Abstract

Traditional potassium dihydrogen phosphate (KDP) polishing methods, such as magnetorheological finishing (MRF), ion-beam figuring (IBF), and chemical mechanical polishing (CMP), are limited by either hard-to-remove residual particles, unavoidable heating effects, or an applicability restricted to large-sized KDP. In this paper, we present a novel abrasive-free jet polishing (AFJP) mechanism that can be implemented for abrasive-free and no-residue polishing on KDP surfaces. KDP AFJP makes use of a thermodynamically and kinetically stable ionic liquid (IL) microemulsion that contains nanometer range water droplets evenly dispersed in the non-aqueous carrier liquid. The sprayed out nanoscale water droplets can remove material through dissolution. The feasibility of this approach has first been analyzed through several experiments, namely compatibility tests and assessments of removal controllability and uniformity of the IL microemulsion. The material removal mechanisms in contact removal and slipping removal were then studied. KDP AFJP experiments were then conducted to validate the polishing performance. The experimental results show that an IL microemulsion as an abrasive-free jet can indeed improve the quality of a KDP surface, leaving no residue.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]

2017 (12)

S. Mittal, K. Arvind, A. S. Laxmiprasad, and S. S. Pruthvi, “Design and Development of Pockels Cell Driver for Q Switch LASER in Space Applications,” J. Inst. Electron. Telecommun. Eng. 63(5), 694–699 (2017).

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

K. Juškevičius, R. Buzelis, G. Abromavicius, R. Samuilovas, S. Abbas, A. Belosludtsev, R. Drazdys, and S. Kicas, “Argon plasma etching of fused silica substrates for manufacturing high laser damage resistance optical interference coatings,” Opt. Mater. Express 7(10), 3598–3607 (2017).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref] [PubMed]

F. Li, X. Xie, G. Tie, H. Hu, and L. Zhou, “Figuring process of potassium dihydrogen phosphate crystal using ion beam figuring technology,” Appl. Opt. 56(25), 7130–7137 (2017).
[Crossref] [PubMed]

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

F. Chen, X. Miao, Y. Tang, and S. Yin, “A review on recent advances in machining methods based on abrasive jet polishing (AJP),” Int. J. Adv. Manuf. Technol. 90(1–4), 785–799 (2017).
[Crossref]

C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
[Crossref]

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
[Crossref] [PubMed]

Y. Zhou and J. Qu, “Ionic Liquids as Lubricant Additives: A Review,” ACS Appl. Mater. Interfaces 9(4), 3209–3222 (2017).
[Crossref] [PubMed]

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

2016 (6)

O. Faehnle, “Process optimization in optical fabrication,” Opt. Eng. 55(3), 035106 (2016).
[Crossref]

F. Li, X. Xie, G. Tie, H. Hu, and L. Zhou, “Research on temperature field of KDP crystal under ion beam cleaning,” Appl. Opt. 55(18), 4888–4894 (2016).
[Crossref] [PubMed]

Y. Zhang, Y. Dai, G. Tie, and H. Hu, “Effects of temperature on the removal efficiency of KDP crystal during the process of magnetorheological water-dissolution polishing,” Appl. Opt. 55(29), 8308–8315 (2016).
[Crossref] [PubMed]

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
[Crossref]

J. A. Menapace, P. E. Ehrmann, A. J. Bayramian, A. Bullington, J. M. Di Nicola, C. Haefner, J. Jarboe, C. Marshall, K. I. Schaffers, and C. Smith, “Imprinting high-gradient topographical structures onto optical surfaces using magnetorheological finishing: manufacturing corrective optical elements for high-power laser applications,” Appl. Opt. 55(19), 5240–5248 (2016).
[Crossref] [PubMed]

2015 (4)

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

J. Lee, S. Ha, Y. Cho, K. Kim, and M. Cho, “Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra-precision polishing of micro mold pattern,” J. Mech. Sci. Technol. 29(5), 2205–2211 (2015).
[Crossref]

S. M. Ghaneeizad, J. F. Atkinson, and S. J. Bennett, “Effect of flow confinement on the hydrodynamics of circular impinging jets: implications for erosion assessment,” Environ. Fluid Mech. 15(1), 1–25 (2015).
[Crossref]

H. Gao, X. Wang, X. Teng, and D. Guo, “Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal,” Sci. China Technol. Sci. 58(11), 1877–1883 (2015).
[Crossref]

2014 (6)

Z. Cao and C. F. Cheung, “Theoretical modelling and analysis of the material removal characteristics in fluid jet polishing,” Int. J. Mech. Sci. 89, 158–166 (2014).
[Crossref]

T. Kusano, K. Fujii, K. Hashimoto, and M. Shibayama, “Water-in-Ionic Liquid Microemulsion Formation in Solvent Mixture of Aprotic and Protic Imidazolium-Based Ionic Liquids,” Langmuir 30(40), 11890–11896 (2014).
[Crossref] [PubMed]

M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
[Crossref] [PubMed]

C. Stalhandske, K. Persson, M. Lang, and A. Jonsson, “Fluid jet polishing of planar flat glass surfaces and within holes,” Glass Technol.-Part A 55(2), 49–54 (2014).

