Abstract

We report experimental results on UV-transparent low-pressure chemical-vapor-deposition nitride thin films. We show that, by using nitrogen-rich rather than conventionally silicon-rich thin-film membranes, we are able to obtain more than 95% UV transparency below 250  nm, while keeping the stress of the membrane manageable and below standard nitride's giga-Pascal stress. Using these results, we were able to microfabricate a UV Mirau interferometer for correlation microscopy.

© 1997 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Silicon-rich silicon nitride thin films for subwavelength grating metalens

Mao Ye, Yueheng Peng, and Ya Sha Yi
Opt. Mater. Express 9(3) 1200-1207 (2019)

Effect of high-energy electron-beam irradiation on the optical properties of ion-beam-sputtered silicon oxynitride thin films

Shivaprasad Karanth, Ganesh H. Shanbhogue, and C. L. Nagendra
Appl. Opt. 44(29) 6186-6192 (2005)

Optical properties and stress of ion-assisted aluminum nitride thin films

Philip Martin, Roger Netterfield, Terry Kinder, and Avi Bendavid
Appl. Opt. 31(31) 6734-6740 (1992)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription