Abstract

The recent success in the development of high-precision printing techniques allows one to manufacture free-standing polymer structures of high quality. Two-photon polymerization lithography is a mask-less technique with down to 100 nm resolution that provides full geometric freedom. It has recently been applied to the nanofabrication of X-ray compound refractive lenses (CRLs). In this article we report on the characterization of two sets of CRLs of different design produced by two-photon polymerization-induced lithography.

Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.

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  1. A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
    [Crossref]
  2. M. Lyubomirskiy and C. G. Schroer, “Refractive Lenses for Microscopy and Nanoanalysis,” Synchr. Rad. News 29, 21–26 (2016).
    [Crossref]
  3. C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
    [Crossref]
  4. A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
    [Crossref]
  5. F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
    [Crossref]
  6. C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
    [Crossref]
  7. C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
    [Crossref]
  8. H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
    [Crossref]
  9. C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94, 054802 (2005).
    [Crossref] [PubMed]
  10. J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
    [Crossref]
  11. M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
    [Crossref]
  12. V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
    [Crossref]
  13. A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
    [Crossref] [PubMed]
  14. T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
    [Crossref]
  15. L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
    [Crossref]
  16. R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
    [Crossref] [PubMed]
  17. J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
    [Crossref]
  18. J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2013).
    [Crossref]
  19. P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).
  20. A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
    [Crossref]
  21. C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
    [Crossref] [PubMed]
  22. C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
    [Crossref] [PubMed]
  23. S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
    [Crossref]
  24. J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
    [Crossref] [PubMed]
  25. A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
    [Crossref]
  26. F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
    [Crossref]
  27. A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
    [Crossref]
  28. B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
    [Crossref]

2018 (2)

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
[Crossref]

2017 (4)

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

2016 (2)

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

M. Lyubomirskiy and C. G. Schroer, “Refractive Lenses for Microscopy and Nanoanalysis,” Synchr. Rad. News 29, 21–26 (2016).
[Crossref]

2015 (1)

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

2014 (2)

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

2013 (3)

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
[Crossref]

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2013).
[Crossref]

2012 (1)

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

2011 (2)

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

2010 (4)

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

2008 (1)

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

2007 (1)

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

2006 (1)

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

2005 (1)

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94, 054802 (2005).
[Crossref] [PubMed]

2002 (2)

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

1996 (1)

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
[Crossref]

Abrashitova, K. A.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Andrejczuk, A.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Aquila, A.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Arnold, B.

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Assoufid, L.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Bajt, S.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Barannikov, A. A.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Bartha, J. W.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Barthelmess, M.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Barty, A.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Baumbach, T.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Bean, R. J.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Benner, B.

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

Benson, C.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Bessonov, V. O.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Boesenberg, U.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Boye, P.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Braun, S.

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

Bunk, O.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

Burghammer, M.

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Chapman, H. N.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

David, C.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

Detlefs, C.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Diaz, A.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

Dierolf, M.

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

dos Santos Rolo, T.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Durisova, J.

J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
[Crossref]

Ershov, P. A.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Falkenberg, G.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Farsari, M.

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
[Crossref]

Fedyanin, A. A.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Feldkamp, J.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Feldkamp, J. M.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Fienup, J. R.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Fischer, J.

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2013).
[Crossref]

Fohtung, E.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Gailevicius, D.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

Galtier, E. C.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Garrevoet, J.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Gasilov, S.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Gaso, P.

J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
[Crossref]

Gerhardus, A.

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

Giakoumidis, S.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Giewekemeyer, K.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Goraus, M.

J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
[Crossref]

Graafsma, H.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Guizar-Sicairos, M.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Gulden, J.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Günzler, T. F.

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

Guo, R.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Hansen, O.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Hastings, J. B.

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Hecker, M.

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

Heimann, P.

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Hönig, S.

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

Hoppe, R.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Huang, W.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Jahn, A.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Jefimovs, K.

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

Jensen, F.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Jonušauskas, L.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

Juodkazis, S.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
[Crossref]

Karpov, D.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Kewish, C. M.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

Khounsary, A. M.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Klare, S.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

Klimova, N. B.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Knaut, M.

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Kohn, V.