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref] [PubMed]

R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
[Crossref]

2013 (3)

2012 (1)

A. Beaucamp, Y. Namba, and R. Freeman, “Dynamic multiphase modeling and optimization of fluid jet polishing process,” CIRP Ann.- Manuf. Techn. 61(1), 315–318 (2012).
[Crossref]

2010 (4)

B. Wang, Y. Li, and H. Gao, “Water-in-Oil Dispersion for KH2PO4 (KDP) Crystal CMP,” J. Dispers. Sci. Technol. 31(12), 1611–1617 (2010).
[Crossref]

S. G. Demos, P. DeMange, R. A. Negres, and M. D. Feit, “Investigation of the electronic and physical properties of defect structures responsible for laser-induced damage in DKDP crystals,” Opt. Express 18(13), 13788–13804 (2010).
[Crossref] [PubMed]

S. Beltaos, “Oblique impingement of circular turbulent jets,” J. Hydraul. Res. 14(1), 17–36 (2010).
[Crossref]

J. Wang, T. Tsuzuki, L. Sun, and X. Wang, “Reverse Microemulsion-Mediated Synthesis of SiO2-Coated ZnO Composite Nanoparticles: Multiple Cores with Tunable Shell Thickness,” ACS Appl. Mater. Interfaces 2(4), 957–960 (2010).
[Crossref] [PubMed]

2009 (3)

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
[Crossref]

S. Reyné, G. Duchateau, J. Y. Natoli, and L. Lamaignère, “Laser-induced damage of KDP crystals by 1omega nanosecond pulses: influence of crystal orientation,” Opt. Express 17(24), 21652–21665 (2009).
[Crossref] [PubMed]

J. A. Menapace, P. R. Ehrmann, and R. C. Bickel, “Magnetorheological finishing (MRF) of potassium dihydrogen phosphate (KDP) crystals: nonaqueous fluids development, optical finish, and laser damage performance at 1064 nm and 532 nm,” Proc. SPIE 7504, 750414 (2009).
[Crossref]

2008 (2)

F. C. Tsai, B. H. Yan, C. Y. Kuan, and F. Y. Huang, “A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel,” Int. J. Mach. Tools Manuf. 48(7–8), 932–945 (2008).
[Crossref]

M. Chen, Q. Pang, J. Wang, and K. Cheng, “Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods,” Int. J. Mach. Tools Manuf. 48(7–8), 905–913 (2008).
[Crossref]

2007 (1)

M. A. James-Smith, D. Shekhawat, B. M. Moudgil, and D. O. Shah, “Determination of drug and fatty acid binding capacity to pluronic f127 in microemulsions,” Langmuir 23(4), 1640–1644 (2007).
[Crossref] [PubMed]

2006 (2)

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

N. Balamurugan and P. Ramasamy, “Investigation of the growth rate formula and bulk laser damage threshold KDP crystal growth from aqueous solution by the Sankaranarayanan-Ramasamy (SR) method,” Cryst. Growth Des. 6(7), 1642–1644 (2006).
[Crossref]

2005 (2)

K. Fukumoto, M. Yoshizawa, and H. Ohno, “Room temperature ionic liquids from 20 natural amino acids,” J. Am. Chem. Soc. 127(8), 2398–2399 (2005).
[Crossref] [PubMed]

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

2004 (1)

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

2002 (1)

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2 PO4 crystals for the world’s most powerful laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
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2000 (1)

R. Nagarajan and E. Ruckenstein, “Molecular theory of microemulsions,” Langmuir 16(16), 6400–6415 (2000).
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1998 (1)

Abbas, S.

Abromavicius, G.

An, C.

Anjum, D. H.

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
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Arvind, K.

S. Mittal, K. Arvind, A. S. Laxmiprasad, and S. S. Pruthvi, “Design and Development of Pockels Cell Driver for Q Switch LASER in Space Applications,” J. Inst. Electron. Telecommun. Eng. 63(5), 694–699 (2017).

Atherton, L. J.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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Atkinson, J. F.

S. M. Ghaneeizad, J. F. Atkinson, and S. J. Bennett, “Effect of flow confinement on the hydrodynamics of circular impinging jets: implications for erosion assessment,” Environ. Fluid Mech. 15(1), 1–25 (2015).
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Baisden, P. A.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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Balamurugan, N.

N. Balamurugan and P. Ramasamy, “Investigation of the growth rate formula and bulk laser damage threshold KDP crystal growth from aqueous solution by the Sankaranarayanan-Ramasamy (SR) method,” Cryst. Growth Des. 6(7), 1642–1644 (2006).
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Balke, N.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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Basset, J. M.

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
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Bayramian, A. J.

Beaucamp, A.

A. Beaucamp, Y. Namba, and R. Freeman, “Dynamic multiphase modeling and optimization of fluid jet polishing process,” CIRP Ann.- Manuf. Techn. 61(1), 315–318 (2012).
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Beltaos, S.

S. Beltaos, “Oblique impingement of circular turbulent jets,” J. Hydraul. Res. 14(1), 17–36 (2010).
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S. M. Ghaneeizad, J. F. Atkinson, and S. J. Bennett, “Effect of flow confinement on the hydrodynamics of circular impinging jets: implications for erosion assessment,” Environ. Fluid Mech. 15(1), 1–25 (2015).
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Berg, R.

