Abstract

The electro-optic, acousto-optic and nonlinear properties of lithium niobate make it a highly versatile material platform for integrated quantum photonic circuits. A prerequisite for quantum technology applications is the ability to efficiently integrate single photon sources, and to guide the generated photons through ad hoc circuits. Here we report the integration of quantum dots in monolayer WSe2 into a Ti in-diffused lithium niobate directional coupler. We investigate the coupling of individual quantum dots to the waveguide mode, their spatial overlap, and the overall efficiency of the hybrid-integrated photonic circuit.

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2018 (4)

L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
[Crossref]

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
[Crossref] [PubMed]

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

2017 (7)

J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
[Crossref] [PubMed]

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

S. Bogdanov, M. Y. Shalaginov, A. Boltasseva, and V. M. Shalaev, “Material platforms for integrated quantum photonics,” Opt. Mater. Express 7(1), 111 (2017).
[Crossref]

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

A. Branny, S. Kumar, R. Proux, and B. D. Gerardot, “Deterministic strain-induced arrays of quantum emitters in a two-dimensional semiconductor,” Nat. Commun. 8, 15053 (2017).
[Crossref] [PubMed]

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

P. Senellart, G. Solomon, and A. White, “High-performance semiconductor quantum-dot single-photon sources,” Nat. Nanotechnol. 12(11), 1026–1039 (2017).
[Crossref] [PubMed]

2016 (2)

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

2015 (7)

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9(6), 363–373 (2015).
[Crossref]

K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
[Crossref] [PubMed]

M. Bazzan and C. Sada, “Optical waveguides in lithium niobate: Recent developments and applications,” Appl. Phys. Rev. 2(4), 040603 (2015).
[Crossref]

S. Kumar, A. Kaczmarczyk, and B. D. Gerardot, “Strain-Induced Spatial and Spectral Isolation of Quantum Emitters in Mono- and Bilayer WSe2.,” Nano Lett. 15(11), 7567–7573 (2015).
[Crossref] [PubMed]

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6(1), 8206 (2015).
[Crossref] [PubMed]

R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

2014 (2)

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

2012 (2)

R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
[Crossref] [PubMed]

M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
[Crossref] [PubMed]

2010 (1)

H. Herrmann, K. D. Büchter, R. Ricken, and W. Sohler, “Tunable integrated electro-optic wavelength filter with programmable spectral response,” J. Lit. Technol. 28(7), 1051–1056 (2010).
[Crossref]

2008 (1)

A. D. Greentree, B. A. Fairchild, F. M. Hossain, and S. Prawer, “Diamond integrated quantum photonics,” Mater. Today 11(9), 22–31 (2008).
[Crossref]

2007 (1)

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

2001 (1)

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409(6816), 46–52 (2001).
[Crossref] [PubMed]

Alvarez, L. S. E.

M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
[Crossref] [PubMed]

Arakawa, Y.

K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
[Crossref] [PubMed]

Arrangoiz-Arriola, P.

J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
[Crossref] [PubMed]

Atatüre, M.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Bakhtinov, A. P.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

Barber, Z. H.

M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
[Crossref] [PubMed]

Barbone, M.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Baumann, V.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Bazzan, M.

M. Bazzan and C. Sada, “Optical waveguides in lithium niobate: Recent developments and applications,” Appl. Phys. Rev. 2(4), 040603 (2015).
[Crossref]

Beitner, J.

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Bernien, H.

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9(6), 363–373 (2015).
[Crossref]

Bertrand, M.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

Bogdanov, S.

Boltasseva, A.

Branny, A.

A. Branny, S. Kumar, R. Proux, and B. D. Gerardot, “Deterministic strain-induced arrays of quantum emitters in a two-dimensional semiconductor,” Nat. Commun. 8, 15053 (2017).
[Crossref] [PubMed]

Bratschitsch, R.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

Büchter, K. D.

