Abstract

We demonstrate a new approach to integrate single layer MoSe2 and WSe2 flakes into monolithic all-dielectric planar high-quality micro-cavities. These distributed-Bragg-reflector (DBR) cavities may, e.g., be tuned to match the exciton resonance of the 2D-materials. They are highly robust and compatible with cryogenic and room-temperature operation. The integration is achieved by a customized ion-assisted physical vapor deposition technique, which does not degrade the optical properties of the 2D-materials. The monolithic 2D-resonator is shown to have a high Q-factor in excess of 4500. We use photoluminescence (PL) experiments to demonstrate that the coating procedure with a SiO2 coating on a prepared surface does not significantly alter the electrooptical properties of the 2D-materials. Moreover, we observe a resonance induced modification of the PL-spectrum for the DBR embedded flake. Our system thus represents a versatile platform to resonantly enhance and tailor light-matter-interaction in 2D-materials. The gentle processing conditions would also allow the integration of other sensitive materials into these highly resonant structures.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (7)

H. Dinparasti Saleh, S. Vezzoli, L. Caspani, A. Branny, S. Kumar, B. D. Gerardot, and D. Faccio, “Towards spontaneous parametric down conversion from monolayer MoS2,” Sci. Rep. 8(1), 3862 (2018).
[PubMed]

E. Kim, J.-W. Cho, T. K. Nguyen, T. T. T. Nguyen, S. Yoon, J.-H. Choi, Y. C. Park, S.-K. Kim, Y. S. Kim, and D.-W. Kim, “MoS2 monolayers on Si and SiO2 nanocone arrays: influences of 3D dielectric material refractive index on 2D MoS2 optical absorption,” Nanoscale 10(40), 18920–18925 (2018).
[Crossref] [PubMed]

M. Waldherr, N. Lundt, M. Klaas, S. Betzold, M. Wurdack, V. Baumann, E. Estrecho, A. Nalitov, E. Cherotchenko, H. Cai, E. A. Ostrovskaya, A. V. Kavokin, S. Tongay, S. Klembt, S. Höfling, and C. Schneider, “Observation of bosonic condensation in a hybrid monolayer MoSe2-GaAs microcavity,” Nat. Commun. 9(1), 3286 (2018).
[Crossref] [PubMed]

I. Niehues, R. Schmidt, M. Drüppel, P. Marauhn, D. Christiansen, M. Selig, G. Berghäuser, D. Wigger, R. Schneider, L. Braasch, R. Koch, A. Castellanos-Gomez, T. Kuhn, A. Knorr, E. Malic, M. Rohlfing, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Strain Control of Exciton-Phonon Coupling in Atomically Thin Semiconductors,” Nano Lett. 18(3), 1751–1757 (2018).
[Crossref] [PubMed]

N. Lundt, E. Cherotchenko, O. Iff, X. Fan, Y. Shen, P. Bigenwald, A. V. Kavokin, S. Hofling, and C. Schneider, “The interplay between excitons and trions in a monolayer of MoSe2,” Appl. Phys. Lett. 112(3), 031107 (2018).
[Crossref]

A. Vaskin, J. Bohn, K. E. Chong, T. Bucher, M. Zilk, D.-Y. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Directional and Spectral Shaping of Light Emission with Mie-Resonant silicon Nanoantenna Arrays,” ACS Photonics 5(4), 1359–1364 (2018).
[Crossref]

O. Iff, N. Lundt, S. Betzold, L. N. Tripathi, M. Emmerling, S. Tongay, Y. J. Lee, S.-H. Kwon, S. Höfling, and C. Schneider, “Deterministic coupling of quantum emitters in WSe2 monolayers to plasmonic nanocavities,” Opt. Express 26(20), 25944–25951 (2018).
[Crossref] [PubMed]

2017 (8)

S. Dhara, C. Chakraborty, K. M. Goodfellow, L. Qiu, T. A. O’Loughlin, G. W. Wicks, S. Bhattacharjee, and A. N. Vamivakas, “Anomalous dispersion of microcavity trion-polaritons,” Nat. Phys. 14(2), 130–133 (2017).
[Crossref]

X.-X. Zhang, T. Cao, Z. Lu, Y.-C. Lin, F. Zhang, Y. Wang, Z. Li, J. C. Hone, J. A. Robinson, D. Smirnov, S. G. Louie, and T. F. Heinz, “Magnetic brightening and control of dark excitons in monolayer WSe2,” Nat. Nanotechnol. 12(9), 883–888 (2017).
[Crossref] [PubMed]

