Abstract

Laser photoablation of polymeric channel waveguides with embedded contact masks is described. The ablation technique is capable of forming low-optical-loss waveguides with an end-face quality suitable for pigtailed devices at rapid rates. The optical-mode profiles and the optical-loss measurements are reported, and scanning electron microscopy characterization and laser ablation rate measurements are described. The end-face quality processed by laser ablation is sufficiently good for end-fire coupling and thus can permit the elimination of polishing steps.

© 1994 Optical Society of America

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