Abstract

We investigate the influence of plasma treatments, especially a 0 V-bias, potentially low damage O2 plasma as well as a biased Ar/SF6/O2 plasma on shallow, negative nitrogen vacancy (NV) centers. We ignite and sustain our 0 V-bias plasma using purely inductive coupling. To this end, we pre-treat surfaces of high purity chemical vapor deposited single-crystal diamond (SCD). Subsequently, we create ∼10 nm deep NV centers via implantation and annealing. Onto the annealed SCD surface, we fabricate nanopillar structures that efficiently waveguide the photoluminescence (PL) of shallow NV. Characterizing single NV inside these nanopillars, we find that the Ar/SF6/O2 plasma treatment quenches NV PL even considering that the annealing and cleaning steps following ion implantation remove any surface termination. In contrast, for our 0 V-bias as well as biased O2 plasma, we observe stable NV PL and low background fluorescence from the photonic nanostructures.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
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    [Crossref]
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    [Crossref]

2019 (3)

M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
[Crossref]

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

M. Radtke, R. Nelz, L. Render, and E. Neu, “Reliable nanofabrication of single-crystal diamond photonic nanostructures for nanoscale sensing,” Micromachines 10(11), 718 (2019).
[Crossref]

2018 (8)

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

L. Xie, T. X. Zhou, R. J. Stöhr, and A. Yacoby, “Crystallographic orientation dependent reactive ion etching in single crystal diamond,” Adv. Mater. 30(11), 1705501 (2018).
[Crossref]

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

F. Casola, T. van der Sar, and A. Yacoby, “Probing condensed matter physics with magnetometry based on nitrogen-vacancy centres in diamond,” Nat. Rev. Mater. 3(1), 17088 (2018).
[Crossref]

P. Fuchs, M. Challier, and E. Neu, “Optimized single-crystal diamond scanning probes for high sensitivity magnetometry,” New J. Phys. 20(12), 125001 (2018).
[Crossref]

L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
[Crossref]

2017 (1)

Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
[Crossref]

2016 (5)

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

Y. Zhang, C. Charles, and R. Boswell, “Thermodynamic study on plasma expansion along a divergent magnetic field,” Phys. Rev. Lett. 116(2), 025001 (2016).
[Crossref]

Y. Zhang, C. Charles, and R. Boswell, “Thermodynamic study on plasma expansion along a divergent magnetic field,” Phys. Rev. Lett. 116(2), 025001 (2016).
[Crossref]

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

2015 (5)

B. J. Shields, Q. P. Unterreithmeier, N. P. de Leon, H. Park, and M. D. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114(13), 136402 (2015).
[Crossref]

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching,” Nano Lett. 15(8), 5131–5136 (2015).
[Crossref]

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5(4), 041051 (2015).
[Crossref]

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
[Crossref]

2014 (4)

J. Teissier, A. Barfuss, P. Appel, E. Neu, and P. Maletinsky, “Strain coupling of a nitrogen-vacancy center spin to a diamond mechanical oscillator,” Phys. Rev. Lett. 113(2), 020503 (2014).
[Crossref]

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

Y. Tao, J. Boss, B. Moores, and C. Degen, “Single-crystal diamond nanomechanical resonators with quality factors exceeding one million,” Nat. Commun. 5(1), 3638 (2014).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

2013 (3)

G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
[Crossref]

J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
[Crossref]

N. Aslam, G. Waldherr, P. Neumann, F. Jelezko, and J. Wrachtrup, “Photo-induced ionization dynamics of the nitrogen vacancy defect in diamond investigated by single-shot charge state detection,” New J. Phys. 15(1), 013064 (2013).
[Crossref]

2012 (2)

P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
[Crossref]

M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
[Crossref]

2010 (2)

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12(6), 065017 (2010).
[Crossref]

T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[Crossref]

2009 (2)

P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
[Crossref]

I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
[Crossref]

2008 (1)

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17(7-10), 1292–1296 (2008).
[Crossref]

2004 (1)

D. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond; Proceedings of the 9th International Conference on New Diamond Science and Technology (ICNDST-9).,” Diamond Relat. Mater. 13(11-12), 2207–2210 (2004).
[Crossref]

2000 (1)

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85(2), 290–293 (2000).
[Crossref]

1997 (1)

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. von Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276(5321), 2012–2014 (1997).
[Crossref]

1994 (1)

L. Bergman, M. McClure, J. Glass, and R. Nemanich, “The origin of the broadband luminescence and the effect of nitrogen doping on the optical properties of diamond films,” J. Appl. Phys. 76(5), 3020–3027 (1994).
[Crossref]

Achard, J.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
[Crossref]

P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
[Crossref]

Aharonovich, I.