M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
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Bi, S.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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Biausque, G. M.

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
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Bickel, R. C.

J. A. Menapace, P. R. Ehrmann, and R. C. Bickel, “Magnetorheological finishing (MRF) of potassium dihydrogen phosphate (KDP) crystals: nonaqueous fluids development, optical finish, and laser damage performance at 1064 nm and 532 nm,” Proc. SPIE 7504, 750414 (2009).
[Crossref]

Black, J. M.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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Borden, M. R.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

Brug, H.

Bullington, A.

Burnham, A. K.

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2 PO4 crystals for the world’s most powerful laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

Buzelis, R.

Campbell, J. H.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

Cao, Z.

Z. Cao and C. F. Cheung, “Theoretical modelling and analysis of the material removal characteristics in fluid jet polishing,” Int. J. Mech. Sci. 89, 158–166 (2014).
[Crossref]

Caps, V.

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
[Crossref] [PubMed]

Catrin, R.

R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
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Chen, F.

F. Chen, X. Miao, Y. Tang, and S. Yin, “A review on recent advances in machining methods based on abrasive jet polishing (AJP),” Int. J. Adv. Manuf. Technol. 90(1–4), 785–799 (2017).
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Chen, M.

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
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J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
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M. Chen, M. Li, J. Cheng, Y. Xiao, and Q. Pang, “Study on the optical performance and characterization method of texture on KH2PO4 surface processed by single point diamond turning,” Appl. Surf. Sci. 279(9), 233–244 (2013).
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M. Chen, Q. Pang, J. Wang, and K. Cheng, “Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods,” Int. J. Mach. Tools Manuf. 48(7–8), 905–913 (2008).
[Crossref]

Cheng, J.

Cheng, K.

M. Chen, Q. Pang, J. Wang, and K. Cheng, “Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods,” Int. J. Mach. Tools Manuf. 48(7–8), 905–913 (2008).
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Cheung, C. F.

C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
[Crossref]

Z. Cao and C. F. Cheung, “Theoretical modelling and analysis of the material removal characteristics in fluid jet polishing,” Int. J. Mech. Sci. 89, 158–166 (2014).
[Crossref]

Cho, M.

J. Lee, S. Ha, Y. Cho, K. Kim, and M. Cho, “Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra-precision polishing of micro mold pattern,” J. Mech. Sci. Technol. 29(5), 2205–2211 (2015).
[Crossref]

Cho, Y.

J. Lee, S. Ha, Y. Cho, K. Kim, and M. Cho, “Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra-precision polishing of micro mold pattern,” J. Mech. Sci. Technol. 29(5), 2205–2211 (2015).
[Crossref]

Come, J.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Cormont, P.

R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
[Crossref]

Dai, S.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Dai, Y.

De Yoreo, J. J.

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2 PO4 crystals for the world’s most powerful laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

DeMange, P.

Demos, S. G.

Deng, L.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

Di Nicola, J. M.

Ding, J.

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Dong, H.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

Dong, S.

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
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Dong, X.

Drazdys, R.

Du, J.

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Duan, X.

Duchateau, G.

Ehrmann, P. E.

Ehrmann, P. R.

J. A. Menapace, P. R. Ehrmann, and R. C. Bickel, “Magnetorheological finishing (MRF) of potassium dihydrogen phosphate (KDP) crystals: nonaqueous fluids development, optical finish, and laser damage performance at 1064 nm and 532 nm,” Proc. SPIE 7504, 750414 (2009).
[Crossref]

Faehnle, O.

O. Faehnle, “Process optimization in optical fabrication,” Opt. Eng. 55(3), 035106 (2016).
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Fähnle, O. W.

Fan, C.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
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Feit, M. D.

S. G. Demos, P. DeMange, R. A. Negres, and M. D. Feit, “Investigation of the electronic and physical properties of defect structures responsible for laser-induced damage in DKDP crystals,” Opt. Express 18(13), 13788–13804 (2010).
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J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

Feng, G.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Frankena, H. J.

Freeman, R.

A. Beaucamp, Y. Namba, and R. Freeman, “Dynamic multiphase modeling and optimization of fluid jet polishing process,” CIRP Ann.- Manuf. Techn. 61(1), 315–318 (2012).
[Crossref]

Fujii, K.

T. Kusano, K. Fujii, K. Hashimoto, and M. Shibayama, “Water-in-Ionic Liquid Microemulsion Formation in Solvent Mixture of Aprotic and Protic Imidazolium-Based Ionic Liquids,” Langmuir 30(40), 11890–11896 (2014).
[Crossref] [PubMed]

Fukumoto, K.

K. Fukumoto, M. Yoshizawa, and H. Ohno, “Room temperature ionic liquids from 20 natural amino acids,” J. Am. Chem. Soc. 127(8), 2398–2399 (2005).
[Crossref] [PubMed]

Gao, H.

