Abstract

Ge20Sb5S75 thin films with high chemical resistance to aliphatic amines were deposited from solutions of various glass concentrations (0.015-0.09 g of grinded glass material/ml of n-butylamine) by the spin-coating technique. As-prepared and annealed thin films were analyzed by spectroscopic ellipsometry and EDS (energy-dispersive X-ray spectroscopy). Results proved that the refractive index of thin films was not affected by the solution concentration (within studied range), and the studied optical properties of deposited samples were homogenous in their volume. The Ge20Sb5S75 solution of the highest concentration (0.09 g/ml) was chosen for deposition of thicker chalcogenide glass material using multiply deposition/thermal stabilization procedure. Prepared multilayers proved to have good optical quality and homogenous chemical resistance through the whole thickness. No interfaces between layers were observed from etching kinetics and SEM scans. Thus, the results confirmed that multiple layers stacking procedure is suitable for deposition of thick homogenous Ge20Sb5S75 thin films.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]

2019 (1)

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

2018 (4)

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

S. Slang, P. Janicek, K. Palka, L. Loghina, and M. Vlcek, “Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation,” Mater. Chem. Phys. 203, 310–318 (2018).
[Crossref]

S. Slang, K. Palka, P. Janicek, M. Grinco, and M. Vlcek, “Solution processed As30Se70 chalcogenide glass thin films with specular optical quality: multi-component solvent approach,” Opt. Mater. Express 8(4), 948–959 (2018).
[Crossref]

N. S. Dutta and C. B. Arnold, “Concentration dependence of As2S3 chalcogenide glass cluster size in amine solution,” RSC Adv. 8(62), 35819–35823 (2018).
[Crossref]

2017 (3)

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

S. Slang, K. Palka, H. Jain, and M. Vlcek, “Influence of annealing on the optical properties, structure, photosensitivity and chemical stability of As30S70 spin-coated thin films,” J. Non-Cryst. Solids 457, 135–140 (2017).
[Crossref]

S. Slang, L. Loghina, K. Palka, and M. Vlcek, “Exposure enhanced photoluminescence of CdS0.9Se0.1 quantum dots embedded in spincoated Ge25S75 thin films,” RSC Adv. 7(85), 53830–53838 (2017).
[Crossref]

2016 (2)

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, and V. Nazabal, “Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies,” J. Non-Cryst. Solids 444, 64–72 (2016).
[Crossref]

S. Slang, P. Janicek, K. Palka, and M. Vlcek, “Structure and properties of spin-coated Ge25S75 chalcogenide thin films,” Opt. Mater. Express 6(6), 1973–1985 (2016).
[Crossref]

2015 (3)

L. Loghina, K. Palka, J. Buzek, S. Slang, and M. Vlcek, “Selective wet etching of amorphous As2Se3 thin films,” J. Non-Cryst. Solids 430, 21–24 (2015).
[Crossref]

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

S. Novak, D. E. Johnston, C. Li, W. Deng, and K. Richardson, “Deposition of Ge23Sb7S70 chalcogenide glass films by electrospray,” Thin Solid Films 588, 56–60 (2015).
[Crossref]

2014 (1)

2013 (2)

2012 (1)

2008 (3)

H. Jain and M. Vlcek, “Glasses for lithography,” J. Non-Cryst. Solids 354(12-13), 1401–1406 (2008).
[Crossref]

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
[Crossref]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

2007 (1)

R. M. Almeida, L. F. Santos, A. Simens, A. Ganjoo, and H. Jain, “Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation,” J. Non-Cryst. Solids 353(18-21), 2066–2068 (2007).
[Crossref]

2006 (1)

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

2004 (1)

2002 (1)

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
[Crossref]

1987 (1)

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin films,” Thin Solid Films 147(3), 275–284 (1987).
[Crossref]

1982 (1)

G. C. Cherna and I. Lauks, “Spin coated amorphous chalcogenide films,” J. Appl. Phys. 53(10), 6979–6982 (1982).
[Crossref]

1935 (1)

D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen substanzen,” Ann. Phys. 416(7), 636–664 (1935).
[Crossref]

Adam, J.-L.

J.-L. Adam and X. Zhang, Chalcogenide Glasses: Preparation, Properties and Applications (Woodhead Publishing, 2014).

Almeida, R. M.

R. M. Almeida, L. F. Santos, A. Simens, A. Ganjoo, and H. Jain, “Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation,” J. Non-Cryst. Solids 353(18-21), 2066–2068 (2007).
[Crossref]

Alonso-Ramos, C.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Altug, H.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Arnold, C. B.