R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Allred, J. J.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Antonov, D.

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

Appel, P.

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

J. Teissier, A. Barfuss, P. Appel, E. Neu, and P. Maletinsky, “Strain coupling of a nitrogen-vacancy center spin to a diamond mechanical oscillator,” Phys. Rev. Lett. 113(2), 020503 (2014).
[Crossref]

Aslam, N.

N. Aslam, G. Waldherr, P. Neumann, F. Jelezko, and J. Wrachtrup, “Photo-induced ionization dynamics of the nitrogen vacancy defect in diamond investigated by single-shot charge state detection,” New J. Phys. 15(1), 013064 (2013).
[Crossref]

Atatüre, M.

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

Babinec, T.

T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[Crossref]

Baranov, O.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

Barclay, P. E.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5(4), 041051 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching,” Nano Lett. 15(8), 5131–5136 (2015).
[Crossref]

Barfuss, A.

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

J. Teissier, A. Barfuss, P. Appel, E. Neu, and P. Maletinsky, “Strain coupling of a nitrogen-vacancy center spin to a diamond mechanical oscillator,” Phys. Rev. Lett. 113(2), 020503 (2014).
[Crossref]

Batzer, M.

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

Bazaka, K.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

Becher, C.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

Behm, R. J.

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

Bergman, L.

L. Bergman, M. McClure, J. Glass, and R. Nemanich, “The origin of the broadband luminescence and the effect of nitrogen doping on the optical properties of diamond films,” J. Appl. Phys. 76(5), 3020–3027 (1994).
[Crossref]

Bluvstein, D.

D. Bluvstein, Z. Zhang, and A. C. B. Jayich, “Identifying and mitigating charge instabilities in shallow diamond nitrogen-vacancy centers,” arXiv preprint arXiv:1810.02058 (2018).

Boss, J.

Y. Tao, J. Boss, B. Moores, and C. Degen, “Single-crystal diamond nanomechanical resonators with quality factors exceeding one million,” Nat. Commun. 5(1), 3638 (2014).
[Crossref]

Boswell, R.

Y. Zhang, C. Charles, and R. Boswell, “Thermodynamic study on plasma expansion along a divergent magnetic field,” Phys. Rev. Lett. 116(2), 025001 (2016).
[Crossref]

Y. Zhang, C. Charles, and R. Boswell, “Thermodynamic study on plasma expansion along a divergent magnetic field,” Phys. Rev. Lett. 116(2), 025001 (2016).
[Crossref]

Bradac, C.

R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Brinza, O.

P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
[Crossref]

Casola, F.

F. Casola, T. van der Sar, and A. Yacoby, “Probing condensed matter physics with magnetometry based on nitrogen-vacancy centres in diamond,” Nat. Rev. Mater. 3(1), 17088 (2018).
[Crossref]

Challier, M.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

P. Fuchs, M. Challier, and E. Neu, “Optimized single-crystal diamond scanning probes for high sensitivity magnetometry,” New J. Phys. 20(12), 125001 (2018).
[Crossref]

Charles, C.

Y. Zhang, C. Charles, and R. Boswell, “Thermodynamic study on plasma expansion along a divergent magnetic field,” Phys. Rev. Lett. 116(2), 025001 (2016).
[Crossref]

Y. Zhang, C. Charles, and R. Boswell, “Thermodynamic study on plasma expansion along a divergent magnetic field,” Phys. Rev. Lett. 116(2), 025001 (2016).
[Crossref]

Clewes, S.

I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
[Crossref]

Cvelbar, U.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

Dawson, M.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17(7-10), 1292–1296 (2008).
[Crossref]

De Greve, K.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

de Leon, N. P.

B. J. Shields, Q. P. Unterreithmeier, N. P. de Leon, H. Park, and M. D. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114(13), 136402 (2015).
[Crossref]

de Oliveira, F. F.

