Abstract

We achieve high aspect-ratio laser ablation of silicon with a strong nonlinear dependence on pulse duration while using a power density 106 times less than the threshold for typical multiphoton-mediated ablation. This is especially counter-intuitive as silicon is nominally transparent to the modulated continuous wave Yb:fiber laser used in the experiments. We perform time-domain finite-element simulations of thermal dynamics to investigate thermo-optical coupling and link the observed machining to an intensity-thresholded runaway thermo-optically nonlinear process. This effect, cascaded absorption, is qualitatively different from ablation observed using nanosecond-duration pulses and is general enough to potentially facilitate high-quality, high aspect-ratio, and economical processing of many materials.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Smart laser osteotomy: integrating a pulsed 1064nm fiber laser into the sample arm of a fiber optic 1310nm OCT system for ablation monitoring

Jamil Jivraj, Chaoliang Chen, Yize Huang, Joel Ramjist, Yi Lu, Barry Vuong, Xijia Gu, and Victor X. D. Yang
Biomed. Opt. Express 9(12) 6374-6387 (2018)

Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure

Yuh-Yan Yu, Chin-Kai Chang, Ming-Wei Lai, Long-Sun Huang, and Chih-Kung Lee
Appl. Opt. 50(34) 6384-6390 (2011)

Two-photon–induced internal modification of silicon by erbium-doped fiber laser

P. C. Verburg, G. R. B. E. Römer, and A. J. Huis in ’t Veld
Opt. Express 22(18) 21958-21971 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription