Abstract

We present a dual-wavelength external holographic microscopy module for quantitative phase imaging of 3D structures with extended thickness range. This is done by simultaneous acquisition of two off-axis interferograms, each at a different wavelength, and generation of a synthetic wavelength, which is larger than the sample optical thickness, allowing two-wavelength unwrapping. The simultaneous acquisition is carried out by using optical multiplexing of the two interferograms onto the camera, where each of them has orthogonal off-axis interference fringe direction in relation to the other one. We used the system to quantitatively image a 7.96 μm step target and 30.5 μm circular copper pillars.

© 2016 Optical Society of America

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Corrections

23 December 2016: A correction was made to page 2.


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