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
[Crossref]

Kokareva, N. G.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Krüger, P.

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

Krzywinski, J.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Kubec, A.

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

Küchler, M.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Kuhlmann, M.

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

Kunka, D.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Kurapova, O.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

Lee, H. J.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Lengeler, B.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94, 054802 (2005).
[Crossref] [PubMed]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
[Crossref]

Leson, A.

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

Li, J.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Liu, C.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Lyatun, I. I.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Lyubomirskiy, M.

M. Lyubomirskiy and C. G. Schroer, “Refractive Lenses for Microscopy and Nanoanalysis,” Synchr. Rad. News 29, 21–26 (2016).
[Crossref]

Macrander, A. T.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Malinauskas, M.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
[Crossref]

Mancuso, A. P.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Mantion, A.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

Meents, A.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Menzel, A.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

Meyer, J.

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

Michael-Lindhard, J.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Mikoliunaite, L.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

Mohr, J.

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

Morgan, A. J.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Nagler, B.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Nazmov, V.

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

Niese, S.

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

Nolte, S.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Oberthuer, D.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Parfeniukas, K.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Patommel, J.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Pennicard, D.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Petrov, A. K.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Pfeiffer, F.

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

Piskarskas, A.

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
[Crossref]

Plech, A.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Polikarpov, M.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Poulsen, H. F.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Prasciolu, M.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Pudis, D.

J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
[Crossref]

Qian, J.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Rahomäki, J.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Rau, C.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

Reich, S.

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Reimers, N.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Reinhardt, J.

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Reznikova, E.

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

Richter, K.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Riekel, C.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Ritter, S.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

Rödel, C.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Safronov, K. R.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Saile, V.

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

Sakalauskas, D.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

Šakirzanovas, S.

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

Salditt, T.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Samberg, D.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Schöder, S.

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Scholz, M.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Schroer, C. G.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

M. Lyubomirskiy and C. G. Schroer, “Refractive Lenses for Microscopy and Nanoanalysis,” Synchr. Rad. News 29, 21–26 (2016).
[Crossref]

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94, 054802 (2005).
[Crossref] [PubMed]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

Schropp, A.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Schwab, A.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Seiboth, F.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Seidel, J.

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Shi, B.

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

Simionovici, A. S.

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

Simon, R.

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

Simons, H.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Snigirev, A.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
[Crossref]

Snigireva, I.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
[Crossref]

Stephan, S.

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Stöhr, F.

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Thibault, P.

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

Uhlén, F.

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Ullsperger, T.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

van der Hart, A.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Vartanyants, I. A.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Vila-Comamala, J.

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

Vincze, L.

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Vogt, U.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Wagner, U.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Weckert, E.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Wegener, M.

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2013).
[Crossref]

Wellenreuther, G.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Wenzel, C.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

Wilke, R. N.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

Wittwer, F.

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Wünsche, M.

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Xia, A.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Xiao, S.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Yefanov, O.

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Yunkin, V. A.

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

Zastrau, U.

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Zhai, X.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Zimprich, C.

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

AIP Conf. Proc. (1)

C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses,” AIP Conf. Proc. 879, 1295–1298 (2007).
[Crossref]

Appl. Phys. Lett. (3)

J. Patommel, S. Klare, R. Hoppe, S. Ritter, D. Samberg, F. Wittwer, A. Jahn, K. Richter, C. Wenzel, J. W. Bartha, M. Scholz, F. Seiboth, U. Boesenberg, G. Falkenberg, and C. G. Schroer, “Focusing hard x rays beyond the critical angle of total reflection by adiabatically focusing lenses,” Appl. Phys. Lett. 110, 101103 (2017).
[Crossref]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schöder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett. 96, 091102 (2010).
[Crossref]

F. Seiboth, M. Scholz, J. Patommel, R. Hoppe, F. Wittwer, J. Reinhardt, J. Seidel, M. Knaut, A. Jahn, K. Richter, J. W. Bartha, G. Falkenberg, and C. G. Schroer, “Hard x-ray nanofocusing by refractive lenses of constant thickness,” Appl. Phys. Lett. 105, 131110 (2014).
[Crossref]

Appl. Sci. (1)