H. Herrmann, K. D. Büchter, R. Ricken, and W. Sohler, “Tunable integrated electro-optic wavelength filter with programmable spectral response,” J. Lit. Technol. 28(7), 1051–1056 (2010).
[Crossref]

Buscema, M.

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
[Crossref]

Castellanos-Gomez, A.

R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
[Crossref]

Chandrasekhar, S.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

Chen, X.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Clarke, E.

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

Coles, R. J.

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

Covre Da Silva, S. F.

L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
[Crossref]

Davanco, M.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Del Pozo-Zamudio, O.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

Dmitriev, A. I.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

Fairchild, B. A.

A. D. Greentree, B. A. Fairchild, F. M. Hossain, and S. Prawer, “Diamond integrated quantum photonics,” Mater. Today 11(9), 22–31 (2008).
[Crossref]

Faraon, A.

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6(1), 8206 (2015).
[Crossref] [PubMed]

Ferrari, A. C.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Fox, A. M.

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

Frisenda, R.

R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
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Gant, P.

R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
[Crossref] [PubMed]

Gao, W. B.

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9(6), 363–373 (2015).
[Crossref]

Gerardot, B. D.

A. Branny, S. Kumar, R. Proux, and B. D. Gerardot, “Deterministic strain-induced arrays of quantum emitters in a two-dimensional semiconductor,” Nat. Commun. 8, 15053 (2017).
[Crossref] [PubMed]

S. Kumar, A. Kaczmarczyk, and B. D. Gerardot, “Strain-Induced Spatial and Spectral Isolation of Quantum Emitters in Mono- and Bilayer WSe2.,” Nano Lett. 15(11), 7567–7573 (2015).
[Crossref] [PubMed]

Gorbachev, R. V.

R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
[Crossref] [PubMed]

Goykhman, I.

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Greentree, A. D.

A. D. Greentree, B. A. Fairchild, F. M. Hossain, and S. Prawer, “Diamond integrated quantum photonics,” Mater. Today 11(9), 22–31 (2008).
[Crossref]

Gruhler, N.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

Hadfield, R. H.

M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
[Crossref] [PubMed]

Hanson, R.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9(6), 363–373 (2015).
[Crossref]

He, Y. M.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Hemmer, P. R.

R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
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Herrmann, H.

H. Herrmann, K. D. Büchter, R. Ricken, and W. Sohler, “Tunable integrated electro-optic wavelength filter with programmable spectral response,” J. Lit. Technol. 28(7), 1051–1056 (2010).
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Hill, J. T.

J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
[Crossref] [PubMed]

Höfling, S.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Hossain, F. M.

A. D. Greentree, B. A. Fairchild, F. M. Hossain, and S. Prawer, “Diamond integrated quantum photonics,” Mater. Today 11(9), 22–31 (2008).
[Crossref]

Hu, H.

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
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Huang, H.

L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
[Crossref]

Humphreys, P. C.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

Iff, O.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Imamoglu, A.

W. B. Gao, A. Imamoglu, H. Bernien, and R. Hanson, “Coherent manipulation, measurement and entanglement of individual solid-state spins using optical fields,” Nat. Photonics 9(6), 363–373 (2015).
[Crossref]

Isoya, J.

A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

Jahnke, K. D.

A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

Janssen, L.

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
[Crossref]

Janzén, E.

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

Jarillo-Herrero, P.

R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
[Crossref] [PubMed]

Jelezko, F.

A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

Jiang, W.

M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
[Crossref] [PubMed]

Jöns, K. D.

L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
[Crossref]

Kaczmarczyk, A.

S. Kumar, A. Kaczmarczyk, and B. D. Gerardot, “Strain-Induced Spatial and Spectral Isolation of Quantum Emitters in Mono- and Bilayer WSe2.,” Nano Lett. 15(11), 7567–7573 (2015).
[Crossref] [PubMed]

Kalb, N.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

Kara, D. M.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Kern, J.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

Kindem, J. M.

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6(1), 8206 (2015).
[Crossref] [PubMed]

Knill, E.

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409(6816), 46–52 (2001).
[Crossref] [PubMed]

Kolesov, R.

R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
[Crossref] [PubMed]

Kumar, S.

A. Branny, S. Kumar, R. Proux, and B. D. Gerardot, “Deterministic strain-induced arrays of quantum emitters in a two-dimensional semiconductor,” Nat. Commun. 8, 15053 (2017).
[Crossref] [PubMed]

S. Kumar, A. Kaczmarczyk, and B. D. Gerardot, “Strain-Induced Spatial and Spectral Isolation of Quantum Emitters in Mono- and Bilayer WSe2.,” Nano Lett. 15(11), 7567–7573 (2015).
[Crossref] [PubMed]

Laflamme, R.

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409(6816), 46–52 (2001).
[Crossref] [PubMed]

Lagoudakis, K. G.

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

Latawiec, P.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

Lee, S. Y.

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

Lettner, T.

L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
[Crossref]

Loncar, M.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

Lukin, M. D.

A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

Lundt, N.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Lv, R.

R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
[Crossref] [PubMed]

Mallouk, T. E.

R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
[Crossref] [PubMed]

Markham, M.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

Meijer, J.

R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
[Crossref] [PubMed]

Michaelis de Vasconcellos, S.

P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

Milburn, G. J.

E. Knill, R. Laflamme, and G. J. Milburn, “A scheme for efficient quantum computation with linear optics,” Nature 409(6816), 46–52 (2001).
[Crossref] [PubMed]

Miyazawa, T.

K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
[Crossref] [PubMed]

Miyazono, E.

T. Zhong, J. M. Kindem, E. Miyazono, and A. Faraon, “Nanophotonic coherent light-matter interfaces based on rare-earth-doped crystals,” Nat. Commun. 6(1), 8206 (2015).
[Crossref] [PubMed]

Molenaar, R.

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
[Crossref]

Montblanch, A. R. P.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

Morits, J. P. J.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

Nambu, Y.

K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
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Navarro-Moratalla, E.

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M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
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N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
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M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
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C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
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C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
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R. Frisenda, E. Navarro-Moratalla, P. Gant, D. Pérez De Lara, P. Jarillo-Herrero, R. V. Gorbachev, and A. Castellanos-Gomez, “Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials,” Chem. Soc. Rev. 47(1), 53–68 (2018).
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N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
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M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
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L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
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L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
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M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
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H. Herrmann, K. D. Büchter, R. Ricken, and W. Sohler, “Tunable integrated electro-optic wavelength filter with programmable spectral response,” J. Lit. Technol. 28(7), 1051–1056 (2010).
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H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
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R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
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A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
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N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
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J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
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K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
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J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
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R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
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P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
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Schneider, C.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
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Schneider, R.

Schouten, R. N.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
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L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
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P. Senellart, G. Solomon, and A. White, “High-performance semiconductor quantum-dot single-photon sources,” Nat. Nanotechnol. 12(11), 1026–1039 (2017).
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Shalaev, V. M.

Shalaginov, M. Y.

Shams-Ansari, A.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

Singh, V.

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
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A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

Skolnick, M. S.

N. Prtljaga, R. J. Coles, J. O’Hara, B. Royall, E. Clarke, A. M. Fox, and M. S. Skolnick, “Monolithic integration of a quantum emitter with a compact on-chip beam-splitter,” Appl. Phys. Lett. 104(23), 231107 (2014).
[Crossref]

Sohler, W.

H. Herrmann, K. D. Büchter, R. Ricken, and W. Sohler, “Tunable integrated electro-optic wavelength filter with programmable spectral response,” J. Lit. Technol. 28(7), 1051–1056 (2010).
[Crossref]

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

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P. Senellart, G. Solomon, and A. White, “High-performance semiconductor quantum-dot single-photon sources,” Nat. Nanotechnol. 12(11), 1026–1039 (2017).
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M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

Srinivasan, K.

Y. M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Steele, G. A.

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
[Crossref]

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R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
[Crossref] [PubMed]

Sun, D.

R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
[Crossref] [PubMed]

Sun, Y.

R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
[Crossref] [PubMed]

Takemoto, K.

K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
[Crossref] [PubMed]

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C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

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M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
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P. Tonndorf, O. Del Pozo-Zamudio, N. Gruhler, J. Kern, R. Schmidt, A. I. Dmitriev, A. P. Bakhtinov, A. I. Tartakovskii, W. Pernice, S. Michaelis de Vasconcellos, and R. Bratschitsch, “On-chip waveguide coupling of a layered semiconductor single-photon source,” Nano Lett. 17(9), 5446–5451 (2017).
[Crossref] [PubMed]

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A. Sipahigil, K. D. Jahnke, L. J. Rogers, T. Teraji, J. Isoya, A. S. Zibrov, F. Jelezko, and M. D. Lukin, “Indistinguishable photons from separated silicon-vacancy centers in diamond,” Phys. Rev. Lett. 113(11), 113602 (2014).
[Crossref] [PubMed]

Terrones, M.

R. Lv, J. A. Robinson, R. E. Schaak, D. Sun, Y. Sun, T. E. Mallouk, and M. Terrones, “Transition metal dichalcogenides and beyond: synthesis, properties, and applications of single- and few-layer nanosheets,” Acc. Chem. Res. 48(1), 56–64 (2015).
[Crossref] [PubMed]

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[Crossref] [PubMed]

P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

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L. Schweickert, K. D. Jöns, K. D. Zeuner, S. F. Covre Da Silva, H. Huang, T. Lettner, M. Reindl, J. Zichi, R. Trotta, A. Rastelli, and V. Zwiller, “On-demand generation of background-free single photons from a solid-state source,” Appl. Phys. Lett. 112(9), 093106 (2018).
[Crossref]

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P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

Valery, J. A.

J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
[Crossref] [PubMed]

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P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347 (2015).
[Crossref]

A. Castellanos-Gomez, M. Buscema, R. Molenaar, V. Singh, L. Janssen, H. S. J. Van Der Zant, and G. A. Steele, “Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping,” 2D Mater.1, 1 (2014).
[Crossref]

Vermeulen, R. F. L.

P. C. Humphreys, N. Kalb, J. P. J. Morits, R. N. Schouten, R. F. L. Vermeulen, D. J. Twitchen, M. Markham, and R. Hanson, “Deterministic delivery of remote entanglement on a quantum network,” Nature 558(7709), 268–273 (2018).
[Crossref] [PubMed]

Vuckovic, J.

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

Wang, C.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

Warburton, R. J.

M. G. Tanner, L. S. E. Alvarez, W. Jiang, R. J. Warburton, Z. H. Barber, and R. H. Hadfield, “A superconducting nanowire single photon detector on lithium niobate,” Nanotechnology 23(50), 505201 (2012).
[Crossref] [PubMed]

Watanabe, K.

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
[Crossref] [PubMed]

Wehrspohn, R. B.

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

White, A.

P. Senellart, G. Solomon, and A. White, “High-performance semiconductor quantum-dot single-photon sources,” Nat. Nanotechnol. 12(11), 1026–1039 (2017).
[Crossref] [PubMed]

Widmann, M.

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

Winzer, P.

C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, and M. Lončar, “Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages,” Nature 562(7725), 101–104 (2018).
[Crossref] [PubMed]

Witmer, J. D.

J. D. Witmer, J. A. Valery, P. Arrangoiz-Arriola, C. J. Sarabalis, J. T. Hill, and A. H. Safavi-Naeini, “High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate,” Sci. Rep. 7(1), 46313 (2017).
[Crossref] [PubMed]

Wrachtrup, J.