N. S. Dutta and C. B. Arnold, “Concentration dependence of As2S3 chalcogenide glass cluster size in amine solution,” RSC Adv. 8(62), 35819–35823 (2018).
[Crossref]

Y. Zha and C. B. Arnold, “Solution-processing of thick chalcogenide-chalcogenide and metal-chalcogenide structures by spin-coating and multilayer lamination,” Opt. Mater. Express 3(2), 309–317 (2013).
[Crossref]

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Baudet, E.

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, and V. Nazabal, “Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies,” J. Non-Cryst. Solids 444, 64–72 (2016).
[Crossref]

Benes, L.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Bris, A. L.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Brückner, S.

Bruggeman, D. A. G.

D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen substanzen,” Ann. Phys. 416(7), 636–664 (1935).
[Crossref]

Buzek, J.

L. Loghina, K. Palka, J. Buzek, S. Slang, and M. Vlcek, “Selective wet etching of amorphous As2Se3 thin films,” J. Non-Cryst. Solids 430, 21–24 (2015).
[Crossref]

Cardinaud, C.

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, and V. Nazabal, “Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies,” J. Non-Cryst. Solids 444, 64–72 (2016).
[Crossref]

Cha, H.

Charters, R. P.

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
[Crossref]

Chen, N.

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin films,” Thin Solid Films 147(3), 275–284 (1987).
[Crossref]

Cherna, G. C.

G. C. Cherna and I. Lauks, “Spin coated amorphous chalcogenide films,” J. Appl. Phys. 53(10), 6979–6982 (1982).
[Crossref]

Chrissanthopoulos, A.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

Deng, W.

S. Novak, D. E. Johnston, C. Li, W. Deng, and K. Richardson, “Deposition of Ge23Sb7S70 chalcogenide glass films by electrospray,” Thin Solid Films 588, 56–60 (2015).
[Crossref]

Dirisu, A. O.

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Dutta, N. S.

N. S. Dutta and C. B. Arnold, “Concentration dependence of As2S3 chalcogenide glass cluster size in amine solution,” RSC Adv. 8(62), 35819–35823 (2018).
[Crossref]

Frumar, M.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

Gamaly, E. G.

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
[Crossref]

Ganjoo, A.

R. M. Almeida, L. F. Santos, A. Simens, A. Ganjoo, and H. Jain, “Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation,” J. Non-Cryst. Solids 353(18-21), 2066–2068 (2007).
[Crossref]

Girard, A.

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, and V. Nazabal, “Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies,” J. Non-Cryst. Solids 444, 64–72 (2016).
[Crossref]

Gmachl, C. F.

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Grinco, M.

Gu, T.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Gupta, T.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Hamman, M.

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin films,” Thin Solid Films 147(3), 275–284 (1987).
[Crossref]

Ho, K.-T.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Hô, N.

Howard, S. S.

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Hu, J.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Huang, Y.-Z.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Huang, Z.

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
[Crossref]

Hwang, Y.

Jain, H.

S. Slang, K. Palka, H. Jain, and M. Vlcek, “Influence of annealing on the optical properties, structure, photosensitivity and chemical stability of As30S70 spin-coated thin films,” J. Non-Cryst. Solids 457, 135–140 (2017).
[Crossref]

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

H. Jain and M. Vlcek, “Glasses for lithography,” J. Non-Cryst. Solids 354(12-13), 1401–1406 (2008).
[Crossref]

R. M. Almeida, L. F. Santos, A. Simens, A. Ganjoo, and H. Jain, “Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation,” J. Non-Cryst. Solids 353(18-21), 2066–2068 (2007).
[Crossref]

Jambor, R.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Janicek, P.

Jeong, J. C.

Johnston, D. E.

S. Novak, D. E. Johnston, C. Li, W. Deng, and K. Richardson, “Deposition of Ge23Sb7S70 chalcogenide glass films by electrospray,” Thin Solid Films 588, 56–60 (2015).
[Crossref]

Kasap, S. O.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Kim, H.-J.

Kim, J.-H.

Kohoutek, T.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

Kostadinova, O.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

Koughia, C.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Kovalskiy, A.

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

Krbal, M.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Lai, F.

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
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G. C. Cherna and I. Lauks, “Spin coated amorphous chalcogenide films,” J. Appl. Phys. 53(10), 6979–6982 (1982).
[Crossref]

Li, C.

S. Novak, D. E. Johnston, C. Li, W. Deng, and K. Richardson, “Deposition of Ge23Sb7S70 chalcogenide glass films by electrospray,” Thin Solid Films 588, 56–60 (2015).
[Crossref]

Li, J.-Y.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Li, L.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Lin, H.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Lin, L.

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
[Crossref]

Liu, Z.

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Loghina, L.

S. Slang, P. Janicek, K. Palka, L. Loghina, and M. Vlcek, “Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation,” Mater. Chem. Phys. 203, 310–318 (2018).
[Crossref]

S. Slang, L. Loghina, K. Palka, and M. Vlcek, “Exposure enhanced photoluminescence of CdS0.9Se0.1 quantum dots embedded in spincoated Ge25S75 thin films,” RSC Adv. 7(85), 53830–53838 (2017).
[Crossref]

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

L. Loghina, K. Palka, J. Buzek, S. Slang, and M. Vlcek, “Selective wet etching of amorphous As2Se3 thin films,” J. Non-Cryst. Solids 430, 21–24 (2015).
[Crossref]

Lopez, C.

Lu, N.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

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A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
[Crossref]

Lv, J.

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
[Crossref]

Martin-Montier, L.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Martucci, A.

McClenaghan, N. D.

Michon, J.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Musgraves, J. D.

Nazabal, V.

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, and V. Nazabal, “Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies,” J. Non-Cryst. Solids 444, 64–72 (2016).
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Nguyen-Dang, T.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

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Novak, S.

Oswald, J.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Page, A. G.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Palka, K.

S. Slang, P. Janicek, K. Palka, L. Loghina, and M. Vlcek, “Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation,” Mater. Chem. Phys. 203, 310–318 (2018).
[Crossref]

S. Slang, K. Palka, P. Janicek, M. Grinco, and M. Vlcek, “Solution processed As30Se70 chalcogenide glass thin films with specular optical quality: multi-component solvent approach,” Opt. Mater. Express 8(4), 948–959 (2018).
[Crossref]

S. Slang, L. Loghina, K. Palka, and M. Vlcek, “Exposure enhanced photoluminescence of CdS0.9Se0.1 quantum dots embedded in spincoated Ge25S75 thin films,” RSC Adv. 7(85), 53830–53838 (2017).
[Crossref]

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

S. Slang, K. Palka, H. Jain, and M. Vlcek, “Influence of annealing on the optical properties, structure, photosensitivity and chemical stability of As30S70 spin-coated thin films,” J. Non-Cryst. Solids 457, 135–140 (2017).
[Crossref]

S. Slang, P. Janicek, K. Palka, and M. Vlcek, “Structure and properties of spin-coated Ge25S75 chalcogenide thin films,” Opt. Mater. Express 6(6), 1973–1985 (2016).
[Crossref]

L. Loghina, K. Palka, J. Buzek, S. Slang, and M. Vlcek, “Selective wet etching of amorphous As2Se3 thin films,” J. Non-Cryst. Solids 430, 21–24 (2015).
[Crossref]

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

K. Palka, T. Syrovy, S. Schröter, S. Brückner, M. Rothhardt, and M. Vlcek, “Preparation of arsenic sulfide thin films for integrated optical elements by spiral bar coating,” Opt. Mater. Express 4(2), 384–395 (2014).
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Qiao, S.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

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T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
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L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

S. Novak, D. E. Johnston, C. Li, W. Deng, and K. Richardson, “Deposition of Ge23Sb7S70 chalcogenide glass films by electrospray,” Thin Solid Films 588, 56–60 (2015).
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S. Novak, L. Scarpantonio, J. Novak, M. D. Pre, A. Martucci, J. D. Musgraves, N. D. McClenaghan, and K. Richardson, “Incorporation of luminescent CdSe/ZnS core-shell quantum dots and PbS quantum dots into solution-derived chalcogenide glass films,” Opt. Mater. Express 3(6), 729–738 (2013).
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A. Zoubir, M. Richardson, C. Rivero, A. Schulte, C. Lopez, K. Richardson, N. Hô, and R. Vallée, “Direct femtosecond laser writing of waveguides in As2S3 thin films,” Opt. Lett. 29(7), 748–750 (2004).
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Richardson, M.

Rinnert, E.

E. Baudet, C. Cardinaud, A. Girard, E. Rinnert, and V. Nazabal, “Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies,” J. Non-Cryst. Solids 444, 64–72 (2016).
[Crossref]

Rivero, C.