D. Zheng, S. Zhang, Q. Deng, M. Kang, P. Nordlander, and H. Xu, “Manipulating Coherent Plasmon-Exciton Interaction in a Single Silver Nanorod on Monolayer WSe2,” Nano Lett. 17(6), 3809–3814 (2017).
[Crossref] [PubMed]

T. K. Fryett, K. L. Seyler, J. Zheng, C.-H. Liu, X. Xu, and A. Majumdar, “Silicon photonic crystal cavity enhanced second-harmonic generation from monolayer WSe2,” 2D Mater. 4, 1 (2017).

C. Ruppert, A. Chernikov, H. M. Hill, A. F. Rigosi, and T. F. Heinz, “The Role of Electronic and Phononic Excitation in the Optical Response of Monolayer WS2 after Ultrafast Excitation,” Nano Lett. 17(2), 644–651 (2017).
[Crossref] [PubMed]

S. Lippert, L. M. Schneider, D. Renaud, K. N. Kang, O. Ajayi, J. Kuhnert, M.-U. Halbich, O. M. Abdulmunem, X. Lin, K. Hassoon, S. Edalati-Boostan, Y. D. Kim, W. Heimbrodt, E.-H. Yang, J. C. Hone, and A. Rahimi-Iman, “Influence of the substrate material on the optical properties of tungsten diselenide monolayers,” 2D Mater. 4, 025045 (2017).

D. Akinwande, C. J. Brennan, J. S. Bunch, P. Egberts, J. R. Felts, H. Gao, R. Huang, J.-S. Kim, T. Li, Y. Li, K. M. Liechti, N. Lu, H. S. Park, E. J. Reed, P. Wang, B. I. Yakobson, T. Zhang, Y.-W. Zhang, Y. Zhou, and Y. Zhu, “A review on mechanics and mechanical properties of 2D materials-Graphene and beyond,” Extreme Mech. Lett. 13, 42–77 (2017).
[Crossref]

K. Zhang, Y. Feng, F. Wang, Z. Yang, and J. Wang, “Two dimensional hexagonal boron nitride (2D-hbn): Synthesis, properties and applications,” J. Mater. Chem. C Mater. Opt. Electron. Devices 5(46), 11992–12022 (2017).
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2016 (7)

Y. Saito, Y. Nakamura, M. S. Bahramy, Y. Kohama, J. Ye, Y. Kasahara, Y. Nakagawa, M. Onga, M. Tokunaga, T. Nojima, Y. Yanase, and Y. Iwasa, “Superconductivity protected by spin-valley locking in ion-gated MoS2,” Nat. Phys. 12(2), 144–149 (2016).
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S. J. McDonnell and R. M. Wallace, “Atomically-thin layered films for device applications based upon 2D TMDC materials,” Thin Solid Films 616, 482–501 (2016).
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Y.-M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

I. Aharonovich, D. Englund, and M. Toth, “Solid-state single-photon emitters,” Nat. Photonics 10(10), 631–641 (2016).
[Crossref]

N. Lundt, S. Klembt, E. Cherotchenko, S. Betzold, O. Iff, A. V. Nalitov, M. Klaas, C. P. Dietrich, A. V. Kavokin, S. Höfling, and C. Schneider, “Room-temperature Tamm-plasmon exciton-polaritons with a WSe2 monolayer,” Nat. Commun. 7(1), 13328 (2016).
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N. Lundt, A. Marynski, E. Cherotchenko, A. Pant, X. Fan, S. Tongay, G. Sék, A. Kavokin, S. Höfling, and C. Schneider, “Monolayered MoSe2: A candidate for room temperature polaritonics,” 2D Mater. 4, 015006 (2016).