T. dos Santos Rolo, S. Reich, D. Karpov, S. Gasilov, D. Kunka, E. Fohtung, T. Baumbach, and A. Plech, “A Shack-Hartmann Sensor for Single-Shot Multi-Contrast Imaging with Hard X-rays,” Appl. Sci. 8, 737 (2018).
[Crossref]

Appl. Surf. Sci. (1)

J. Durisova, D. Pudis, M. Goraus, and P. Gaso, “IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM,” Appl. Surf. Sci. 461, 108–112 (2018).
[Crossref]

J. Instrum. (1)

V. Nazmov, R. Simon, E. Reznikova, J. Mohr, and V. Saile, “Polymer refractive crossed long lens: a new optical component for nanoimaging and nanofocussing in the hard X-ray region,” J. Instrum. 7, 07019 (2012).
[Crossref]

J. Synchrotron Rad. (2)

A. Kubec, S. Braun, S. Niese, P. Krüger, J. Patommel, M. Hecker, A. Leson, and C. G. Schroer, “Ptychography with mulitlayer Laue lenses,” J. Synchrotron Rad. 21, 1122–1127 (2014).
[Crossref]

B. Lengeler, C. G. Schroer, B. Benner, A. Gerhardus, T. F. Günzler, M. Kuhlmann, J. Meyer, and C. Zimprich, “Parabolic refractive X-ray lenses,” J. Synchrotron Rad. 9, 119–124 (2002).
[Crossref]

Laser Photonics Rev. (1)

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2013).
[Crossref]

Materials (1)

L. Jonušauskas, D. Gailevičius, L. Mikoliūnaitė, D. Sakalauskas, S. Šakirzanovas, S. Juodkazis, and M. Malinauskas, “Optically Clear and Resilient Free-Form μ-Optics 3D-Printed via Ultrafast Laser Lithography,” Materials 10(1), 12 (2017).
[Crossref]

Nature (1)

A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, “A compound refractive lens for focusing high energy x-rays,” Nature 384, 49 (1996).
[Crossref]

Nature Commun. (1)

F. Seiboth, A. Schropp, M. Scholz, F. Wittwer, C. Rödel, M. Wünsche, T. Ullsperger, S. Nolte, J. Rahomäki, K. Parfeniukas, S. Giakoumidis, U. Vogt, U. Wagner, C. Rau, U. Boesenberg, J. Garrevoet, G. Falkenberg, E. C. Galtier, H. J. Lee, B. Nagler, and C. G. Schroer, “Perfect X-ray focusing via fitting corrective glasses to aberrated optics,” Nature Commun. 8, 14623 (2017).
[Crossref]

Nucl. Instrum. Meth. A (1)

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray Nanoprobe at Beamline P06 at PETRA III,” Nucl. Instrum. Meth. A 616, 93–97 (2010).
[Crossref]

Opt. Commun. (1)

H. Simons, F. Stöhr, J. Michael-Lindhard, F. Jensen, O. Hansen, C. Detlefs, and H. F. Poulsen, “Full-field hard x-ray microscopy with interdigitated silicon lenses,” Opt. Commun. 359, 460–464 (2016).
[Crossref]

Opt. Express (5)

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

A. K. Petrov, V. O. Bessonov, K. A. Abrashitova, N. G. Kokareva, K. R. Safronov, A. A. Barannikov, P. A. Ershov, N. B. Klimova, I. I. Lyatun, V. A. Yunkin, M. Polikarpov, I. Snigireva, A. A. Fedyanin, and A. Snigirev, “Polymer X-ray refractive nano-lenses fabricated by additive technology,” Opt. Express 25, 14173–14181 (2017).
[Crossref] [PubMed]

C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express 18, 23420–23427 (2010).
[Crossref] [PubMed]

S. Hönig, R. Hoppe, J. Patommel, A. Schropp, S. Stephan, S. Schöder, M. Burghammer, and C. G. Schroer, “Full optical characterization of coherent x-ray nanobeams by ptychographic imaging,” Opt. Express 19, 16325–16329 (2011).
[Crossref]

J. Vila-Comamala, A. Diaz, M. Guizar-Sicairos, A. Mantion, C. M. Kewish, A. Menzel, O. Bunk, and C. David, “Characterization of high-resolution diffractive X-ray optics by ptychographic coherent diffractive imaging,” Opt. Express 19, 21333–21344 (2011).
[Crossref] [PubMed]