H. Gao, X. Wang, X. Teng, and D. Guo, “Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal,” Sci. China Technol. Sci. 58(11), 1877–1883 (2015).
[Crossref]

B. Wang, Y. Li, and H. Gao, “Water-in-Oil Dispersion for KH2PO4 (KDP) Crystal CMP,” J. Dispers. Sci. Technol. 31(12), 1611–1617 (2010).
[Crossref]

Gao, W.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

Gao, Y.

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Geng, Y. C.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

Ghaneeizad, S. M.

S. M. Ghaneeizad, J. F. Atkinson, and S. J. Bennett, “Effect of flow confinement on the hydrodynamics of circular impinging jets: implications for erosion assessment,” Environ. Fluid Mech. 15(1), 1–25 (2015).
[Crossref]

Gu, Q.

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Guan, C.

Guo, D.

H. Gao, X. Wang, X. Teng, and D. Guo, “Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal,” Sci. China Technol. Sci. 58(11), 1877–1883 (2015).
[Crossref]

Ha, S.

J. Lee, S. Ha, Y. Cho, K. Kim, and M. Cho, “Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra-precision polishing of micro mold pattern,” J. Mech. Sci. Technol. 29(5), 2205–2211 (2015).
[Crossref]

Hackel, R. P.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

Haefner, C.

Han, B.

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Han, B. X.

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Han, S.

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Hashimoto, K.

T. Kusano, K. Fujii, K. Hashimoto, and M. Shibayama, “Water-in-Ionic Liquid Microemulsion Formation in Solvent Mixture of Aprotic and Protic Imidazolium-Based Ionic Liquids,” Langmuir 30(40), 11890–11896 (2014).
[Crossref] [PubMed]

Hawley, R. A.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
[Crossref]

Hawley-Fedder, R. A.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

He, J.

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

Ho, L. T.

C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
[Crossref]

Hou, W.

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Hou, W. G.

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Hu, D. X.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

Hu, H.

Hu, K.

Huang, F. Y.

F. C. Tsai, B. H. Yan, C. Y. Kuan, and F. Y. Huang, “A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel,” Int. J. Mach. Tools Manuf. 48(7–8), 932–945 (2008).
[Crossref]

Huang, P.

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Huang, W.

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

James-Smith, M. A.

M. A. James-Smith, D. Shekhawat, B. M. Moudgil, and D. O. Shah, “Determination of drug and fatty acid binding capacity to pluronic f127 in microemulsions,” Langmuir 23(4), 1640–1644 (2007).
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Jarboe, J.

Ji, F.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
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R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
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C. Stalhandske, K. Persson, M. Lang, and A. Jonsson, “Fluid jet polishing of planar flat glass surfaces and within holes,” Glass Technol.-Part A 55(2), 49–54 (2014).

Jun, D.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

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Kalinin, S. V.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
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T. Kusano, K. Fujii, K. Hashimoto, and M. Shibayama, “Water-in-Ionic Liquid Microemulsion Formation in Solvent Mixture of Aprotic and Protic Imidazolium-Based Ionic Liquids,” Langmuir 30(40), 11890–11896 (2014).
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Lambert, S.

R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
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P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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C. Stalhandske, K. Persson, M. Lang, and A. Jonsson, “Fluid jet polishing of planar flat glass surfaces and within holes,” Glass Technol.-Part A 55(2), 49–54 (2014).

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J. Lee, S. Ha, Y. Cho, K. Kim, and M. Cho, “Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra-precision polishing of micro mold pattern,” J. Mech. Sci. Technol. 29(5), 2205–2211 (2015).
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C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
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Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
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R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
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Li, W.

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H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
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F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
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B. Wang, Y. Li, and H. Gao, “Water-in-Oil Dispersion for KH2PO4 (KDP) Crystal CMP,” J. Dispers. Sci. Technol. 31(12), 1611–1617 (2010).
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Liao, W.

Liu, H.

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
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C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
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Liu, Z.

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Marshall, C.

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R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
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J. A. Menapace, P. R. Ehrmann, and R. C. Bickel, “Magnetorheological finishing (MRF) of potassium dihydrogen phosphate (KDP) crystals: nonaqueous fluids development, optical finish, and laser damage performance at 1064 nm and 532 nm,” Proc. SPIE 7504, 750414 (2009).
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Meyer, A.

M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
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F. Chen, X. Miao, Y. Tang, and S. Yin, “A review on recent advances in machining methods based on abrasive jet polishing (AJP),” Int. J. Adv. Manuf. Technol. 90(1–4), 785–799 (2017).
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Miller, P. E.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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S. Mittal, K. Arvind, A. S. Laxmiprasad, and S. S. Pruthvi, “Design and Development of Pockels Cell Driver for Q Switch LASER in Space Applications,” J. Inst. Electron. Telecommun. Eng. 63(5), 694–699 (2017).

Moudgil, B. M.

M. A. James-Smith, D. Shekhawat, B. M. Moudgil, and D. O. Shah, “Determination of drug and fatty acid binding capacity to pluronic f127 in microemulsions,” Langmuir 23(4), 1640–1644 (2007).
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M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
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Noh, J. H.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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Pan, J.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

Pang, Q.