S. Wang, S. Li, T. Chervy, A. Shalabney, S. Azzini, E. Orgiu, J. A. Hutchison, C. Genet, P. Samorì, and T. W. Ebbesen, “Coherent Coupling of WS2 Monolayers with Metallic Photonic Nanostructures at Room Temperature,” Nano Lett. 16(7), 4368–4374 (2016).
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2015 (12)

Y. V. Morozov and M. Kuno, “Optical constants and dynamic conductivities of single layer MoS2, MoSe2, and WSe2,” Appl. Phys. Lett. 107(8), 083103 (2015).
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S. Dufferwiel, S. Schwarz, F. Withers, A. A. P. Trichet, F. Li, M. Sich, O. Del Pozo-Zamudio, C. Clark, A. Nalitov, D. D. Solnyshkov, G. Malpuech, K. S. Novoselov, J. M. Smith, M. S. Skolnick, D. N. Krizhanovskii, and A. I. Tartakovskii, “Exciton-polaritons in van der Waals heterostructures embedded in tunable microcavities,” Nat. Commun. 6(1), 8579 (2015).
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P. Tonndorf, R. Schmidt, R. Schneider, J. Kern, M. Buscema, G. A. Steele, A. Castellanos-Gomez, H. S. J. van der Zant, S. M. de Vasconcellos, and R. Bratschitsch, “Single-photon emission from localized excitons in an atomically thin semiconductor,” Optica 2(4), 347–352 (2015).
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K. Terpiowski, D. Rymuszka, O. V. Goncharuk, I. Y. Sulym, and V. M. Gunko, “Wettability of modified silica layers deposited on glass support activated by plasma,” Appl. Surf. Sci. 353, 843–850 (2015).
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A. Srivastava, M. Sidler, A. V. Allain, D. S. Lembke, A. Kis, and A. Imamoğlu, “Optically active quantum dots in monolayer WSe2,” Nat. Nanotechnol. 10(6), 491–496 (2015).
[Crossref] [PubMed]

C. Chakraborty, L. Kinnischtzke, K. M. Goodfellow, R. Beams, and A. N. Vamivakas, “Voltage-controlled quantum light from an atomically thin semiconductor,” Nat. Nanotechnol. 10(6), 507–511 (2015).
[Crossref] [PubMed]

G. Wang, X. Marie, I. Gerber, T. Amand, D. Lagarde, L. Bouet, M. Vidal, A. Balocchi, and B. Urbaszek, “Giant enhancement of the optical second-harmonic emission of WSe2 monolayers by laser excitation at exciton resonances,” Phys. Rev. Lett. 114(9), 097403 (2015).
[Crossref] [PubMed]

M. Palummo, M. Bernardi, and J. C. Grossman, “Exciton radiative lifetimes in two-dimensional transition metal dichalcogenides,” Nano Lett. 15(5), 2794–2800 (2015).
[Crossref] [PubMed]

Y. Liu, C. Tan, H. Chou, A. Nayak, D. Wu, R. Ghosh, H.-Y. Chang, Y. Hao, X. Wang, J.-S. Kim, R. Piner, R. S. Ruoff, D. Akinwande, and K. Lai, “Thermal Oxidation of WSe2 Nanosheets Adhered on SiO2/Si Substrates,” Nano Lett. 15(8), 4979–4984 (2015).
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C. Janisch, Y. Wang, D. Ma, N. Mehta, A. L. Elías, N. Perea-López, M. Terrones, V. Crespi, and Z. Liu, “Extraordinary Second Harmonic Generation in tungsten disulfide monolayers,” Sci. Rep. 4(1), 5530 (2015).
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J. C. Reed, A. Y. Zhu, H. Zhu, F. Yi, and E. Cubukcu, “Wavelength tunable microdisk cavity light source with a chemically enhanced MoS2 emitter,” Nano Lett. 15(3), 1967–1971 (2015).
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B. Zhu, X. Chen, and X. Cui, “Exciton binding energy of monolayer WS₂,” Sci. Rep. 5(1), 9218 (2015).
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2014 (6)

Q. Cui, F. Ceballos, N. Kumar, and H. Zhao, “Transient absorption microscopy of monolayer and bulk WSe2,” ACS Nano 8(3), 2970–2976 (2014).
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A. Chernikov, T. C. Berkelbach, H. M. Hill, A. Rigosi, Y. Li, O. B. Aslan, D. R. Reichman, M. S. Hybertsen, and T. F. Heinz, “Exciton binding energy and nonhydrogenic Rydberg series in monolayer WS(2),” Phys. Rev. Lett. 113(7), 076802 (2014).
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S. Wu, S. Buckley, A. M. Jones, J. S. Ross, N. J. Ghimire, J. Yan, D. G. Mandrus, W. Yao, F. Hatami, J. Vuckovic, A. Majumdar, and X. Xu, “Control of two-dimensional excitonic light emission via photonic crystal,” 2D Mater. 1, 011001 (2014).

C. Janisch, N. Mehta, D. Ma, A. L. Elías, N. Perea-López, M. Terrones, and Z. Liu, “Ultrashort optical pulse characterization using WS₂ monolayers,” Opt. Lett. 39(2), 383–385 (2014).
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X. Liu, T. Galfsky, Z. Sun, F. Xia, E. Lin, Y.-H. Lee, S. Kéna-Cohen, and V. M. Menon, “Strong light-matter coupling in two-dimensional atomic crystals,” Nat. Photonics 9(1), 30–34 (2014).
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Y. Li, A. Chernikov, X. Zhang, A. Rigosi, H. M. Hill, A. M. van der Zande, D. A. Chenet, E.-M. Shih, J. Hone, and T. F. Heinz, “Measurement of the optical dielectric function of monolayer transition-metal dichalcogenides: MoS2, MoSe2, WS2, and WSe2,” Phys. Rev. B Condens. Matter Mater. Phys. 90(20), 20 (2014).
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2013 (2)

2010 (3)

L. Song, L. Ci, H. Lu, P. B. Sorokin, C. Jin, J. Ni, A. G. Kvashnin, D. G. Kvashnin, J. Lou, B. I. Yakobson, and P. M. Ajayan, “Large scale growth and characterization of atomic hexagonal boron nitride layers,” Nano Lett. 10(8), 3209–3215 (2010).
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C. R. Dean, A. F. Young, I. Meric, C. Lee, L. Wang, S. Sorgenfrei, K. Watanabe, T. Taniguchi, P. Kim, K. L. Shepard, and J. Hone, “Boron nitride substrates for high-quality graphene electronics,” Nat. Nanotechnol. 5(10), 722–726 (2010).
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A. Splendiani, L. Sun, Y. Zhang, T. Li, J. Kim, C.-Y. Chim, G. Galli, and F. Wang, “Emerging photoluminescence in monolayer MoS2,” Nano Lett. 10(4), 1271–1275 (2010).
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2008 (1)

C. Lee, X. Wei, J. W. Kysar, and J. Hone, “Measurement of the elastic properties and intrinsic strength of monolayer graphene,” Science 321(5887), 385–388 (2008).
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2005 (1)

S. Bhattacharya, A. Datta, J. Berg, and S. Gangopadhyay, “Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength,” J. Microelectromech. Syst. 14(3), 590–597 (2005).
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2003 (1)

2002 (1)

R. Thielsch, A. Gatto, J. Heber, and N. Kaiser, “A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition,” Thin Solid Films 410(1-2), 86–93 (2002).
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2000 (2)

L. Martinu and D. Poitras, “Plasma deposition of optical films and coatings: A review,” J. Vac. Sci. Technol. A 18(6), 2619–2645 (2000).
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Y. Leprince-Wang, D. Souche, K. Yu-Zhang, S. Fisson, G. Vuye, and J. Rivory, “Relations between the optical properties and the microstructure of TiO2 thin films prepared by ion-assisted deposition,” Thin Solid Films 359(2), 171–176 (2000).
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1995 (1)

V. Savona, L. Andreani, P. Schwendimann, and A. Quattropani, “Quantum well excitons in semiconductor microcavities: Unified treatment of weak and strong coupling regimes,” Solid State Commun. 93(9), 733–739 (1995).
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1989 (1)

1974 (1)

K. Meyer, H.-J. Tiller, E. Welz, and W. Kühn, “Modifizierung von SiO2-Oberflächen mit Hilfe von Plasmen Teil 1 - EPR-spektroskopische Untersuchung der Defektzentren und der Einfluss des Plasmaträgergases auf deren Bildung,” Zeitschrift für Chemie 14(4), 146–150 (1974).
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Abdulmunem, O. M.

S. Lippert, L. M. Schneider, D. Renaud, K. N. Kang, O. Ajayi, J. Kuhnert, M.-U. Halbich, O. M. Abdulmunem, X. Lin, K. Hassoon, S. Edalati-Boostan, Y. D. Kim, W. Heimbrodt, E.-H. Yang, J. C. Hone, and A. Rahimi-Iman, “Influence of the substrate material on the optical properties of tungsten diselenide monolayers,” 2D Mater. 4, 025045 (2017).

Aharonovich, I.

I. Aharonovich, D. Englund, and M. Toth, “Solid-state single-photon emitters,” Nat. Photonics 10(10), 631–641 (2016).
[Crossref]

Ajayan, P. M.

L. Song, L. Ci, H. Lu, P. B. Sorokin, C. Jin, J. Ni, A. G. Kvashnin, D. G. Kvashnin, J. Lou, B. I. Yakobson, and P. M. Ajayan, “Large scale growth and characterization of atomic hexagonal boron nitride layers,” Nano Lett. 10(8), 3209–3215 (2010).
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Ajayi, O.

S. Lippert, L. M. Schneider, D. Renaud, K. N. Kang, O. Ajayi, J. Kuhnert, M.-U. Halbich, O. M. Abdulmunem, X. Lin, K. Hassoon, S. Edalati-Boostan, Y. D. Kim, W. Heimbrodt, E.-H. Yang, J. C. Hone, and A. Rahimi-Iman, “Influence of the substrate material on the optical properties of tungsten diselenide monolayers,” 2D Mater. 4, 025045 (2017).

Akinwande, D.

D. Akinwande, C. J. Brennan, J. S. Bunch, P. Egberts, J. R. Felts, H. Gao, R. Huang, J.-S. Kim, T. Li, Y. Li, K. M. Liechti, N. Lu, H. S. Park, E. J. Reed, P. Wang, B. I. Yakobson, T. Zhang, Y.-W. Zhang, Y. Zhou, and Y. Zhu, “A review on mechanics and mechanical properties of 2D materials-Graphene and beyond,” Extreme Mech. Lett. 13, 42–77 (2017).
[Crossref]

Y. Liu, C. Tan, H. Chou, A. Nayak, D. Wu, R. Ghosh, H.-Y. Chang, Y. Hao, X. Wang, J.-S. Kim, R. Piner, R. S. Ruoff, D. Akinwande, and K. Lai, “Thermal Oxidation of WSe2 Nanosheets Adhered on SiO2/Si Substrates,” Nano Lett. 15(8), 4979–4984 (2015).
[Crossref] [PubMed]

Albrand, G.

Albrecht, M.

Allain, A. V.

A. Srivastava, M. Sidler, A. V. Allain, D. S. Lembke, A. Kis, and A. Imamoğlu, “Optically active quantum dots in monolayer WSe2,” Nat. Nanotechnol. 10(6), 491–496 (2015).
[Crossref] [PubMed]

Allen, T. H.

Amand, T.

G. Wang, X. Marie, I. Gerber, T. Amand, D. Lagarde, L. Bouet, M. Vidal, A. Balocchi, and B. Urbaszek, “Giant enhancement of the optical second-harmonic emission of WSe2 monolayers by laser excitation at exciton resonances,” Phys. Rev. Lett. 114(9), 097403 (2015).
[Crossref] [PubMed]

Andreani, L.

V. Savona, L. Andreani, P. Schwendimann, and A. Quattropani, “Quantum well excitons in semiconductor microcavities: Unified treatment of weak and strong coupling regimes,” Solid State Commun. 93(9), 733–739 (1995).
[Crossref]

Aslan, O. B.

A. Chernikov, T. C. Berkelbach, H. M. Hill, A. Rigosi, Y. Li, O. B. Aslan, D. R. Reichman, M. S. Hybertsen, and T. F. Heinz, “Exciton binding energy and nonhydrogenic Rydberg series in monolayer WS(2),” Phys. Rev. Lett. 113(7), 076802 (2014).
[Crossref] [PubMed]

Azzini, S.

S. Wang, S. Li, T. Chervy, A. Shalabney, S. Azzini, E. Orgiu, J. A. Hutchison, C. Genet, P. Samorì, and T. W. Ebbesen, “Coherent Coupling of WS2 Monolayers with Metallic Photonic Nanostructures at Room Temperature,” Nano Lett. 16(7), 4368–4374 (2016).
[Crossref] [PubMed]

Bahramy, M. S.

Y. Saito, Y. Nakamura, M. S. Bahramy, Y. Kohama, J. Ye, Y. Kasahara, Y. Nakagawa, M. Onga, M. Tokunaga, T. Nojima, Y. Yanase, and Y. Iwasa, “Superconductivity protected by spin-valley locking in ion-gated MoS2,” Nat. Phys. 12(2), 144–149 (2016).
[Crossref]

Balocchi, A.

G. Wang, X. Marie, I. Gerber, T. Amand, D. Lagarde, L. Bouet, M. Vidal, A. Balocchi, and B. Urbaszek, “Giant enhancement of the optical second-harmonic emission of WSe2 monolayers by laser excitation at exciton resonances,” Phys. Rev. Lett. 114(9), 097403 (2015).
[Crossref] [PubMed]

Baumann, V.

M. Waldherr, N. Lundt, M. Klaas, S. Betzold, M. Wurdack, V. Baumann, E. Estrecho, A. Nalitov, E. Cherotchenko, H. Cai, E. A. Ostrovskaya, A. V. Kavokin, S. Tongay, S. Klembt, S. Höfling, and C. Schneider, “Observation of bosonic condensation in a hybrid monolayer MoSe2-GaAs microcavity,” Nat. Commun. 9(1), 3286 (2018).
[Crossref] [PubMed]

Y.-M. He, O. Iff, N. Lundt, V. Baumann, M. Davanco, K. Srinivasan, S. Höfling, and C. Schneider, “Cascaded emission of single photons from the biexciton in monolayered WSe2,” Nat. Commun. 7(1), 13409 (2016).
[Crossref] [PubMed]

Beams, R.

C. Chakraborty, L. Kinnischtzke, K. M. Goodfellow, R. Beams, and A. N. Vamivakas, “Voltage-controlled quantum light from an atomically thin semiconductor,” Nat. Nanotechnol. 10(6), 507–511 (2015).
[Crossref] [PubMed]

Bennett, J. M.

Berg, J.

S. Bhattacharya, A. Datta, J. Berg, and S. Gangopadhyay, “Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength,” J. Microelectromech. Syst. 14(3), 590–597 (2005).
[Crossref]

Berghäuser, G.

I. Niehues, R. Schmidt, M. Drüppel, P. Marauhn, D. Christiansen, M. Selig, G. Berghäuser, D. Wigger, R. Schneider, L. Braasch, R. Koch, A. Castellanos-Gomez, T. Kuhn, A. Knorr, E. Malic, M. Rohlfing, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Strain Control of Exciton-Phonon Coupling in Atomically Thin Semiconductors,” Nano Lett. 18(3), 1751–1757 (2018).
[Crossref] [PubMed]

Berkelbach, T. C.

A. Chernikov, T. C. Berkelbach, H. M. Hill, A. Rigosi, Y. Li, O. B. Aslan, D. R. Reichman, M. S. Hybertsen, and T. F. Heinz, “Exciton binding energy and nonhydrogenic Rydberg series in monolayer WS(2),” Phys. Rev. Lett. 113(7), 076802 (2014).
[Crossref] [PubMed]

Bernardi, M.

M. Palummo, M. Bernardi, and J. C. Grossman, “Exciton radiative lifetimes in two-dimensional transition metal dichalcogenides,” Nano Lett. 15(5), 2794–2800 (2015).
[Crossref] [PubMed]

Betzold, S.

O. Iff, N. Lundt, S. Betzold, L. N. Tripathi, M. Emmerling, S. Tongay, Y. J. Lee, S.-H. Kwon, S. Höfling, and C. Schneider, “Deterministic coupling of quantum emitters in WSe2 monolayers to plasmonic nanocavities,” Opt. Express 26(20), 25944–25951 (2018).
[Crossref] [PubMed]

M. Waldherr, N. Lundt, M. Klaas, S. Betzold, M. Wurdack, V. Baumann, E. Estrecho, A. Nalitov, E. Cherotchenko, H. Cai, E. A. Ostrovskaya, A. V. Kavokin, S. Tongay, S. Klembt, S. Höfling, and C. Schneider, “Observation of bosonic condensation in a hybrid monolayer MoSe2-GaAs microcavity,” Nat. Commun. 9(1), 3286 (2018).
[Crossref] [PubMed]

N. Lundt, S. Klembt, E. Cherotchenko, S. Betzold, O. Iff, A. V. Nalitov, M. Klaas, C. P. Dietrich, A. V. Kavokin, S. Höfling, and C. Schneider, “Room-temperature Tamm-plasmon exciton-polaritons with a WSe2 monolayer,” Nat. Commun. 7(1), 13328 (2016).
[Crossref] [PubMed]

Bhattacharjee, S.

S. Dhara, C. Chakraborty, K. M. Goodfellow, L. Qiu, T. A. O’Loughlin, G. W. Wicks, S. Bhattacharjee, and A. N. Vamivakas, “Anomalous dispersion of microcavity trion-polaritons,” Nat. Phys. 14(2), 130–133 (2017).
[Crossref]

Bhattacharya, S.

S. Bhattacharya, A. Datta, J. Berg, and S. Gangopadhyay, “Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength,” J. Microelectromech. Syst. 14(3), 590–597 (2005).
[Crossref]

Bigenwald, P.

N. Lundt, E. Cherotchenko, O. Iff, X. Fan, Y. Shen, P. Bigenwald, A. V. Kavokin, S. Hofling, and C. Schneider, “The interplay between excitons and trions in a monolayer of MoSe2,” Appl. Phys. Lett. 112(3), 031107 (2018).
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Bohn, J.

A. Vaskin, J. Bohn, K. E. Chong, T. Bucher, M. Zilk, D.-Y. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Directional and Spectral Shaping of Light Emission with Mie-Resonant silicon Nanoantenna Arrays,” ACS Photonics 5(4), 1359–1364 (2018).
[Crossref]

Borgogno, J. P.

Börner, J.

Böttger, P.

Bouet, L.

G. Wang, X. Marie, I. Gerber, T. Amand, D. Lagarde, L. Bouet, M. Vidal, A. Balocchi, and B. Urbaszek, “Giant enhancement of the optical second-harmonic emission of WSe2 monolayers by laser excitation at exciton resonances,” Phys. Rev. Lett. 114(9), 097403 (2015).
[Crossref] [PubMed]

Braasch, L.

I. Niehues, R. Schmidt, M. Drüppel, P. Marauhn, D. Christiansen, M. Selig, G. Berghäuser, D. Wigger, R. Schneider, L. Braasch, R. Koch, A. Castellanos-Gomez, T. Kuhn, A. Knorr, E. Malic, M. Rohlfing, S. Michaelis de Vasconcellos, and R. Bratschitsch, “Strain Control of Exciton-Phonon Coupling in Atomically Thin Semiconductors,” Nano Lett. 18(3), 1751–1757 (2018).
[Crossref] [PubMed]

Branny, A.

H. Dinparasti Saleh, S. Vezzoli, L. Caspani, A. Branny, S. Kumar, B. D. Gerardot, and D. Faccio, “Towards spontaneous parametric down conversion from monolayer MoS2,” Sci. Rep. 8(1), 3862 (2018).
[PubMed]

Bratschitsch, R.

Brennan, C. J.

D. Akinwande, C. J. Brennan, J. S. Bunch, P. Egberts, J. R. Felts, H. Gao, R. Huang, J.-S. Kim, T. Li, Y. Li, K. M. Liechti, N. Lu, H. S. Park, E. J. Reed, P. Wang, B. I. Yakobson, T. Zhang, Y.-W. Zhang, Y. Zhou, and Y. Zhu, “A review on mechanics and mechanical properties of 2D materials-Graphene and beyond,” Extreme Mech. Lett. 13, 42–77 (2017).
[Crossref]

Bucher, T.

A. Vaskin, J. Bohn, K. E. Chong, T. Bucher, M. Zilk, D.-Y. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Directional and Spectral Shaping of Light Emission with Mie-Resonant silicon Nanoantenna Arrays,” ACS Photonics 5(4), 1359–1364 (2018).
[Crossref]

Buckley, S.

S. Wu, S. Buckley, A. M. Jones, J. S. Ross, N. J. Ghimire, J. Yan, D. G. Mandrus, W. Yao, F. Hatami, J. Vuckovic, A. Majumdar, and X. Xu, “Control of two-dimensional excitonic light emission via photonic crystal,” 2D Mater. 1, 011001 (2014).

Bunch, J. S.

D. Akinwande, C. J. Brennan, J. S. Bunch, P. Egberts, J. R. Felts, H. Gao, R. Huang, J.-S. Kim, T. Li, Y. Li, K. M. Liechti, N. Lu, H. S. Park, E. J. Reed, P. Wang, B. I. Yakobson, T. Zhang, Y.-W. Zhang, Y. Zhou, and Y. Zhu, “A review on mechanics and mechanical properties of 2D materials-Graphene and beyond,” Extreme Mech. Lett. 13, 42–77 (2017).
[Crossref]

Buscema, M.

