refers to the interferogram with the null optics and part compensation of the DM, 6(d) is the final null fringes with the complete compensation of null optics and DM. 6(e)-6(g) are the interferograms at the CCD 1 for DM deformation monitoring according to the process from 6(b)-6(d).
Fig. 7
Fig. 7 Experiment results. (a) DM surface figure, (b) The final null fringes in the model, (c) The map of figure error of the tested freeform surface.
Fig. 8
Fig. 8 Test results of the paraboloidal surface by spherical aberrations compensation. (a) is the initial interferogram in the experiment, (b) is the interferogram after DM compensation in the experiment, (c) is the interferogram characterizing the DM surface, (d) is the surface figure error map in AFI, (e) is the figure error map by Zygo interferometer, (f) is the error map between (d) and (e).

Tables (2)

Tables Icon

Table 1 The Parameters of the Null Optics.

Tables Icon

Table 2 Specific Parameters of the Test Results by AFI and Zygo Interferometer

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

W CCD 1 g ( S D M + E m i s D M + E sys ) ,
W ¯ CCD 1 g ( S ¯ D M + E ¯ m i s D M + E ¯ sys ) ,
{ E sys = E ¯ sys E ¯ m i s D M = E m i s D M
U = ( S ¯ D M - S D M ) = [ g - 1 ( W ¯ C C D 1 ) - g - 1 ( W C C D 1 ) ] = min .
S ¯ D M = S D M

Metrics