M. Radulaski, M. Widmann, M. Niethammer, J. L. Zhang, S. Y. Lee, T. Rendler, K. G. Lagoudakis, N. T. Son, E. Janzén, T. Ohshima, J. Wrachtrup, and J. Vučković, “Scalable quantum photonics with single color centers in silicon carbide,” Nano Lett. 17(3), 1782–1786 (2017).
[Crossref] [PubMed]

R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
[Crossref] [PubMed]

Xia, K.

R. Kolesov, K. Xia, R. Reuter, R. Stöhr, A. Zappe, J. Meijer, P. R. Hemmer, and J. Wrachtrup, “Optical detection of a single rare-earth ion in a crystal,” Nat. Commun. 3(1), 1029 (2012).
[Crossref] [PubMed]

Yamamoto, T.

K. Takemoto, Y. Nambu, T. Miyazawa, Y. Sakuma, T. Yamamoto, S. Yorozu, and Y. Arakawa, “Quantum key distribution over 120 km using ultrahigh purity single-photon source and superconducting single-photon detectors,” Sci. Rep. 5(1), 14383 (2015).
[Crossref] [PubMed]

Yoon, D.

C. Palacios-Berraquero, D. M. Kara, A. R. P. Montblanch, M. Barbone, P. Latawiec, D. Yoon, A. K. Ott, M. Loncar, A. C. Ferrari, and M. Atatüre, “Large-scale quantum-emitter arrays in atomically thin semiconductors,” Nat. Commun. 8, 15093 (2017).
[Crossref] [PubMed]

C. Palacios-Berraquero, M. Barbone, D. M. Kara, X. Chen, I. Goykhman, D. Yoon, A. K. Ott, J. Beitner, K. Watanabe, T. Taniguchi, A. C. Ferrari, and M. Atatüre, “Atomically thin quantum light-emitting diodes,” Nat. Commun. 7(1), 12978 (2016).
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Figures (3)

Fig. 1
Fig. 1 (a) Spatial profile of the waveguide mode at the facet of the WSe2 flake, measured by illuminating a fiber-coupled port with a 750 nm laser and detecting light through the Confocal Port. The white dash-dot line indicates the 1/e2 mode profile, the color scale shows the normalized intensity. (b) Optical microscope image of WSe2 transferred onto the facet of the waveguide. The 20 µm monolayer region posseses a wrinkle with localized strain. The illuminated waveguide mode (red spot) is used to align the monolayer area of the flake with respect to the optical mode. (c) Schematic of Ti in-diffused lithium niobate directional coupler with a WSe2 flake at the input facet. PL was measured by exciting the emitters in a confocal microscope, while emission was detected in confocal geometry (Confocal Port) and through the two fiber output ports (Port 1 and Port 2).

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Fig. 2
Fig. 2 (a) Confocal PL image of the WSe2 flake on the waveguide facet in the spectral region of 720-735 nm, measured at 4K. The dotted white line indicates the edge of the few-layer region while the solid line marks the edges of the monolayer. Several areas of strong localized PL, corresponding to individual quantum dots, are present in the region surrounding the waveguide mode (marked by the dash-dot line). (b) Spatial map of localized PL from monolayer WSe2 with individual single photon emitters marked by Roman numerals I-VII. Color bars show the normalized intensity.

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Fig. 3
Fig. 3 (a) Spatially-resolved PL spectrally filtered at 745 nm and 725 nm (b). Color scale represents the normalized intensity. (c) PL spectra measured through the waveguide fiber output Ports 1 and 2 and confocally when the position of Emitter I is excited. (d) Spectra measured at Ports 1 and 2 and confocally when Emitter II is spatially excited. The spectra observed in confocal geometry is replicated at both output ports, albeit with a reduced photon count rate.

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Tables (1)

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Table 1 Comparison of measured and simulated collection efficiency as a function of emitter displacement

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