Cai, H.

M. Waldherr, N. Lundt, M. Klaas, S. Betzold, M. Wurdack, V. Baumann, E. Estrecho, A. Nalitov, E. Cherotchenko, H. Cai, E. A. Ostrovskaya, A. V. Kavokin, S. Tongay, S. Klembt, S. Höfling, and C. Schneider, “Observation of bosonic condensation in a hybrid monolayer MoSe2-GaAs microcavity,” Nat. Commun. 9(1), 3286 (2018).
[Crossref] [PubMed]

Cao, T.

X.-X. Zhang, T. Cao, Z. Lu, Y.-C. Lin, F. Zhang, Y. Wang, Z. Li, J. C. Hone, J. A. Robinson, D. Smirnov, S. G. Louie, and T. F. Heinz, “Magnetic brightening and control of dark excitons in monolayer WSe2,” Nat. Nanotechnol. 12(9), 883–888 (2017).
[Crossref] [PubMed]

Carniglia, C. K.

Caspani, L.

H. Dinparasti Saleh, S. Vezzoli, L. Caspani, A. Branny, S. Kumar, B. D. Gerardot, and D. Faccio, “Towards spontaneous parametric down conversion from monolayer MoS2,” Sci. Rep. 8(1), 3862 (2018).
[PubMed]

Castellanos-Gomez, A.

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Figures (9)

Fig. 1
Fig. 1 Conceptual image of the embedded TMDC in planar Fabry-Perot microcavity.
Fig. 2
Fig. 2 Increase of the cavity q-factor of a symmetric cavity in dependency of the number of DBR-pairs for each mirror.
Fig. 3
Fig. 3 a) Calculated reflectance curve for the optimized DBR-resonator with 10 HL layers at the bottom and 8 HL layer at the top. The resonance wavelength is 750 nm, illuminiation is at an angle of 0° from the top of the layer stack. b) Zoom to the resonance peak, marked with the blue dashed line in a).
Fig. 4
Fig. 4 a) Calculated normalized electric field intensity distribution for 750 nm input wavelength at an angle of 0°. The peak position is coincident with the position of the TMDC flake in the spacer area of the resonator (see schematic coating above the graph: blue = SiO2, yellow = TiO2, red = TMDC) b) Same as in a) but for non-resonant excitation at 752 nm wavelength. (schematic coating system was explained in Fig. 1)
Fig. 5
Fig. 5 Process steps for embedding 2D-monolayers into monolithical, optical DBR-cavites without damage to the TMDC flake.
Fig. 6
Fig. 6 a) Optical microscopy image of the 2D-materials without hBN from a preliminary run before (left) and after (right) treatment in the coating chamber. The integrity of the flakes is preserved. b) Scanning electron microscopy image of the deposited DBR-cavity from a preliminary run with the complete thickness of about 3.92 µm (just 9HL-pairs for bottom mirror for this specific sample). The layers have low individual and residual surface roughness, clear layer structure and a homogeneous spacer area in the middle
Fig. 7
Fig. 7 PL intensity of SiO2 covered layers. a) WSe2-PL hBN covered flakes for 20 nm and 120 nm SiO2 thickness b) MoSe2-PL for 20 nm and 120 nm SiO2 thickness at 300 K and 5 K
Fig. 8
Fig. 8 a) Reflectance spectra of a bare DBR mirror calculated (red) and measured (blue) b) Measured broadband reflectance spectrum of a DBR-resonator cavity without TMDC c) Measured narrowband spectrum of reflection intensity around the cavity’s resonance of TMDC loaded cavity at 749.3 nm with line width of 0.16 nm.
Fig. 9
Fig. 9 a) FIB-lamella with superimposed PL intensity-cross section. Prominent peaks occur in the spacer-area (marked with orange circle) and the substrate-area (marked with green circle) b) Spectrum of the PL-light collected at the positions of the peaks marked in (a), colors of spectra match the colors of the circles. The resonance position of the unperturbed cavity (749.3 nm) and the position of the excitonic peak the PL of MoSe2 (790 nm) are marked by the blue and purple vertical lines, respectively.

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