M. Chen, M. Li, J. Cheng, Y. Xiao, and Q. Pang, “Study on the optical performance and characterization method of texture on KH2PO4 surface processed by single point diamond turning,” Appl. Surf. Sci. 279(9), 233–244 (2013).
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M. Chen, Q. Pang, J. Wang, and K. Cheng, “Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods,” Int. J. Mach. Tools Manuf. 48(7–8), 905–913 (2008).
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Peng, L.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

Peng, W.

Persson, K.

C. Stalhandske, K. Persson, M. Lang, and A. Jonsson, “Fluid jet polishing of planar flat glass surfaces and within holes,” Glass Technol.-Part A 55(2), 49–54 (2014).

Pruthvi, S. S.

S. Mittal, K. Arvind, A. S. Laxmiprasad, and S. S. Pruthvi, “Design and Development of Pockels Cell Driver for Q Switch LASER in Space Applications,” J. Inst. Electron. Telecommun. Eng. 63(5), 694–699 (2017).

Pudasaini, P. R.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
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Riley, M. O.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
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R. Nagarajan and E. Ruckenstein, “Molecular theory of microemulsions,” Langmuir 16(16), 6400–6415 (2000).
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Runkel, M.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
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Runkel, M. J.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
[Crossref]

Samuilovas, R.

Schaffers, K. I.

Shah, D. O.

M. A. James-Smith, D. Shekhawat, B. M. Moudgil, and D. O. Shah, “Determination of drug and fatty acid binding capacity to pluronic f127 in microemulsions,” Langmuir 23(4), 1640–1644 (2007).
[Crossref] [PubMed]

Shekhawat, D.

M. A. James-Smith, D. Shekhawat, B. M. Moudgil, and D. O. Shah, “Determination of drug and fatty acid binding capacity to pluronic f127 in microemulsions,” Langmuir 23(4), 1640–1644 (2007).
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Shen, C.

Shen, D.

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Shibayama, M.

T. Kusano, K. Fujii, K. Hashimoto, and M. Shibayama, “Water-in-Ionic Liquid Microemulsion Formation in Solvent Mixture of Aprotic and Protic Imidazolium-Based Ionic Liquids,” Langmuir 30(40), 11890–11896 (2014).
[Crossref] [PubMed]

Simmel, F. C.

M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
[Crossref] [PubMed]

Smith, C.

Spaeth, M. L.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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Stalhandske, C.

C. Stalhandske, K. Persson, M. Lang, and A. Jonsson, “Fluid jet polishing of planar flat glass surfaces and within holes,” Glass Technol.-Part A 55(2), 49–54 (2014).

Stolz, C. J.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
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Su, J. Q.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
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J. Wang, T. Tsuzuki, L. Sun, and X. Wang, “Reverse Microemulsion-Mediated Synthesis of SiO2-Coated ZnO Composite Nanoparticles: Multiple Cores with Tunable Shell Thickness,” ACS Appl. Mater. Interfaces 2(4), 957–960 (2010).
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P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
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Tang, G.

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

Tang, Y.

F. Chen, X. Miao, Y. Tang, and S. Yin, “A review on recent advances in machining methods based on abrasive jet polishing (AJP),” Int. J. Adv. Manuf. Technol. 90(1–4), 785–799 (2017).
[Crossref]

Taroux, D.

R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
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H. Gao, X. Wang, X. Teng, and D. Guo, “Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal,” Sci. China Technol. Sci. 58(11), 1877–1883 (2015).
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Tie, G.

Tsai, F. C.

F. C. Tsai, B. H. Yan, C. Y. Kuan, and F. Y. Huang, “A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel,” Int. J. Mach. Tools Manuf. 48(7–8), 932–945 (2008).
[Crossref]

Tsuzuki, T.

J. Wang, T. Tsuzuki, L. Sun, and X. Wang, “Reverse Microemulsion-Mediated Synthesis of SiO2-Coated ZnO Composite Nanoparticles: Multiple Cores with Tunable Shell Thickness,” ACS Appl. Mater. Interfaces 2(4), 957–960 (2010).
[Crossref] [PubMed]

Wang, B.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

B. Wang, Y. Li, and H. Gao, “Water-in-Oil Dispersion for KH2PO4 (KDP) Crystal CMP,” J. Dispers. Sci. Technol. 31(12), 1611–1617 (2010).
[Crossref]

Wang, C.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

Wang, C. J.

C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
[Crossref]

Wang, D.

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Wang, H.

Wang, J.

Wang, L.

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

Wang, S.

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Wang, X.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

H. Gao, X. Wang, X. Teng, and D. Guo, “Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal,” Sci. China Technol. Sci. 58(11), 1877–1883 (2015).
[Crossref]

J. Wang, T. Tsuzuki, L. Sun, and X. Wang, “Reverse Microemulsion-Mediated Synthesis of SiO2-Coated ZnO Composite Nanoparticles: Multiple Cores with Tunable Shell Thickness,” ACS Appl. Mater. Interfaces 2(4), 957–960 (2010).
[Crossref] [PubMed]

Wang, Y.

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
[Crossref]

Ward, T. Z.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Wegner, P. J.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
[Crossref]

Wei, Q.

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

Weitz, M.

M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
[Crossref] [PubMed]

Whitman, P. K.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2 PO4 crystals for the world’s most powerful laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

Wong, A. T.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Wong, L. L.

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
[Crossref]

Wu, B.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

Xia, Y.

Xiao, Y.

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref] [PubMed]

M. Chen, M. Li, J. Cheng, Y. Xiao, and Q. Pang, “Study on the optical performance and characterization method of texture on KH2PO4 surface processed by single point diamond turning,” Appl. Surf. Sci. 279(9), 233–244 (2013).
[Crossref]

Xie, X.

Xu, M.

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

Xu, X.

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Yan, B. H.

F. C. Tsai, B. H. Yan, C. Y. Kuan, and F. Y. Huang, “A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel,” Int. J. Mach. Tools Manuf. 48(7–8), 932–945 (2008).
[Crossref]

Yang, H.

Ye, T.

Yin, S.

F. Chen, X. Miao, Y. Tang, and S. Yin, “A review on recent advances in machining methods based on abrasive jet polishing (AJP),” Int. J. Adv. Manuf. Technol. 90(1–4), 785–799 (2017).
[Crossref]

Ying, S.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

Yoshizawa, M.

K. Fukumoto, M. Yoshizawa, and H. Ohno, “Room temperature ionic liquids from 20 natural amino acids,” J. Am. Chem. Soc. 127(8), 2398–2399 (2005).
[Crossref] [PubMed]

Yu, G.

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
[Crossref]

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

Yu, J.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

Yuan, H. Y.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

Zeng, X.

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

Zhang, B.

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
[Crossref] [PubMed]

Zhang, G.

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

Zhang, P.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Zhang, R.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

Zhang, S. H.

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Zhang, X.

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
[Crossref] [PubMed]

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
[Crossref]

Zhang, Y.

Zhao, Q.

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
[Crossref]

Zhao, W.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Zhao, X. Y.

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Zhao, Z.

Zheng, L. Q.

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Zheng, M.

Zheng, W. G.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

Zheng, Y.

Zhou, L.

Zhou, M.

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

Zhou, Y.

Y. Zhou and J. Qu, “Ionic Liquids as Lubricant Additives: A Review,” ACS Appl. Mater. Interfaces 9(4), 3209–3222 (2017).
[Crossref] [PubMed]

Zhu, M.

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Zhu, Q. H.

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

ACS Appl. Mater. Interfaces (4)

J. Wang, T. Tsuzuki, L. Sun, and X. Wang, “Reverse Microemulsion-Mediated Synthesis of SiO2-Coated ZnO Composite Nanoparticles: Multiple Cores with Tunable Shell Thickness,” ACS Appl. Mater. Interfaces 2(4), 957–960 (2010).
[Crossref] [PubMed]

G. M. Biausque, P. V. Laveille, D. H. Anjum, B. Zhang, X. Zhang, V. Caps, and J. M. Basset, “One-Pot Synthesis of Size- and Composition-Controlled Ni-Rich NiPt Alloy Nanoparticles in a Reverse Microemulsion System and Their Application,” ACS Appl. Mater. Interfaces 9(36), 30643–30653 (2017).
[Crossref] [PubMed]

J. M. Black, J. Come, S. Bi, M. Zhu, W. Zhao, A. T. Wong, J. H. Noh, P. R. Pudasaini, P. Zhang, M. B. Okatan, S. Dai, S. V. Kalinin, P. D. Rack, T. Z. Ward, G. Feng, and N. Balke, “Role of Electrical Double Layer Structure in Ionic Liquid Gated Devices,” ACS Appl. Mater. Interfaces 9(46), 40949–40958 (2017).
[Crossref] [PubMed]

Y. Zhou and J. Qu, “Ionic Liquids as Lubricant Additives: A Review,” ACS Appl. Mater. Interfaces 9(4), 3209–3222 (2017).
[Crossref] [PubMed]

Appl. Opt. (6)

Appl. Surf. Sci. (2)

F. Ji, M. Xu, B. Wang, C. Wang, X. Li, Y. Zhang, M. Zhou, W. Huang, Q. Wei, G. Tang, and J. He, “Preparation of methoxyl poly (ethylene glycol) (MPEG)-coated carbonyl iron particles (CIPs) and their application in potassium dihydrogen phosphate (KDP) magnetorheological finishing (MRF),” Appl. Surf. Sci. 353, 723–727 (2015).
[Crossref]

M. Chen, M. Li, J. Cheng, Y. Xiao, and Q. Pang, “Study on the optical performance and characterization method of texture on KH2PO4 surface processed by single point diamond turning,” Appl. Surf. Sci. 279(9), 233–244 (2013).
[Crossref]

CIRP Ann.- Manuf. Techn. (1)

A. Beaucamp, Y. Namba, and R. Freeman, “Dynamic multiphase modeling and optimization of fluid jet polishing process,” CIRP Ann.- Manuf. Techn. 61(1), 315–318 (2012).
[Crossref]

Cryst. Growth Des. (1)

N. Balamurugan and P. Ramasamy, “Investigation of the growth rate formula and bulk laser damage threshold KDP crystal growth from aqueous solution by the Sankaranarayanan-Ramasamy (SR) method,” Cryst. Growth Des. 6(7), 1642–1644 (2006).
[Crossref]

Environ. Fluid Mech. (1)