Rode, A. V.

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
[Crossref]

Rothhardt, M.

Samoc, M.

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
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J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin films,” Thin Solid Films 147(3), 275–284 (1987).
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J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin films,” Thin Solid Films 147(3), 275–284 (1987).
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R. M. Almeida, L. F. Santos, A. Simens, A. Ganjoo, and H. Jain, “Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation,” J. Non-Cryst. Solids 353(18-21), 2066–2068 (2007).
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Schröter, S.

Schulte, A.

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R. M. Almeida, L. F. Santos, A. Simens, A. Ganjoo, and H. Jain, “Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation,” J. Non-Cryst. Solids 353(18-21), 2066–2068 (2007).
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S. Slang, P. Janicek, K. Palka, L. Loghina, and M. Vlcek, “Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation,” Mater. Chem. Phys. 203, 310–318 (2018).
[Crossref]

S. Slang, K. Palka, P. Janicek, M. Grinco, and M. Vlcek, “Solution processed As30Se70 chalcogenide glass thin films with specular optical quality: multi-component solvent approach,” Opt. Mater. Express 8(4), 948–959 (2018).
[Crossref]

S. Slang, L. Loghina, K. Palka, and M. Vlcek, “Exposure enhanced photoluminescence of CdS0.9Se0.1 quantum dots embedded in spincoated Ge25S75 thin films,” RSC Adv. 7(85), 53830–53838 (2017).
[Crossref]

S. Slang, K. Palka, H. Jain, and M. Vlcek, “Influence of annealing on the optical properties, structure, photosensitivity and chemical stability of As30S70 spin-coated thin films,” J. Non-Cryst. Solids 457, 135–140 (2017).
[Crossref]

S. Slang, P. Janicek, K. Palka, and M. Vlcek, “Structure and properties of spin-coated Ge25S75 chalcogenide thin films,” Opt. Mater. Express 6(6), 1973–1985 (2016).
[Crossref]

L. Loghina, K. Palka, J. Buzek, S. Slang, and M. Vlcek, “Selective wet etching of amorphous As2Se3 thin films,” J. Non-Cryst. Solids 430, 21–24 (2015).
[Crossref]

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

Song, S.

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Sorin, F.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

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L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
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Tanaka, K.

K. Tanaka and K. Shimakawa, Amorphous Chalcogenide Semiconductors and Related Materials (Springer, 2011).

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L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Vlcek, M.

S. Slang, P. Janicek, K. Palka, L. Loghina, and M. Vlcek, “Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation,” Mater. Chem. Phys. 203, 310–318 (2018).
[Crossref]

S. Slang, K. Palka, P. Janicek, M. Grinco, and M. Vlcek, “Solution processed As30Se70 chalcogenide glass thin films with specular optical quality: multi-component solvent approach,” Opt. Mater. Express 8(4), 948–959 (2018).
[Crossref]

S. Slang, L. Loghina, K. Palka, and M. Vlcek, “Exposure enhanced photoluminescence of CdS0.9Se0.1 quantum dots embedded in spincoated Ge25S75 thin films,” RSC Adv. 7(85), 53830–53838 (2017).
[Crossref]

S. Slang, K. Palka, H. Jain, and M. Vlcek, “Influence of annealing on the optical properties, structure, photosensitivity and chemical stability of As30S70 spin-coated thin films,” J. Non-Cryst. Solids 457, 135–140 (2017).
[Crossref]

S. Slang, P. Janicek, K. Palka, and M. Vlcek, “Structure and properties of spin-coated Ge25S75 chalcogenide thin films,” Opt. Mater. Express 6(6), 1973–1985 (2016).
[Crossref]

L. Loghina, K. Palka, J. Buzek, S. Slang, and M. Vlcek, “Selective wet etching of amorphous As2Se3 thin films,” J. Non-Cryst. Solids 430, 21–24 (2015).
[Crossref]

S. Slang, K. Palka, L. Loghina, A. Kovalskiy, H. Jain, and M. Vlcek, “Mechanism of the dissolution of As–S chalcogenide glass in n-butylamine and its influence on the structure of spin coated layers,” J. Non-Cryst. Solids 426, 125–131 (2015).
[Crossref]

K. Palka, T. Syrovy, S. Schröter, S. Brückner, M. Rothhardt, and M. Vlcek, “Preparation of arsenic sulfide thin films for integrated optical elements by spiral bar coating,” Opt. Mater. Express 4(2), 384–395 (2014).
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H. Jain and M. Vlcek, “Glasses for lithography,” J. Non-Cryst. Solids 354(12-13), 1401–1406 (2008).
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L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

Weissova, V.