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
[Crossref]

Degen, C.

Y. Tao, J. Boss, B. Moores, and C. Degen, “Single-crystal diamond nanomechanical resonators with quality factors exceeding one million,” Nat. Commun. 5(1), 3638 (2014).
[Crossref]

Delord, T.

L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
[Crossref]

Denisenko, A.

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
[Crossref]

Dhillon, H.

I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
[Crossref]

Diemant, T.

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

Doherty, M. W.

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

Dolde, F.

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

Dontschuk, N.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Doppelt, P.

M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
[Crossref]

Dräbenstedt, A.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. von Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276(5321), 2012–2014 (1997).
[Crossref]

Dwyer, B. L.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Edmonds, A. M.

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
[Crossref]

Englund, D.

M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
[Crossref]

Evans, D.A.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Fischer, M.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

Fleury, L.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. von Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276(5321), 2012–2014 (1997).
[Crossref]

Friel, I.

I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
[Crossref]

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17(7-10), 1292–1296 (2008).
[Crossref]

Fuchs, P.

P. Fuchs, M. Challier, and E. Neu, “Optimized single-crystal diamond scanning probes for high sensitivity magnetometry,” New J. Phys. 20(12), 125001 (2018).
[Crossref]

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

Fujimori, N.

D. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond; Proceedings of the 9th International Conference on New Diamond Science and Technology (ICNDST-9).,” Diamond Relat. Mater. 13(11-12), 2207–2210 (2004).
[Crossref]

Gallo, P.

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Ganzhorn, M.

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

Gicquel, A.

M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
[Crossref]

P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
[Crossref]

Glass, J.

L. Bergman, M. McClure, J. Glass, and R. Nemanich, “The origin of the broadband luminescence and the effect of nitrogen doping on the optical properties of diamond films,” J. Appl. Phys. 76(5), 3020–3027 (1994).
[Crossref]

Görlitz, J.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

Gratz, M.

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

Graziosi, T.

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Grinolds, M.

P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
[Crossref]

Gruber, A.

A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. von Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276(5321), 2012–2014 (1997).
[Crossref]

Gsell, S.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

Gu, E.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17(7-10), 1292–1296 (2008).
[Crossref]

Hausmann, B.

P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
[Crossref]

T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[Crossref]

Hemmer, P.

T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[Crossref]

Herrmann, D.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

Hétet, G.

L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
[Crossref]

Hicks, M.-L.

M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
[Crossref]

Hong, S.

P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
[Crossref]

Hryciw, A. C.

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching,” Nano Lett. 15(8), 5131–5136 (2015).
[Crossref]

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5(4), 041051 (2015).
[Crossref]

Hu, D.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Huang, S.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

Huillery, P.

L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
[Crossref]

Hwang, D.

D. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond; Proceedings of the 9th International Conference on New Diamond Science and Technology (ICNDST-9).,” Diamond Relat. Mater. 13(11-12), 2207–2210 (2004).
[Crossref]

Jackman, R. B.

M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
[Crossref]

Jacques, V.

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

Jakobi, I.

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

Jayakumar, H.

B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5(4), 041051 (2015).
[Crossref]

Jayich, A. C. B.

D. Bluvstein, Z. Zhang, and A. C. B. Jayich, “Identifying and mitigating charge instabilities in shallow diamond nitrogen-vacancy centers,” arXiv preprint arXiv:1810.02058 (2018).

Jelezko, F.

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
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F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
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N. Aslam, G. Waldherr, P. Neumann, F. Jelezko, and J. Wrachtrup, “Photo-induced ionization dynamics of the nitrogen vacancy defect in diamond investigated by single-shot charge state detection,” New J. Phys. 15(1), 013064 (2013).
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S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12(6), 065017 (2010).
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Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
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B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5(4), 041051 (2015).
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Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
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T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
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B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching,” Nano Lett. 15(8), 5131–5136 (2015).
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R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

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M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
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M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
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J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
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F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
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G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
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G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
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C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85(2), 290–293 (2000).
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B. Khanaliloo, H. Jayakumar, A. C. Hryciw, D. P. Lake, H. Kaviani, and P. E. Barclay, “Single-crystal diamond nanobeam waveguide optomechanics,” Phys. Rev. X 5(4), 041051 (2015).
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Lang, J.

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
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C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17(7-10), 1292–1296 (2008).
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M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
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E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
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R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Lim, J. W. M.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
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G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
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P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
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T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
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Lukin, M.

G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
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P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
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Lukin, M. D.

B. J. Shields, Q. P. Unterreithmeier, N. P. de Leon, H. Park, and M. D. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114(13), 136402 (2015).
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Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
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Maletinsky, P.

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
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P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
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E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

J. Teissier, A. Barfuss, P. Appel, E. Neu, and P. Maletinsky, “Strain coupling of a nitrogen-vacancy center spin to a diamond mechanical oscillator,” Phys. Rev. Lett. 113(2), 020503 (2014).
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P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
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F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

Markham, M.

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
[Crossref]

Maurer, P.

G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
[Crossref]

Mayer, S.

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85(2), 290–293 (2000).
[Crossref]

Maze, J.

T. Babinec, B. Hausmann, M. Khan, Y. Zhang, J. Maze, P. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[Crossref]

McClure, M.

L. Bergman, M. McClure, J. Glass, and R. Nemanich, “The origin of the broadband luminescence and the effect of nitrogen doping on the optical properties of diamond films,” J. Appl. Phys. 76(5), 3020–3027 (1994).
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McGuinness, L. P.

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

Meijer, J.

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12(6), 065017 (2010).
[Crossref]

Michl, J.

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

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E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

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E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

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B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching,” Nano Lett. 15(8), 5131–5136 (2015).
[Crossref]

Momenzadeh, S. A.

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
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Y. Tao, J. Boss, B. Moores, and C. Degen, “Single-crystal diamond nanomechanical resonators with quality factors exceeding one million,” Nat. Commun. 5(1), 3638 (2014).
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Müller, C.

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

Muret, P.

P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
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M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
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F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12(6), 065017 (2010).
[Crossref]

Nebel, C.

M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
[Crossref]

Nelz, R.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
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M. Radtke, R. Nelz, L. Render, and E. Neu, “Reliable nanofabrication of single-crystal diamond photonic nanostructures for nanoscale sensing,” Micromachines 10(11), 718 (2019).
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R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Nemanich, R.

L. Bergman, M. McClure, J. Glass, and R. Nemanich, “The origin of the broadband luminescence and the effect of nitrogen doping on the optical properties of diamond films,” J. Appl. Phys. 76(5), 3020–3027 (1994).
[Crossref]

Neu, E.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
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M. Radtke, R. Nelz, L. Render, and E. Neu, “Reliable nanofabrication of single-crystal diamond photonic nanostructures for nanoscale sensing,” Micromachines 10(11), 718 (2019).
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L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
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P. Fuchs, M. Challier, and E. Neu, “Optimized single-crystal diamond scanning probes for high sensitivity magnetometry,” New J. Phys. 20(12), 125001 (2018).
[Crossref]

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
[Crossref]

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

J. Teissier, A. Barfuss, P. Appel, E. Neu, and P. Maletinsky, “Strain coupling of a nitrogen-vacancy center spin to a diamond mechanical oscillator,” Phys. Rev. Lett. 113(2), 020503 (2014).
[Crossref]

R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Neumann, P.

F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

N. Aslam, G. Waldherr, P. Neumann, F. Jelezko, and J. Wrachtrup, “Photo-induced ionization dynamics of the nitrogen vacancy defect in diamond investigated by single-shot charge state detection,” New J. Phys. 15(1), 013064 (2013).
[Crossref]

Nicolas, L.

L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
[Crossref]

Noh, H.

G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
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O’Donnell, K. M.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Oeckinghaus, T.

J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
[Crossref]

Ogura, M.

Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
[Crossref]

Omnes, F.

P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
[Crossref]

Opaluch, O.

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

Osterkamp, C.

F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
[Crossref]

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
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Ozawa, N.

Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
[Crossref]

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M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
[Crossref]

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B. J. Shields, Q. P. Unterreithmeier, N. P. de Leon, H. Park, and M. D. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114(13), 136402 (2015).
[Crossref]

G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
[Crossref]

Perkins, N.

I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
[Crossref]

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F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12(6), 065017 (2010).
[Crossref]

Podgornik, B.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

Podgursky, V.

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

Quack, N.

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Radtke, M.

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

M. Radtke, R. Nelz, L. Render, and E. Neu, “Reliable nanofabrication of single-crystal diamond photonic nanostructures for nanoscale sensing,” Micromachines 10(11), 718 (2019).
[Crossref]

R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Reinhard, F.

J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
[Crossref]

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M. Radtke, R. Nelz, L. Render, and E. Neu, “Reliable nanofabrication of single-crystal diamond photonic nanostructures for nanoscale sensing,” Micromachines 10(11), 718 (2019).
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Reuter, R.

J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
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M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
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S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Rohner, D.

M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
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D. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond; Proceedings of the 9th International Conference on New Diamond Science and Technology (ICNDST-9).,” Diamond Relat. Mater. 13(11-12), 2207–2210 (2004).
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S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

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A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Savenko, N.

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

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I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
[Crossref]

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17(7-10), 1292–1296 (2008).
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F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
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C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
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R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
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B. J. Shields, Q. P. Unterreithmeier, N. P. de Leon, H. Park, and M. D. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114(13), 136402 (2015).
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M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
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M. Challier, S. Sonusen, A. Barfuss, D. Rohner, D. Riedel, J. Koelbl, M. Ganzhorn, P. Appel, P. Maletinsky, and E. Neu, “Advanced fabrication of single-crystal diamond membranes for quantum technologies,” Micromachines 9(4), 148 (2018).
[Crossref]

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
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S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

Stacey, A.

S. Sangtawesin, B. L. Dwyer, S. Srinivasan, J. J. Allred, L. V. Rodgers, K. De Greve, A. Stacey, N. Dontschuk, K. M. O’Donnell, D. Hu, and D.A. Evans, “Origins of diamond surface noise probed by correlating single spin measurements with surface spectroscopy,” arXiv preprint arXiv:1811.00144 (2018).

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L. Xie, T. X. Zhou, R. J. Stöhr, and A. Yacoby, “Crystallographic orientation dependent reactive ion etching in single crystal diamond,” Adv. Mater. 30(11), 1705501 (2018).
[Crossref]

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E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
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M. Naamoun, A. Tallaire, F. Silva, J. Achard, P. Doppelt, and A. Gicquel, “Etch-pit formation mechanism induced on hpht and cvd diamond single crystals by h2/o2 plasma etching treatment,” Phys. Status Solidi A 209(9), 1715–1720 (2012).
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A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. von Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276(5321), 2012–2014 (1997).
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J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
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A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
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Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
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P. Appel, E. Neu, M. Ganzhorn, A. Barfuss, M. Batzer, M. Gratz, A. Tschöpe, and P. Maletinsky, “Fabrication of all diamond scanning probes for nanoscale magnetometry,” Rev. Sci. Instrum. 87(6), 063703 (2016).
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I. Friel, S. Clewes, H. Dhillon, N. Perkins, D. Twitchen, and G. Scarsbrook, “Control of surface and bulk crystalline quality in single crystal diamond grown by chemical vapour deposition,” Diamond Relat. Mater. 18(5-8), 808–815 (2009).
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B. J. Shields, Q. P. Unterreithmeier, N. P. de Leon, H. Park, and M. D. Lukin, “Efficient readout of a single spin state in diamond via spin-to-charge conversion,” Phys. Rev. Lett. 114(13), 136402 (2015).
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M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
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F. Casola, T. van der Sar, and A. Yacoby, “Probing condensed matter physics with magnetometry based on nitrogen-vacancy centres in diamond,” Nat. Rev. Mater. 3(1), 17088 (2018).
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P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel, “Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching,” Diamond Relat. Mater. 18(10), 1205–1210 (2009).
[Crossref]

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A. Gruber, A. Dräbenstedt, C. Tietz, L. Fleury, J. Wrachtrup, and C. von Borczyskowski, “Scanning confocal optical microscopy and magnetic resonance on single defect centers,” Science 276(5321), 2012–2014 (1997).
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N. Aslam, G. Waldherr, P. Neumann, F. Jelezko, and J. Wrachtrup, “Photo-induced ionization dynamics of the nitrogen vacancy defect in diamond investigated by single-shot charge state detection,” New J. Phys. 15(1), 013064 (2013).
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P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
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K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
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M. Atatüre, D. Englund, N. Vamivakas, S.-Y. Lee, and J. Wrachtrup, “Material platforms for spin-based photonic quantum technologies,” Nat. Rev. Mater. 3(5), 38–51 (2018).
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F. F. de Oliveira, S. A. Momenzadeh, D. Antonov, J. Scharpf, C. Osterkamp, B. Naydenov, F. Jelezko, A. Denisenko, and J. Wrachtrup, “Toward Optimized Surface delta-Profiles of Nitrogen-Vacancy Centers Activated by Helium Irradiation in Diamond,” Nano Lett. 16(4), 2228–2233 (2016).
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F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
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F. Dolde, M. W. Doherty, J. Michl, I. Jakobi, B. Naydenov, S. Pezzagna, J. Meijer, P. Neumann, F. Jelezko, N. B. Manson, and J. Wrachtrup, “Nanoscale detection of a single fundamental charge in ambient conditions using the nv- center in diamond,” Phys. Rev. Lett. 112(9), 097603 (2014).
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N. Aslam, G. Waldherr, P. Neumann, F. Jelezko, and J. Wrachtrup, “Photo-induced ionization dynamics of the nitrogen vacancy defect in diamond investigated by single-shot charge state detection,” New J. Phys. 15(1), 013064 (2013).
[Crossref]

J. Tisler, T. Oeckinghaus, R. J. Stöhr, R. Kolesov, R. Reuter, F. Reinhard, and J. Wrachtrup, “Single defect center scanning near-field optical microscopy on graphene,” Nano Lett. 13(7), 3152–3156 (2013).
[Crossref]

S. Pezzagna, B. Naydenov, F. Jelezko, J. Wrachtrup, and J. Meijer, “Creation efficiency of nitrogen-vacancy centres in diamond,” New J. Phys. 12(6), 065017 (2010).
[Crossref]

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[Crossref]

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Xu, L.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
[Crossref]

Xu, S.

K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko, and S. Xu, “Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication,” Nanoscale 10(37), 17494–17511 (2018).
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R. Nelz, M. Radtke, A. Slablab, M. Kianinia, C. Li, Z.-Q. Xu, C. Bradac, I. Aharonovich, and E. Neu, “Near-field energy transfer between a luminescent 2d material and color centers in diamond,” Adv. Quantum Technol.1900088 (2019).

Yacoby, A.

L. Xie, T. X. Zhou, R. J. Stöhr, and A. Yacoby, “Crystallographic orientation dependent reactive ion etching in single crystal diamond,” Adv. Mater. 30(11), 1705501 (2018).
[Crossref]

F. Casola, T. van der Sar, and A. Yacoby, “Probing condensed matter physics with magnetometry based on nitrogen-vacancy centres in diamond,” Nat. Rev. Mater. 3(1), 17088 (2018).
[Crossref]

P. Maletinsky, S. Hong, M. Grinolds, B. Hausmann, M. Lukin, R. Walsworth, M. Loncar, and A. Yacoby, “A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres,” Nat. Nanotechnol. 7(5), 320–324 (2012).
[Crossref]

Yamasaki, S.

Y. Kato, H. Kawashima, T. Makino, M. Ogura, A. Traoré, N. Ozawa, and S. Yamasaki, “Estimation of inductively coupled plasma etching damage of boron-doped diamond using x-ray photoelectron spectroscopy,” Phys. Status Solidi A 214(11), 1700233 (2017).
[Crossref]

Yao, N.

G. Kucsko, P. Maurer, N. Yao, M. Kubo, H. Noh, P. Lo, H. Park, and M. Lukin, “Nanometre-scale thermometry in a living cell,” Nature 500(7460), 54–58 (2013).
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C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable solid-state source of single photons,” Phys. Rev. Lett. 85(2), 290–293 (2000).
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L. Xie, T. X. Zhou, R. J. Stöhr, and A. Yacoby, “Crystallographic orientation dependent reactive ion etching in single crystal diamond,” Adv. Mater. 30(11), 1705501 (2018).
[Crossref]

Zuerbig, V.

M.-L. Hicks, A. C. Pakpour-Tabrizi, V. Zuerbig, L. Kirste, C. Nebel, and R. B. Jackman, “Optimizing reactive ion etching to remove sub-surface polishing damage on diamond,” J. Appl. Phys. 125(24), 244502 (2019).
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Adv. Mater. (1)

L. Xie, T. X. Zhou, R. J. Stöhr, and A. Yacoby, “Crystallographic orientation dependent reactive ion etching in single crystal diamond,” Adv. Mater. 30(11), 1705501 (2018).
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AIP Adv. (1)

L. Nicolas, T. Delord, P. Huillery, E. Neu, and G. Hétet, “Diamond nano-pyramids with narrow linewidth siv centers for quantum technologies,” AIP Adv. 8(6), 065102 (2018).
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APL Mater. (1)

R. Nelz, J. Görlitz, D. Herrmann, A. Slablab, M. Challier, M. Radtke, M. Fischer, S. Gsell, M. Schreck, C. Becher, and E. Neu, “Toward wafer-scale diamond nano-and quantum technologies,” APL Mater. 7(1), 011108 (2019).
[Crossref]

Appl. Phys. Lett. (4)

C. Osterkamp, J. Lang, J. Scharpf, C. Müller, L. P. McGuinness, T. Diemant, R. J. Behm, B. Naydenov, and F. Jelezko, “Stabilizing shallow color centers in diamond created by nitrogen delta-doping using sf6 plasma treatment,” Appl. Phys. Lett. 106(11), 113109 (2015).
[Crossref]

E. Neu, P. Appel, M. Ganzhorn, J. Miguel-Sanchez, M. Lesik, V. Mille, V. Jacques, A. Tallaire, J. Achard, and P. Maletinsky, “Photonic nano-structures on (111)-oriented diamond,” Appl. Phys. Lett. 104(15), 153108 (2014).
[Crossref]

F. F. de Oliveira, S. A. Momenzadeh, Y. Wang, M. Konuma, M. Markham, A. M. Edmonds, A. Denisenko, and J. Wrachtrup, “Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond,” Appl. Phys. Lett. 107(7), 073107 (2015).
[Crossref]

R. Nelz, P. Fuchs, O. Opaluch, S. Sonusen, N. Savenko, V. Podgursky, and E. Neu, “Color center fluorescence and spin manipulation in single crystal, pyramidal diamond tips,” Appl. Phys. Lett. 109(19), 193105 (2016).
[Crossref]

Diamond Relat. Mater. (4)

D. Hwang, T. Saito, and N. Fujimori, “New etching process for device fabrication using diamond; Proceedings of the 9th International Conference on New Diamond Science and Technology (ICNDST-9).,” Diamond Relat. Mater. 13(11-12), 2207–2210 (2004).
[Crossref]

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Figures (11)

Fig. 1.
Fig. 1. Schematic of the employed nanofabrication process. The manuscript is structured into the sections according to these schematics.
Fig. 2.
Fig. 2. (a) Sample layout for the characterization of different plasma treatements. The whole polished SCD plate first undergoes the stress relief etch. Subsequently, we apply different pre-etches to form three distinct areas (plasma type and depth of etch given in the sketch). The ordering of the plasma treatments for the pre-etch step is as follows: We cover areas II and III with a quartz plate (thickness 100 $\mu$m) and apply the 0 V O$_2$ plasma to area I. By moving the quartz plate and covering areas I and II, the 435 V O$_2$ plasma was applied to area III. Subsequently, we fabricate nanopillars in all areas. The pillars are not to scale and for illustration only. (b)-(d) AFM scans to determine the surface roughness in areas I,II and III. The given roughness is the rms value obtained from 5x5 $\mu$m$^{2}$ tapping mode scans.
Fig. 3.
Fig. 3. Optical emission spectra of (a) Ar/SF$_6$/O$_2$, (b) O$_2$ 435 V and (c) O$_2$ 0 V (350 W ICP) plasmas with corresponding Boltzmann plots used to extract electron temperatures $T_{el}$.
Fig. 4.
Fig. 4. NV$^{-}$ center ensembles in areas exposed to different pre-etches: (a)-(c) show PL maps and the corresponding PL spectra. It is clearly visible that in the area exposed to the Ar/SF$_6$/O$_2$ stress-relief etch only [Area II, part (b)] we do not observe any NV$^{-}$ PL. The measured spectrum only slightly differs from the background PL (light gray). Both areas treated with pure O$_2$ plasmas [Area I (unbiased):(a); Area III (biased):(c)] clearly show NV$^{-}$ PL with a minor NV$^{0}$ signal. The peak at 574 nm is the first-order Raman line of SCD. Due to experimental constraints (laser linewidth, spectrometer resolution) the Raman line here does not allow to deduce the level of strain in the SCD material. (d) Excited state lifetime $\tau _{NV^{-}}$ of the NV$^{-}$ ensemble as recorded in areas I and III. Both ensembles show similar average $\tau _{NV^{-}}$ 17(1) ns in area I and 16(1) ns in area III. $\tau _{NV^{-}}$ is thus prolonged compared to bulk SCD due to the NV$^{-}$’s proximity to the surface [36]. In addition, the measurements clearly show an absence of quenching. (e) Saturation behavior of the NV$^{-}$ ensembles area I and III. Discussion see text.
Fig. 5.
Fig. 5. Scanning electron microscope images of SCD nanopillars. (a) overview of large pillar field, (b) pillars with top diameter of 120 nm (c) pillars with top diameter of 180 nm Images recorded using a Jeol arm200 microscope at 20 kV acceleration voltage with no conductive layer applied.
Fig. 6.
Fig. 6. (a) and (b) Fluorescence maps and lifetime $\tau _{NV^{-}}$ maps of a pillar field (top diameter: 180 nm, length: $\sim$460 nm) in area I (0 V O$_2$ plasma). (a) shows the measured PL rate under pulsed excitation at 530-540 nm with a pulse energy of 15 nJ and a repetition rate of 8 MHz while (b) shows the corresponding lifetime map. It is nicely visible that bright pillars have a consistent lifetime corresponding to $\tau _{NV^{-}}$ measured for the ensemble in Sec. 4. (c) Exemplary second order correlation measurement $g^{(2)}$ of a NV$^{-}$ center in the pillars clearly showing single-photon emission with a reasonable signal/background ratio. (d) Summary of PL saturation of several pillars containing single NV$^{-}$ centers in the fields with top diameters of 120 nm and 180 nm. While most measured NV$^{-}$ have comparable saturation powers, the 180 nm-pillars offer slightly higher countrates compared to the 120 nm-pillars as expected from their photonic properties [14]. However, these results indicate that even 120 nm-pillars act as waveguides, potentially improving AFM operation of NV$^{-}$-based scanning probe devices.
Fig. 7.
Fig. 7. Bias drop in time in generation of 0 V-bias plasmas using O$_2$, Ar, SF$_6$ and their mixtures.
Fig. 8.
Fig. 8. Optical characterization of the three pre-etched areas: (a) unbiased O$_2$, (b) Ar/SF$_6$/O$_2$, (c) biased O$_2$. For further information, see text.
Fig. 9.
Fig. 9. SEM images of SCD nanopillars: (a) overview image of large pillar fields etched into the diamond by O$_2$ plasma (b) High magnification scanning electron microscope (Jeol arm200, 20 kV acceleration voltage, no conductive layer applied).
Fig. 10.
Fig. 10. Correlation between the EBL dose and the resulting top diameter of the nanopillars. The investigated pillars have been etched using a pure O$_2$ plasma with 500 W ICP power and 50 W RF power.
Fig. 11.
Fig. 11. (a) Exemplary measurement of the charge state distribution we obtain on the NV centers in the nanostructures. Here, we use the following parameters: 532 nm laser: 1 ms at 100 $\mu$W, 594 nm-laser: 1 ms at 15 $\mu$W, read-out time: 1 ms. While using excitation powers ranging from 1 $\mu$W to 250 $\mu$W for both lasers and integration times up to 25 ms, the mean values of the distributions are just shifting without a significant change of the distribution. (b-c) Calculated photon statistics for illustrating the behavior for special cases described in the text.

Tables (2)

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Table 1. Plasma parameters for stress relief and pre-etch. The etch rate of the 0 V-bias O 2 plasma varied between 8 to 10 nm/min and was thus reasonably consistent.

Tables Icon

Table 2. Parameters for different etch plasmas. Due to excess mask erosion etch rates of the pure Ar plasmas have to be considered coarse estimates.

Equations (1)

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ln I λ g k A = E k k T e l + C .

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