S. M. Ghaneeizad, J. F. Atkinson, and S. J. Bennett, “Effect of flow confinement on the hydrodynamics of circular impinging jets: implications for erosion assessment,” Environ. Fluid Mech. 15(1), 1–25 (2015).
[Crossref]

Fus. Sci. Technol. (1)

P. A. Baisden, L. J. Atherton, R. A. Hawley, T. A. Land, J. A. Menapace, P. E. Miller, M. J. Runkel, M. L. Spaeth, C. J. Stolz, T. I. Suratwala, P. J. Wegner, and L. L. Wong, “Large Optics for the National Ignition Facility,” Fus. Sci. Technol. 69(1), 295–351 (2016).
[Crossref]

Glass Technol.-Part A (1)

C. Stalhandske, K. Persson, M. Lang, and A. Jonsson, “Fluid jet polishing of planar flat glass surfaces and within holes,” Glass Technol.-Part A 55(2), 49–54 (2014).

Green Chem. (1)

Y. Gao, N. Li, L. Q. Zheng, X. Y. Zhao, S. H. Zhang, B. X. Han, W. G. Hou, and G. Z. Li, “A cyclic voltammetric technique for the detection of micro-regions of bmimPF(6)/Tween 20/H2O microemulsions and their performance characterization by UV-Vis spectroscopy,” Green Chem. 8(1), 43–49 (2006).
[Crossref]

Int. J. Adv. Manuf. Technol. (1)

F. Chen, X. Miao, Y. Tang, and S. Yin, “A review on recent advances in machining methods based on abrasive jet polishing (AJP),” Int. J. Adv. Manuf. Technol. 90(1–4), 785–799 (2017).
[Crossref]

Int. J. Mach. Tools Manuf. (4)

F. C. Tsai, B. H. Yan, C. Y. Kuan, and F. Y. Huang, “A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel,” Int. J. Mach. Tools Manuf. 48(7–8), 932–945 (2008).
[Crossref]

C. J. Wang, C. F. Cheung, L. T. Ho, M. Y. Liu, and W. B. Lee, “A novel multi jet polishing process and tool for high-efficiency polishing,” Int. J. Mach. Tools Manuf. 115, 60–73 (2017).
[Crossref]

L. Peng, L. Deng, D. Jun, B. Wu, X. Zeng, S. Ying, and X. Wang, “A study on laser multi-focus separation technology of thick KDP crystal,” Int. J. Mach. Tools Manuf. 118–119, 26–36 (2017).

M. Chen, Q. Pang, J. Wang, and K. Cheng, “Analysis of 3D microtopography in machined KDP crystal surfaces based on fractal and wavelet methods,” Int. J. Mach. Tools Manuf. 48(7–8), 905–913 (2008).
[Crossref]

Int. J. Mech. Sci. (1)

Z. Cao and C. F. Cheung, “Theoretical modelling and analysis of the material removal characteristics in fluid jet polishing,” Int. J. Mech. Sci. 89, 158–166 (2014).
[Crossref]

Int. Mater. Rev. (1)

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2 PO4 crystals for the world’s most powerful laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

J. Am. Chem. Soc. (2)

M. Weitz, A. Mückl, K. Kapsner, R. Berg, A. Meyer, and F. C. Simmel, “Communication and Computation by Bacteria Compartmentalized within Microemulsion Droplets,” J. Am. Chem. Soc. 136(1), 72–75 (2014).
[Crossref] [PubMed]

K. Fukumoto, M. Yoshizawa, and H. Ohno, “Room temperature ionic liquids from 20 natural amino acids,” J. Am. Chem. Soc. 127(8), 2398–2399 (2005).
[Crossref] [PubMed]

J. Dispers. Sci. Technol. (1)

B. Wang, Y. Li, and H. Gao, “Water-in-Oil Dispersion for KH2PO4 (KDP) Crystal CMP,” J. Dispers. Sci. Technol. 31(12), 1611–1617 (2010).
[Crossref]

J. Hydraul. Res. (1)

S. Beltaos, “Oblique impingement of circular turbulent jets,” J. Hydraul. Res. 14(1), 17–36 (2010).
[Crossref]

J. Inst. Electron. Telecommun. Eng. (1)

S. Mittal, K. Arvind, A. S. Laxmiprasad, and S. S. Pruthvi, “Design and Development of Pockels Cell Driver for Q Switch LASER in Space Applications,” J. Inst. Electron. Telecommun. Eng. 63(5), 694–699 (2017).