L. Strizik, T. Wagner, V. Weissova, J. Oswald, K. Palka, L. Benes, M. Krbal, R. Jambor, C. Koughia, and S. O. Kasap, “Solution-processed Er3+-doped As3S7 chalcogenide films: optical properties and 1.5 μm photoluminescence activated by thermal treatment,” J. Mater. Chem. C 5(33), 8489–8497 (2017).
[Crossref]

Wu, X.

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
[Crossref]

Yadav, A.

L. Li, H. Lin, S. Qiao, Y.-Z. Huang, J.-Y. Li, J. Michon, T. Gu, C. Alonso-Ramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

Yan, Q.

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
[Crossref]

Yan, W.

T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Yannopoulos, S. N.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
[Crossref]

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T. Gupta, L. Martin-Montier, W. Yan, A. L. Bris, T. Nguyen-Dang, A. G. Page, K.-T. Ho, F. Yesilkoy, H. Altug, Y. Qu, and F. Sorin, “Self-assembly of nanostructured glass metasurfaces via templated fluid instabilities,” Nat. Nanotechnol. 14(4), 320–327 (2019).
[Crossref]

Zakery, A.

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
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Zhang, X.

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X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
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Appl. Phys. Lett. (1)

S. Song, S. S. Howard, Z. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett. 89(4), 041115 (2006).
[Crossref]

Appl. Surf. Sci. (2)

A. V. Rode, A. Zakery, M. Samoc, R. P. Charters, E. G. Gamaly, and B. Luther-Davies, “Laser-deposited As2S3 chalcogenide films for waveguide applications,” Appl. Surf. Sci. 197-198, 481–485 (2002).
[Crossref]

X. Wu, F. Lai, L. Lin, J. Lv, B. Zhuang, Q. Yan, and Z. Huang, “Optical inhomogeneity of ZnS films deposited by thermal evaporation,” Appl. Surf. Sci. 254(20), 6455–6460 (2008).
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T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys. 103(6), 063511 (2008).
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Mater. Chem. Phys. (1)

S. Slang, P. Janicek, K. Palka, L. Loghina, and M. Vlcek, “Optical properties and surface structuring of Ge20Sb5S75 amorphous chalcogenide thin films deposited by spin-coating and vacuum thermal evaporation,” Mater. Chem. Phys. 203, 310–318 (2018).
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Figures (8)

Fig. 1.
Fig. 1. Prepared Ge20Sb5S75 ChG solutions. A: 0.015, B: 0.03, C: 0.045, D: 0.06, E: 0.075, F: 0.09 g/ ml BA.
Fig. 2.
Fig. 2. As-prepared (A) and thermally stabilized (B) Ge20Sb5S75 ChG thin films.
Fig. 3.
Fig. 3. Thickness (A) and refractive index at λ = 1550 nm (B) of as-prepared and annealed Ge20Sb5S75 thin films in dependence on source solution concentration.
Fig. 4.
Fig. 4. The N:Ge elemental ratio of as-prepared and annealed Ge20Sb5S75 thin films in dependence on source solution concentration. Error bars represent standard deviation from averaged value.
Fig. 5.
Fig. 5. Thickness (A) and refractive index at λ = 1550 nm (B) of annealed Ge20Sb5S75 multilayers in dependence on number of deposited layers. Error bars represent standard deviation from averaged value.
Fig. 6.
Fig. 6. The elemental composition of annealed Ge20Sb5S75 multilayers in dependence on number of deposited layers. Dashed lines indicate nominal planned composition.
Fig. 7.
Fig. 7. Dependence of etching time on number of deposited Ge20Sb5S75 layers (A) and etching curves of prepared Ge20Sb5S75 multilayers (B).
Fig. 8.
Fig. 8. SEM scans of Ge20Sb5S75 5-layered sample cross-section – secondary electrons signal (left) together with backscattered electrons signal (right).

Tables (2)

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Table 1. Values of Ge20Sb5S75 thin film’s thickness, surface roughness and refractive index at 1550 nm (n1550) determined by spectroscopic ellipsometry

Tables Icon

Table 2. Values of Ge20Sb5S75 multilayers thickness, surface roughness and refractive index at 1550 nm (n1550) determined by spectroscopic ellipsometry

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