Abstract

We fabricated a Schwarzschild x-ray objective with 224 magnification and a theoretical spatial resolution of 25 nm at a wavelength of 13.5 nm. We measured its knife-edge responses. To determine its spatial resolution, we performed a fitting calculation of the knife-edge response, using the point-spread function for an annular pupil; it was found that the objective has a spatial resolution of 35 nm at the focal point.

© 1994 Optical Society of America

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