J. Mater. Process. Technol. (1)

Q. Zhao, Y. Wang, G. Yu, S. Dong, and X. Zhang, “Investigation of anisotropic mechanisms in ultra-precision diamond machining of KDP crystal,” J. Mater. Process. Technol. 209(8), 4169–4177 (2009).
[Crossref]

J. Mech. Sci. Technol. (1)

J. Lee, S. Ha, Y. Cho, K. Kim, and M. Cho, “Investigation of the polishing characteristics of metal materials and development of micro MR fluid jet polishing system for the ultra-precision polishing of micro mold pattern,” J. Mech. Sci. Technol. 29(5), 2205–2211 (2015).
[Crossref]

Langmuir (4)

Y. Gao, S. Han, B. Han, G. Li, D. Shen, Z. Li, J. Du, W. Hou, and G. Zhang, “TX-100/water/1-butyl-3-methylimidazolium hexafluorophosphate microemulsions,” Langmuir 21(13), 5681–5684 (2005).
[Crossref] [PubMed]

T. Kusano, K. Fujii, K. Hashimoto, and M. Shibayama, “Water-in-Ionic Liquid Microemulsion Formation in Solvent Mixture of Aprotic and Protic Imidazolium-Based Ionic Liquids,” Langmuir 30(40), 11890–11896 (2014).
[Crossref] [PubMed]

R. Nagarajan and E. Ruckenstein, “Molecular theory of microemulsions,” Langmuir 16(16), 6400–6415 (2000).
[Crossref]

M. A. James-Smith, D. Shekhawat, B. M. Moudgil, and D. O. Shah, “Determination of drug and fatty acid binding capacity to pluronic f127 in microemulsions,” Langmuir 23(4), 1640–1644 (2007).
[Crossref] [PubMed]

Materials (Basel) (1)

H. Dong, L. Wang, W. Gao, X. Li, C. Wang, F. Ji, J. Pan, and B. Wang, “KDP Aqueous Solution-in-Oil Microemulsion for Ultra-Precision Chemical-Mechanical Polishing of KDP Crystal,” Materials (Basel) 10(3), 2713 (2017).
[PubMed]

Opt. Eng. (2)

R. Catrin, J. Neauport, D. Taroux, P. Cormont, C. Maunier, and S. Lambert, “Magnetorheological finishing for removing surface and subsurface defects of fused silica optics,” Opt. Eng. 53(9), 092010 (2014).
[Crossref]

O. Faehnle, “Process optimization in optical fabrication,” Opt. Eng. 55(3), 035106 (2016).
[Crossref]

Opt. Express (4)

Opt. Mater. Express (3)

Proc. SPIE (3)

J. A. Menapace, P. R. Ehrmann, and R. C. Bickel, “Magnetorheological finishing (MRF) of potassium dihydrogen phosphate (KDP) crystals: nonaqueous fluids development, optical finish, and laser damage performance at 1064 nm and 532 nm,” Proc. SPIE 7504, 750414 (2009).
[Crossref]

R. Zhang, H. T. Jia, Y. C. Geng, P. Li, L. Q. Liu, X. C. Tian, H. Y. Yuan, C. Fan, J. Q. Su, D. X. Hu, Q. H. Zhu, and W. G. Zheng, “Research of target uniform illumination on SG-III laser facility,” Proc. SPIE 152, 101520Z (2016).
[Crossref]

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[Crossref]

Sci. China Technol. Sci. (1)

H. Gao, X. Wang, X. Teng, and D. Guo, “Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal,” Sci. China Technol. Sci. 58(11), 1877–1883 (2015).
[Crossref]

Other (1)

W. Li, S. Wang, J. Ding, G. Yu, D. Wang, P. Huang, H. Liu, Q. Gu, and X. Xu, “Study on Micro Morphology of Potassium Dihydrogen Phosphate Crystals Grown at Elevated Temperatures,” Crystals7(1184) (2017).
[Crossref]

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Figures (10)

Fig. 1
Fig. 1 Schematic depiction of the preparation of a w/o IL microemulsion.
Fig. 2
Fig. 2 KDP surface with an indentation mark: (a) before soaking, (b) after soaking for 12 h.
Fig. 3
Fig. 3 3D material removal characteristics for (a) PEG-200 system (time: 5 min, pressure: 0.5 MPa, nozzle: 1 mm), (b) IL microemulsion (time: 20 s, pressure: 0.5 MPa, nozzle: 1 mm).
Fig. 4
Fig. 4 Erosion depths and contours of jet spots (time: 20 s, pressure: 0.5 MPa, nozzle: 1 mm; the negative values indicate that material was removed).
Fig. 5
Fig. 5 Contours of removal track (scan rate: 3 mm/min, scan length: 10 mm, pressure: 0.5 MPa, nozzle: 1 mm, λ = 632.8 nm).
Fig. 6
Fig. 6 Schematic depiction of the removal mechanism: (a) distribution of normal impact velocity field (for the case of 30 m/s), (b) contact removal of water droplet, (c) slipping removal of water droplet.
Fig. 7
Fig. 7 Normalized material removal profile.
Fig. 8
Fig. 8 Photographs of the experimental set-up.
Fig. 9
Fig. 9 Surfaces of a KDP sample: (a) before polishing, (b) after AFJP.
Fig. 10
Fig. 10 Raman spectra of KDP crystal surfaces before and after AFJP.

Tables (1)

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Table 1 Jet polishing conditions.

Equations (8)

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R P = A P S
R τ = A τ S
R = R P + R τ = S ( A P + A τ )
A P = k P f ( x , P )
A τ = k τ f ( x , v )
R = S ( k P f ( x , P ) + k τ f ( x , τ ) )
P P m = exp [ 0.693 ( x b ) 2 ]
τ τ m = 0.18 L x ( 0.18 L x + 9.43 x L ) exp [ 114 ( x L ) 2 ]

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