Phys. Rep. (1)

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533, 1–31 (2013).
[Crossref]

Phys. Rev. Lett. (1)

C. G. Schroer and B. Lengeler, “Focusing hard x rays to nanometer dimensions by adiabatically focusing lenses,” Phys. Rev. Lett. 94, 054802 (2005).
[Crossref] [PubMed]

Proc. SPIE (2)

C. G. Schroer, M. Kuhlmann, B. Lengeler, T. F. Günzler, O. Kurapova, B. Benner, C. Rau, A. S. Simionovici, A. Snigirev, and I. Snigireva, “Beryllium parabolic refractive x-ray lenses,” Proc. SPIE 4783, 10–18 (2002).
[Crossref]

A. Schropp, R. Hoppe, J. Patommel, F. Seiboth, F. Uhlén, U. Vogt, H. J. Lee, B. Nagler, E. C. Galtier, U. Zastrau, B. Arnold, P. Heimann, J. B. Hastings, and C. G. Schroer, “Scanning coherent x-ray microscopy as a tool for XFEL nanobeam characterization,” Proc. SPIE 8849, 88490R (2013).
[Crossref]

Sci. Rep. (1)

A. J. Morgan, M. Prasciolu, A. Andrejczuk, J. Krzywinski, A. Meents, D. Pennicard, H. Graafsma, A. Barty, R. J. Bean, M. Barthelmess, D. Oberthuer, O. Yefanov, A. Aquila, H. N. Chapman, and S. Bajt, “High numerical aperture multilayer Laue lenses,” Sci. Rep. 5, 09892 (2015).
[Crossref]

Science (1)

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning X-ray diffraction microscopy,” Science 5887, 379–382 (2008).

Synchr. Rad. News (1)

M. Lyubomirskiy and C. G. Schroer, “Refractive Lenses for Microscopy and Nanoanalysis,” Synchr. Rad. News 29, 21–26 (2016).
[Crossref]

Ultramicroscopy (1)

C. M. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy 110, 325–329 (2010).
[Crossref] [PubMed]

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Figures (10)

Fig. 1
Fig. 1 Compound refractive lens geometries fabricated by additive machining: (a) vertical or tower, (b) horizontal or train geometry.
Fig. 2
Fig. 2 Scanning electron microscopy image of compound refractive lens (left) in vertical or tower geometry and of its entrance aperture (right).
Fig. 3
Fig. 3 Schematic representation of the printing process in case of horizontally organized CRL (top) and geometrical parameters of an individual lens in horizontal design (bottom-left) and 3D model of an individual lens (bottom-right). All distances are in μm.
Fig. 4
Fig. 4 Scanning electron microscopy images of the compound refractive lens in horizontal design composed of 8 individual lenses (left) and magnified image of the entrance aperture of an individual lens (right).
Fig. 5
Fig. 5 Schematic drawing of the ptychographic experimental setup.
Fig. 6
Fig. 6 Reconstructed amplitude (left) and phase (right) profiles of the NTT-AT test sample.
Fig. 7
Fig. 7 Left: Beam profiles, in horizontal (Blue) and vertical (Yellow) directions, generated by numerical propagation of reconstructed wave fields. Right: Cross sections of the profile through the focus plane.
Fig. 8
Fig. 8 Left: Phase profile of the beam at the focal plane. The colorbar indicates phase shift in radians. Right: Phase error induced by the combined stack of vertically organized CRLs (phase profile of the beam with subtracted spherical wave)
Fig. 9
Fig. 9 Left: Beam profiles, in horizontal (Blue) and vertical (Yellow) directions, generated by numerical propagation of reconstructed wave fields. Right: Cross sections of the profile through the focus plane.
Fig. 10
Fig. 10 Left: Phase profile of the beam at the focal plane. The colorbar indicates phase shift in radians. Right: Phase error induced by horizontally organized 9-CRL (phase profile of the beam with substracted spherical wave)

Equations (2)

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f = R / ( 2 N δ ) ,
d diff = 0.75 λ 2 NA ,

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