Abstract

In this Letter we report for the first time, to the best of our knowledge, a phase spatial light modulator (SLM)-based interference lithography (IL) approach for the realization of hexagonally packed helical photonic structures with a submicrometer scale spatial, as well as axial, periodicity over a large area. A phase-only SLM is used to electronically generate six phase-controlled plane beams. These six beams from the front side and a direct central backside beam are used together in an “inverted umbrella” geometry setup to realize the desired submicrometer axial periodic chiral photonic structures through IL. The realized structures with 650 nm spatial and 353 nm axial periodicities on negative photoresist can be used as an optical filter and refractive index sensor, as evidenced from the FDTD-based simulation study on its optical properties. Further, the fabricated templates can be transferred to metals such as silver or aluminum for the realization of a metamaterial-based broadband circular polarizer ranging from 1 to 3.5 μm of near-infrared spectra.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Submicrometer photonic structure fabrication by phase spatial-light-modulator-based interference lithography

Saraswati Behera, Manish Kumar, and Joby Joseph
Opt. Lett. 41(8) 1893-1896 (2016)

Method for single-shot fabrication of chiral woodpile photonic structures using phase-controlled interference lithography

Swagato Sarkar, Krishnendu Samanta, and Joby Joseph
Opt. Express 28(3) 4347-4361 (2020)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription